[Scan]
initial_time=2016-01-28T20:57:03
final_time=2016-01-28T20:57:23
ip_count=19
run=1026
dataset=7
scan=538
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.85836E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.50096E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.42771E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.59199E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.63638E-8
mult1=-1.00173E-8
mult2=-2.74256E-9
rf_tmon=-5.79819E-3
rf_agc=3.28469E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.28717E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=3.18061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05295E1
cs_ea1_imon=1.0914E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07253E0
lens1_imon=1.61947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64394E1
os_ef1alow_imon=2.96827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.40003E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84533E1
cs_ef1a_imon=3.04959E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.12893E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11367E1
os_restr1_imon=4.30034E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.47354E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64058E1
os_ef1bup_imon=3.10137E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=9.53359E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=1.95489E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.87016E-8
tplens_vset=1.4E-1
tplens_vmon=1.65323E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.58373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.33738E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=8.6629E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33876E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.14968E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42671E0
os_ea2_imon=-4.72318E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00382E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.18721E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05514E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76958E-1
os_ef2bup_imon=-5.06634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.37418E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.1071E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72366E1
iondef1_imon=1.09564E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69025E1
iondef4_imon=1.08885E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.80759E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.11323E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14288E0
cs_ionaccel_imon=-7.57025E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=2.2174E-1
window_imon=-1.22271E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39359E-4
mask2_vset=0.0E0
mask2_vmon=-1.86796E1
mask2_imon=-6.18015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.56214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.49678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.4241E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33172E1
os_fil1_imon=9.40289E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0876E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60119E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31811E1
cs_fil1_imon=7.94771E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.91702E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62939E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96504E-2
os_fil2_imon=-2.22899E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10349E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47556E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.02626E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.01862E-1
chamber_ion_pmon=1.1974E-7
chamber_cvt_pmon=2.51182E-3
foreline_cvt_pmon=2.51182E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10177E-1
res40_imon=-2.57458E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80014E1	-6.67572E-4	-8.8E1	2.38419E-4	4.43459E-3	9.35793E-2	2.72756E1	-3.26679E1	-3.26054E1	2.67998E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80017E1	-2.14577E-4	-8.80003E1	2.86102E-4	4.673E-3	9.35078E-2	2.73143E1	-3.26548E1	-3.26321E1	2.69049E1	1.198E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.44831E-2	-8.80016E1	-3.09944E-4	-8.79998E1	-7.15256E-5	4.48227E-3	9.34362E-2	2.72895E1	-3.26735E1	-3.26457E1	2.7037E1	1.20084E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.02277E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80013E1	-1.19209E-4	-8.79999E1	2.38419E-5	4.88758E-3	9.35793E-2	2.72835E1	-3.26789E1	-3.26056E1	2.68214E1	1.20243E-7	2.52025E-3	2.52025E-3	6.33388E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80016E1	-9.53674E-5	-8.79997E1	-7.15256E-5	4.76837E-3	9.35793E-2	2.73081E1	-3.26194E1	-3.2635E1	2.68719E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80018E1	-7.15256E-5	-8.8E1	7.15256E-5	4.36306E-3	9.34839E-2	2.72631E1	-3.26495E1	-3.26182E1	2.68345E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80015E1	-3.09944E-4	-8.8E1	4.05312E-4	4.43459E-3	9.34839E-2	2.72599E1	-3.26534E1	-3.2591E1	2.68627E1	1.1987E-7	2.51854E-3	2.51854E-3	6.33297E-3	3.00392E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80015E1	-3.09944E-4	-8.80001E1	3.57628E-4	4.50611E-3	9.36031E-2	2.72582E1	-3.26482E1	-3.26296E1	2.68569E1	1.1984E-7	2.51642E-3	2.51642E-3	6.31321E-3	2.99811E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80014E1	-4.52995E-4	-8.79999E1	-1.43051E-4	4.76837E-3	9.37939E-2	2.7347E1	-3.26396E1	-3.26201E1	2.6891E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80014E1	-6.67572E-4	-8.80001E1	1.43051E-4	4.81606E-3	9.36031E-2	2.72733E1	-3.26578E1	-3.2648E1	2.68912E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.03286E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80016E1	-2.14577E-4	-8.8E1	-7.15256E-5	4.81606E-3	9.38177E-2	2.73741E1	-3.26549E1	-3.26236E1	2.6675E1	1.19925E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80016E1	-3.57628E-4	-8.80005E1	7.15256E-5	4.45843E-3	9.38177E-2	2.72702E1	-3.2686E1	-3.26297E1	2.65992E1	1.20363E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80016E1	-5.96046E-4	-8.80003E1	0.0E0	4.50611E-3	9.35793E-2	2.72874E1	-3.26638E1	-3.25971E1	2.69101E1	1.20137E-7	2.51136E-3	2.51136E-3	6.30182E-3	3.01209E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80016E1	-4.05312E-4	-8.80001E1	2.6226E-4	4.55379E-3	9.38177E-2	2.72841E1	-3.26314E1	-3.26554E1	2.66568E1	1.20055E-7	2.51739E-3	2.51739E-3	6.28592E-3	2.99686E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80016E1	-6.19888E-4	-8.80001E1	2.86102E-4	4.64916E-3	9.40084E-2	2.73135E1	-3.26693E1	-3.26561E1	2.66262E1	1.20226E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80012E1	-7.39098E-4	-8.80001E1	2.38419E-4	4.33922E-3	9.35316E-2	2.72871E1	-3.26933E1	-3.25731E1	2.67103E1	1.20226E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80012E1	-6.91414E-4	-8.80004E1	2.38419E-4	4.8399E-3	9.35793E-2	2.73123E1	-3.26452E1	-3.2617E1	2.69055E1	1.20278E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80016E1	-7.86781E-4	-8.80005E1	2.6226E-4	4.57764E-3	9.35793E-2	2.72662E1	-3.26809E1	-3.26472E1	2.67162E1	1.20174E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80013E1	-6.4373E-4	-8.80005E1	-2.38419E-5	4.81606E-3	9.36508E-2	2.73555E1	-3.26642E1	-3.26028E1	2.6784E1	1.20311E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80015E1	-7.39098E-4	-8.80002E1	3.57628E-4	4.74453E-3	9.377E-2	2.72366E1	-3.26536E1	-3.2623E1	2.69025E1	1.1974E-7	2.51182E-3	2.51182E-3	6.31798E-3	3.01862E-1