[Scan]
initial_time=2016-01-28T20:59:43
final_time=2016-01-28T21:00:02
ip_count=19
run=1026
dataset=7
scan=544
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.81721E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.00302E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.36935E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.67573E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.6354E-8
mult1=-9.523E-9
mult2=-2.78009E-9
rf_tmon=-4.40329E-3
rf_agc=3.3026E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.60153E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63423E0
bslens_imon=2.56877E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1945E1
lens5a_imon=2.00007E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53468E1
cs_ef1b_imon=3.18911E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02477E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=1.07007E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07389E0
lens1_imon=1.66522E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64671E1
os_ef1alow_imon=2.97504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03574E1
cs_ea2_imon=1.35803E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=3.0454E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.14025E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11248E1
os_restr1_imon=4.3175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15404E1
os_ea1_imon=2.46066E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63642E1
os_ef1bup_imon=3.09143E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24047E0
cs_ionrep_imon=9.58047E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02015E1
cs_anode1_imon=1.97202E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.8888E-8
tplens_vset=1.4E-1
tplens_vmon=1.63898E0
tplens_imon=-1.05155E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26195E1
iondef3_imon=1.50054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26844E1
iondef2_imon=1.57364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.59892E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25822E0
ionrepsh_imon=8.53735E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33217E1
lens5b_imon=2.17307E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74695E1
cs_ef2b_imon=3.14457E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40514E0
os_ea2_imon=-1.05645E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00682E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7122E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08325E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02622E-1
os_ef2bup_imon=-5.26897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10942E1
os_restr2_imon=3.37587E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.31471E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01703E1
cs_anode2_imon=2.10339E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73281E1
iondef1_imon=1.08366E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68169E1
iondef4_imon=1.08728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.82377E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.1473E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11143E0
cs_ionaccel_imon=-8.82669E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47395E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56287E1
einzel_imon=7.80386E-6
window_vset=0.0E0
window_vmon=2.05121E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.3926E-4
mask2_vset=0.0E0
mask2_vmon=-1.86824E1
mask2_imon=-6.16946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.93865E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.56863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.36567E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31162E0
defgridb_imon=6.23807E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.399E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07891E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60268E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31774E1
cs_fil1_imon=7.16801E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76286E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63149E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97532E-2
os_fil2_imon=-2.54399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09057E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23012E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30862E-1
cs_fil2_imon=-2.37557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59156E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21771E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.84335E-1
res40_imon=-2.32356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=223
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80014E1	-7.39098E-4	-8.80005E1	-9.53674E-5	5.05447E-3	9.35793E-2	2.73228E1	-3.26455E1	-3.26278E1	2.68308E1	1.20278E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9978E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80014E1	-5.72205E-4	-8.80004E1	-7.15256E-5	4.88758E-3	9.36985E-2	2.72644E1	-3.26838E1	-3.25918E1	2.67259E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80011E1	-6.67572E-4	-8.80004E1	0.0E0	4.93526E-3	9.32932E-2	2.73085E1	-3.26659E1	-3.26078E1	2.68278E1	1.20042E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.006E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80012E1	-5.24521E-4	-8.80003E1	1.19209E-4	4.64916E-3	9.35316E-2	2.72951E1	-3.26572E1	-3.26435E1	2.67739E1	1.20344E-7	2.52236E-3	2.52236E-3	6.33388E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80012E1	-8.10623E-4	-8.80003E1	7.15256E-5	4.43459E-3	9.36747E-2	2.73267E1	-3.26591E1	-3.2623E1	2.67698E1	1.20084E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80013E1	-1.0252E-3	-8.80006E1	4.76837E-5	5.10216E-3	9.34601E-2	2.73267E1	-3.26362E1	-3.2626E1	2.68815E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80012E1	-4.76837E-4	-8.80006E1	9.53674E-5	4.52995E-3	9.33647E-2	2.72973E1	-3.26621E1	-3.26122E1	2.67481E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80014E1	-6.67572E-4	-8.80003E1	9.53674E-5	4.98295E-3	9.35793E-2	2.7285E1	-3.26608E1	-3.25835E1	2.67505E1	1.198E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80013E1	-8.34465E-4	-8.80004E1	9.53674E-5	4.8399E-3	9.39131E-2	2.73033E1	-3.26422E1	-3.26452E1	2.68244E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.97445E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80016E1	-1.04904E-3	-8.80003E1	9.53674E-5	4.79221E-3	9.35793E-2	2.72414E1	-3.26603E1	-3.26344E1	2.68028E1	1.19861E-7	2.51334E-3	2.51334E-3	6.28552E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80015E1	-1.09673E-3	-8.80002E1	7.15256E-5	4.673E-3	9.37939E-2	2.72769E1	-3.26627E1	-3.26344E1	2.68538E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80015E1	-8.82149E-4	-8.79999E1	9.53674E-5	4.93526E-3	9.35555E-2	2.73087E1	-3.26446E1	-3.26777E1	2.68274E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80014E1	-9.05991E-4	-8.80001E1	-2.6226E-4	4.91142E-3	9.40084E-2	2.73315E1	-3.26729E1	-3.26356E1	2.67998E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80013E1	-6.4373E-4	-8.80003E1	-4.52995E-4	4.95911E-3	9.37939E-2	2.72937E1	-3.26657E1	-3.25852E1	2.68094E1	1.20055E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80015E1	-5.00679E-4	-8.80002E1	4.76837E-5	5.05447E-3	9.33409E-2	2.73009E1	-3.26554E1	-3.26368E1	2.67569E1	1.19835E-7	2.51607E-3	2.51607E-3	6.3074E-3	2.97316E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80012E1	-7.39098E-4	-8.80004E1	-2.14577E-4	4.74453E-3	9.33647E-2	2.73411E1	-3.26639E1	-3.26008E1	2.67427E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80012E1	-5.72205E-4	-8.80003E1	-2.38419E-5	4.91142E-3	9.37223E-2	2.73476E1	-3.26903E1	-3.25794E1	2.68065E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.97963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80014E1	-8.10623E-4	-8.8E1	-2.38419E-4	4.79221E-3	9.36747E-2	2.72877E1	-3.26536E1	-3.26344E1	2.68322E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80017E1	-6.67572E-4	-8.80002E1	3.33786E-4	4.95911E-3	9.41038E-2	2.72998E1	-3.26537E1	-3.26543E1	2.67926E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80014E1	-3.57628E-4	-8.80003E1	-1.66893E-4	4.62532E-3	9.37462E-2	2.73281E1	-3.26844E1	-3.26195E1	2.68169E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1