[Scan]
initial_time=2016-01-28T20:58:23
final_time=2016-01-28T20:58:43
ip_count=19
run=1026
dataset=7
scan=541
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.82237E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.02734E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.42196E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.53701E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.62805E-8
mult1=-1.0185E-8
mult2=-3.05446E-9
rf_tmon=-2.79286E-3
rf_agc=3.41114E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.33485E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19594E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53603E1
cs_ef1b_imon=3.20459E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05395E1
cs_ea1_imon=1.08467E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04776E0
lens1_imon=1.63717E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.97487E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.39897E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8444E1
cs_ef1a_imon=3.05342E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.13743E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11031E1
os_restr1_imon=4.26836E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15199E1
os_ea1_imon=2.46009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63902E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23204E0
cs_ionrep_imon=9.33538E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=1.96636E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.87753E-8
tplens_vset=1.4E-1
tplens_vmon=1.63966E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26042E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26708E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02893E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.36086E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30224E0
ionrepsh_imon=8.52132E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3354E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74843E1
cs_ef2b_imon=3.13474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43615E0
os_ea2_imon=-7.97944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71032E1
cs_ef2a_imon=3.20355E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11364E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02444E-1
os_ef2bup_imon=-5.29918E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11106E1
os_restr2_imon=3.36549E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.09842E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72591E1
iondef1_imon=1.10095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.09859E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.89151E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.14764E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12145E0
cs_ionaccel_imon=-7.08371E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56596E1
einzel_imon=7.78862E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-1.03157E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.8686E1
mask2_imon=-5.5546E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.90192E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.5074E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.11617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=6.04373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33196E1
os_fil1_imon=9.42391E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07619E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60343E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3176E1
cs_fil1_imon=7.66969E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.26831E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63492E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17879E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21107E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28653E-1
cs_fil2_imon=-2.33324E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.63434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21865E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15389E-1
res40_imon=-2.35564E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80014E1	-9.53674E-4	-8.80008E1	9.53674E-5	4.64916E-3	9.37939E-2	2.7361E1	-3.26098E1	-3.2641E1	2.67073E1	1.19902E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80012E1	-8.34465E-4	-8.8E1	9.53674E-5	4.74453E-3	9.40561E-2	2.72757E1	-3.26681E1	-3.26374E1	2.68424E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80013E1	-8.10623E-4	-8.79999E1	2.6226E-4	5.34058E-3	9.37223E-2	2.71672E1	-3.26503E1	-3.26249E1	2.67816E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.00966E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80011E1	-5.96046E-4	-8.80001E1	7.15256E-5	5.03063E-3	9.35793E-2	2.74138E1	-3.265E1	-3.26086E1	2.67583E1	1.20042E-7	2.52131E-3	2.52131E-3	6.3445E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80009E1	-1.90735E-4	-8.80005E1	1.90735E-4	4.79221E-3	9.33409E-2	2.7227E1	-3.26476E1	-3.25924E1	2.66406E1	1.20084E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.9829E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80012E1	-3.57628E-4	-8.80003E1	-9.53674E-5	5.03063E-3	9.35078E-2	2.73039E1	-3.26585E1	-3.26356E1	2.66316E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80012E1	-3.8147E-4	-8.80005E1	-2.14577E-4	4.95911E-3	9.33409E-2	2.72933E1	-3.26655E1	-3.26077E1	2.66923E1	1.20278E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80014E1	-5.24521E-4	-8.80006E1	7.15256E-5	4.93526E-3	9.35793E-2	2.72702E1	-3.26615E1	-3.26398E1	2.67962E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80014E1	-5.96046E-4	-8.80005E1	-2.38419E-5	4.91142E-3	9.34839E-2	2.72961E1	-3.26158E1	-3.26128E1	2.68545E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.03185E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80016E1	-7.15256E-4	-8.80005E1	-9.53674E-5	5.00679E-3	9.38177E-2	2.73387E1	-3.26561E1	-3.2593E1	2.66281E1	1.19861E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80012E1	-7.62939E-4	-8.80002E1	-1.19209E-4	4.72069E-3	9.35793E-2	2.74072E1	-3.26723E1	-3.26182E1	2.68827E1	1.19749E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.8001E1	-8.82149E-4	-8.80004E1	2.86102E-4	4.57764E-3	9.37223E-2	2.72803E1	-3.26726E1	-3.26714E1	2.68502E1	1.20122E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.8001E1	-7.86781E-4	-8.80005E1	2.14577E-4	4.81606E-3	9.36031E-2	2.73184E1	-3.26556E1	-3.26335E1	2.69264E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80012E1	-8.10623E-4	-8.80007E1	1.43051E-4	4.69685E-3	9.37223E-2	2.72472E1	-3.26744E1	-3.26324E1	2.69398E1	1.19979E-7	2.52301E-3	2.52301E-3	6.3074E-3	3.00989E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80015E1	-6.67572E-4	-8.80003E1	-1.66893E-4	4.81606E-3	9.33886E-2	2.72886E1	-3.26455E1	-3.26408E1	2.66797E1	1.20226E-7	2.51642E-3	2.51642E-3	6.29581E-3	3.02025E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80017E1	-3.8147E-4	-8.80006E1	1.66893E-4	4.74453E-3	9.36031E-2	2.72709E1	-3.26431E1	-3.26284E1	2.66159E1	1.19705E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-7.11597E-2	-8.80013E1	-6.67572E-4	-8.80007E1	-1.19209E-4	4.74453E-3	9.34601E-2	2.73736E1	-3.26855E1	-3.26206E1	2.66568E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80016E1	-1.00136E-3	-8.80002E1	2.38419E-5	4.52995E-3	9.37223E-2	2.72132E1	-3.26609E1	-3.26236E1	2.68929E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80013E1	-8.58307E-4	-8.80006E1	0.0E0	4.57764E-3	9.34601E-2	2.74105E1	-3.27054E1	-3.25947E1	2.67966E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80012E1	-1.0252E-3	-8.80004E1	2.6226E-4	4.48227E-3	9.36985E-2	2.72591E1	-3.26708E1	-3.26042E1	2.68118E1	1.20106E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.01223E-1