[Scan]
initial_time=2016-01-28T21:01:30
final_time=2016-01-28T21:01:49
ip_count=19
run=1026
dataset=7
scan=548
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.82152E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.07181E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.45028E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.62047E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.6318E-8
mult1=-1.01623E-8
mult2=-2.7748E-9
rf_tmon=-4.93788E-3
rf_agc=3.3261E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.02515E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66728E0
bslens_imon=2.69732E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.98611E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05137E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53472E1
cs_ef1b_imon=3.19461E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05319E1
cs_ea1_imon=1.09358E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06532E0
lens1_imon=1.23548E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.39954E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.03568E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.12158E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.32121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15098E1
os_ea1_imon=2.46874E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26985E0
cs_ionrep_imon=9.33805E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93538E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.96386E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.8771E-8
tplens_vset=1.4E-1
tplens_vmon=1.66959E0
tplens_imon=-4.2103E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26199E1
iondef3_imon=1.52148E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.55307E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98676E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.51882E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31087E0
ionrepsh_imon=8.45287E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33725E1
lens5b_imon=2.19437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41555E0
os_ea2_imon=-7.33233E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00582E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.36544E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29304E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01401E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74312E1
iondef1_imon=1.10423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67996E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.69775E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=7.0648E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-1.01574E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.3934E-4
mask2_vset=0.0E0
mask2_vmon=-1.86993E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.65583E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.55394E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.06449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44032E0
defgridb_imon=6.06911E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33198E1
os_fil1_imon=9.40576E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07636E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.598E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31782E1
cs_fil1_imon=7.34104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.23313E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61319E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02788E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.80403E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68302E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80016E1	-7.62939E-4	-8.80006E1	-9.53674E-5	4.74453E-3	9.37462E-2	2.72926E1	-3.26573E1	-3.26533E1	2.67868E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97445E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80015E1	-5.72205E-4	-8.80005E1	2.14577E-4	4.98295E-3	9.39369E-2	2.72458E1	-3.26622E1	-3.26591E1	2.67926E1	1.19991E-7	2.52131E-3	2.52131E-3	6.31269E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80016E1	-7.15256E-4	-8.80002E1	1.19209E-4	5.07832E-3	9.36747E-2	2.7385E1	-3.26515E1	-3.26272E1	2.68453E1	1.2035E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01209E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80014E1	-9.05991E-4	-8.80004E1	1.19209E-4	4.64916E-3	9.36985E-2	2.72426E1	-3.26494E1	-3.2623E1	2.68088E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80015E1	-8.82149E-4	-8.80003E1	1.43051E-4	4.3869E-3	9.34839E-2	2.71623E1	-3.26655E1	-3.26349E1	2.67827E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80017E1	-7.86781E-4	-8.80005E1	-1.43051E-4	4.3869E-3	9.37939E-2	2.73572E1	-3.26364E1	-3.26011E1	2.67509E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80015E1	-8.10623E-4	-8.80004E1	7.15256E-5	4.60148E-3	9.35078E-2	2.73344E1	-3.26535E1	-3.26204E1	2.67988E1	1.20177E-7	2.51679E-3	2.51679E-3	6.323E-3	2.98522E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80017E1	-6.67572E-4	-8.80003E1	-2.6226E-4	4.8399E-3	9.33886E-2	2.71943E1	-3.26462E1	-3.26015E1	2.67972E1	1.1973E-7	2.52454E-3	2.52454E-3	6.29581E-3	3.00916E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80018E1	-7.86781E-4	-8.80002E1	-3.57628E-4	4.72069E-3	9.37939E-2	2.74024E1	-3.26675E1	-3.26356E1	2.68235E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80014E1	-7.62939E-4	-8.80003E1	-4.76837E-5	4.88758E-3	9.36508E-2	2.72727E1	-3.26697E1	-3.26467E1	2.68377E1	1.20096E-7	2.51935E-3	2.51935E-3	6.31014E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80018E1	-5.24521E-4	-8.80001E1	-9.53674E-5	4.76837E-3	9.36747E-2	2.73582E1	-3.26449E1	-3.25959E1	2.68358E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80017E1	-5.72205E-4	-8.80004E1	-9.53674E-5	4.93526E-3	9.37939E-2	2.72292E1	-3.26401E1	-3.26444E1	2.6819E1	1.19991E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.98842E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80014E1	-9.29832E-4	-8.80002E1	-1.43051E-4	4.64916E-3	9.38654E-2	2.737E1	-3.26484E1	-3.26119E1	2.68202E1	1.19925E-7	2.51025E-3	2.51025E-3	6.32418E-3	2.99879E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80015E1	-9.29832E-4	-8.80003E1	7.15256E-5	4.72069E-3	9.3627E-2	2.72349E1	-3.26738E1	-3.26266E1	2.67485E1	1.19953E-7	2.52599E-3	2.52599E-3	6.32356E-3	3.0148E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80014E1	-8.34465E-4	-8.80002E1	7.15256E-5	4.8399E-3	9.377E-2	2.73186E1	-3.26756E1	-3.25917E1	2.68268E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80015E1	-7.62939E-4	-8.80003E1	0.0E0	4.79221E-3	9.34362E-2	2.72886E1	-3.26944E1	-3.26537E1	2.67968E1	1.2033E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.02396E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80016E1	-6.91414E-4	-8.80002E1	-1.19209E-4	4.72069E-3	9.377E-2	2.72672E1	-3.26705E1	-3.26506E1	2.68058E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02511E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80014E1	-5.24521E-4	-8.80004E1	0.0E0	5.03063E-3	9.37223E-2	2.74637E1	-3.26272E1	-3.26356E1	2.67806E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80015E1	-7.86781E-4	-8.80003E1	-1.66893E-4	4.95911E-3	9.38654E-2	2.72495E1	-3.26469E1	-3.26422E1	2.68169E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02133E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80017E1	-5.72205E-4	-8.80004E1	1.19209E-4	4.91142E-3	9.38177E-2	2.74312E1	-3.26499E1	-3.26199E1	2.67996E1	1.20158E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99686E-1