[Scan]
initial_time=2016-01-28T20:59:16
final_time=2016-01-28T20:59:36
ip_count=19
run=1026
dataset=7
scan=543
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.72604E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.86855E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=1.45509E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.58485E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.62762E-8
mult1=-1.02441E-8
mult2=-2.6919E-9
rf_tmon=-4.26762E-3
rf_agc=3.35805E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.23973E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53395E1
cs_ef1b_imon=3.16879E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02231E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.09281E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04835E0
lens1_imon=1.54868E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6451E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.40605E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=3.04542E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.13657E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.31424E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.4746E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=9.51943E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01856E1
cs_anode1_imon=1.96705E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.8719E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-5.46679E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26207E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.58762E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.42488E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30224E0
ionrepsh_imon=8.493E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42966E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71188E1
cs_ef2a_imon=3.19451E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97231E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=3.37661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.31061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.09077E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73104E1
iondef1_imon=1.08927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.83419E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=7.11826E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-8.78659E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56394E1
einzel_imon=7.78167E-6
window_vset=0.0E0
window_vmon=2.15948E-1
window_imon=-9.96817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.86547E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.27899E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.86134E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.4418E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58863E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.39692E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08152E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59962E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31808E1
cs_fil1_imon=7.56543E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.4942E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63351E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01569E-2
os_fil2_imon=-2.42013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14404E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52239E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31525E-1
cs_fil2_imon=-2.19423E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55325E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21817E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.54196E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80013E1	-6.67572E-4	-8.80006E1	1.43051E-4	5.14984E-3	9.3317E-2	2.73093E1	-3.26506E1	-3.26068E1	2.68694E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02769E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80013E1	-7.15256E-4	-8.80003E1	-1.90735E-4	4.57764E-3	9.34124E-2	2.7258E1	-3.26542E1	-3.26352E1	2.68669E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.03712E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80012E1	-7.15256E-4	-8.80005E1	9.53674E-5	4.86374E-3	9.34124E-2	2.72425E1	-3.26498E1	-3.2655E1	2.66391E1	1.20244E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.01475E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80015E1	-9.53674E-4	-8.80005E1	-1.43051E-4	4.74453E-3	9.34839E-2	2.73063E1	-3.26543E1	-3.26083E1	2.67121E1	1.20142E-7	2.50657E-3	2.50657E-3	6.31269E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80013E1	-7.62939E-4	-8.80003E1	0.0E0	4.98295E-3	9.32217E-2	2.72903E1	-3.26602E1	-3.26455E1	2.6913E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.8001E1	-7.86781E-4	-8.80003E1	-1.19209E-4	4.93526E-3	9.32932E-2	2.73111E1	-3.26831E1	-3.26266E1	2.67529E1	1.20106E-7	2.52061E-3	2.52061E-3	6.26985E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80014E1	-7.15256E-4	-8.80002E1	-4.76837E-5	4.76837E-3	9.34601E-2	2.72973E1	-3.26536E1	-3.26416E1	2.67896E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80013E1	-1.04904E-3	-8.80002E1	-7.15256E-5	4.91142E-3	9.35078E-2	2.72931E1	-3.26516E1	-3.2618E1	2.68256E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.02133E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.11597E-2	-8.8001E1	-1.12057E-3	-8.80003E1	-2.38419E-5	4.74453E-3	9.34601E-2	2.72657E1	-3.26585E1	-3.26158E1	2.68537E1	1.20028E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.00741E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80009E1	-9.05991E-4	-8.80002E1	1.90735E-4	5.03063E-3	9.35555E-2	2.72839E1	-3.26679E1	-3.26119E1	2.68935E1	1.19775E-7	2.51952E-3	2.51952E-3	6.3074E-3	3.00794E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80012E1	-1.04904E-3	-8.80004E1	2.38419E-4	4.64916E-3	9.33886E-2	2.73189E1	-3.26302E1	-3.26603E1	2.67624E1	1.19856E-7	2.51376E-3	2.51376E-3	6.31012E-3	2.99475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.8001E1	-9.53674E-4	-8.80003E1	-4.76837E-5	4.79221E-3	9.37223E-2	2.72462E1	-3.26206E1	-3.26849E1	2.68835E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80013E1	-7.62939E-4	-8.80004E1	1.43051E-4	4.64916E-3	9.35793E-2	2.7301E1	-3.26962E1	-3.25883E1	2.67929E1	1.2033E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80015E1	-6.91414E-4	-8.80004E1	0.0E0	4.55379E-3	9.35316E-2	2.72561E1	-3.26444E1	-3.26162E1	2.6846E1	1.20122E-7	2.51279E-3	2.51279E-3	6.33486E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80012E1	-1.04904E-3	-8.80003E1	3.09944E-4	4.86374E-3	9.35555E-2	2.72618E1	-3.26753E1	-3.2635E1	2.6709E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80011E1	-9.29832E-4	-8.80004E1	-2.38419E-5	4.93526E-3	9.35555E-2	2.73139E1	-3.26567E1	-3.26437E1	2.68325E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9874E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80014E1	-6.67572E-4	-8.80003E1	2.38419E-4	4.86374E-3	9.33647E-2	2.73213E1	-3.26627E1	-3.26068E1	2.67397E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80011E1	-1.00136E-3	-8.80003E1	1.19209E-4	4.88758E-3	9.32693E-2	2.72541E1	-3.26839E1	-3.26243E1	2.6803E1	1.20106E-7	2.51471E-3	2.51471E-3	6.32356E-3	2.99302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80012E1	-9.77516E-4	-8.80002E1	1.43051E-4	4.48227E-3	9.32932E-2	2.73063E1	-3.26705E1	-3.26573E1	2.6792E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80013E1	-1.21593E-3	-8.80004E1	-4.76837E-5	5.03063E-3	9.34124E-2	2.73104E1	-3.26443E1	-3.26207E1	2.6789E1	1.20209E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99175E-1