[Scan]
initial_time=2016-01-28T20:57:30
final_time=2016-01-28T20:57:49
ip_count=19
run=1026
dataset=7
scan=539
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.79255E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-5.91624E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.44013E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.6066E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.62791E-8
mult1=-1.00053E-8
mult2=-2.76851E-9
rf_tmon=-4.10386E-3
rf_agc=3.39945E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=5.26857E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.1784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02402E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=1.06813E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05818E0
lens1_imon=1.51755E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.39474E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84034E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.13098E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.31256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.48019E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=9.46647E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93316E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.87118E-8
tplens_vset=1.4E-1
tplens_vmon=1.61139E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.48162E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98501E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=7.93993E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=8.63373E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34192E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44136E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00825E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.36652E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66034E1
iondef4_imon=1.10612E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.83929E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.12448E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-8.89599E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.85362E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86728E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.17012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.69426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33196E1
os_fil1_imon=9.39333E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08254E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6024E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31773E1
cs_fil1_imon=7.07675E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.55148E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63073E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25651E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2175E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20435E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18757E-1
res40_imon=-2.30596E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80012E1	-6.19888E-4	-8.80004E1	3.33786E-4	4.81606E-3	9.377E-2	2.73334E1	-3.26484E1	-3.26661E1	2.68016E1	1.20278E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80012E1	-3.8147E-4	-8.80003E1	-4.76837E-5	5.00679E-3	9.37462E-2	2.72585E1	-3.26502E1	-3.26242E1	2.68609E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80011E1	-6.19888E-4	-8.80002E1	-1.43051E-4	4.81606E-3	9.38416E-2	2.73346E1	-3.26767E1	-3.26236E1	2.66478E1	1.19697E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80013E1	-8.34465E-4	-8.80004E1	-1.43051E-4	5.10216E-3	9.34124E-2	2.73124E1	-3.26695E1	-3.26089E1	2.68881E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80016E1	-8.10623E-4	-8.80005E1	-2.6226E-4	4.24385E-3	9.35555E-2	2.73381E1	-3.26807E1	-3.26398E1	2.67938E1	1.20137E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00942E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80015E1	-9.53674E-4	-8.80007E1	7.15256E-5	4.86374E-3	9.35793E-2	2.73177E1	-3.26573E1	-3.25828E1	2.66785E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80011E1	-8.34465E-4	-8.80006E1	-1.43051E-4	5.48363E-3	9.35555E-2	2.72853E1	-3.26927E1	-3.26062E1	2.698E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.8001E1	-5.00679E-4	-8.80005E1	-4.76837E-5	5.14984E-3	9.37223E-2	2.72791E1	-3.26549E1	-3.26366E1	2.69524E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80011E1	-4.76837E-4	-8.80004E1	1.90735E-4	4.8399E-3	9.3627E-2	2.72787E1	-3.26416E1	-3.26254E1	2.69836E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80013E1	-6.91414E-4	-8.80005E1	-1.66893E-4	4.86374E-3	9.36031E-2	2.73558E1	-3.26543E1	-3.26254E1	2.69993E1	1.20174E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80012E1	-6.19888E-4	-8.80003E1	-3.33786E-4	4.98295E-3	9.35793E-2	2.72961E1	-3.26524E1	-3.26434E1	2.6837E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80012E1	-7.39098E-4	-8.80004E1	-1.19209E-4	4.69685E-3	9.39131E-2	2.73177E1	-3.26374E1	-3.26422E1	2.67037E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9952E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80013E1	-5.72205E-4	-8.80001E1	1.19209E-4	4.8399E-3	9.377E-2	2.72702E1	-3.26723E1	-3.26464E1	2.67902E1	1.20435E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.8001E1	-9.05991E-4	-8.79999E1	2.38419E-5	4.64916E-3	9.36508E-2	2.73393E1	-3.26609E1	-3.26524E1	2.6962E1	1.20226E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9874E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.16233E-2	-8.8001E1	-4.76837E-4	-8.80001E1	-3.33786E-4	4.88758E-3	9.37939E-2	2.7308E1	-3.26691E1	-3.26349E1	2.69145E1	1.20069E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.80013E1	-2.86102E-4	-8.80003E1	1.43051E-4	4.57764E-3	9.35555E-2	2.72793E1	-3.26176E1	-3.26567E1	2.68023E1	1.19902E-7	2.51096E-3	2.51096E-3	6.35059E-3	3.0071E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80012E1	-4.52995E-4	-8.80001E1	2.38419E-4	4.45843E-3	9.36508E-2	2.73149E1	-3.26829E1	-3.26358E1	2.69704E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80012E1	-9.77516E-4	-8.80006E1	9.53674E-5	4.74453E-3	9.35793E-2	2.72962E1	-3.26614E1	-3.26366E1	2.66851E1	1.20084E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.0201E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80012E1	-7.86781E-4	-8.80002E1	2.38419E-4	4.69685E-3	9.38416E-2	2.73327E1	-3.26795E1	-3.26014E1	2.68875E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80011E1	-1.0252E-3	-8.80003E1	1.43051E-4	4.50611E-3	9.38177E-2	2.73117E1	-3.2644E1	-3.2632E1	2.66034E1	1.20435E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1