[Scan]
initial_time=2016-01-28T21:03:16
final_time=2016-01-28T21:03:36
ip_count=19
run=1026
dataset=7
scan=552
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.8162E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-5.38111E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.41485E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.58269E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.62914E-8
mult1=-1.00668E-8
mult2=-2.78597E-9
rf_tmon=-3.95497E-3
rf_agc=3.38341E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=5.14531E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.66753E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12433E2
lens4a_imon=2.0488E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.17695E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=1.10454E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11285E0
lens1_imon=1.44545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.41024E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.05118E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.12257E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.30716E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15606E1
os_ea1_imon=2.45604E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17399E0
cs_ionrep_imon=9.5602E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=1.95809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.87052E-8
tplens_vset=1.4E-1
tplens_vmon=1.66667E0
tplens_imon=3.59147E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.48955E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26632E1
iondef2_imon=1.58869E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=8.64315E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=8.47151E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45818E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00475E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.20759E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.32235E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02127E1
cs_anode2_imon=2.09E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72502E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67469E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.81061E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82928E-1
olens1_imon=7.06998E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.22148E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39344E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.26385E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5369E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33212E1
os_fil1_imon=9.40102E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08116E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59978E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31747E1
cs_fil1_imon=7.28698E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.08897E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61108E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16999E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.73859E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21732E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.51794E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80015E1	-8.34465E-4	-8.80002E1	0.0E0	4.81606E-3	9.38416E-2	2.73529E1	-3.26697E1	-3.26083E1	2.67878E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80014E1	-9.53674E-4	-8.80003E1	0.0E0	4.86374E-3	9.36031E-2	2.72586E1	-3.26181E1	-3.26389E1	2.678E1	1.20304E-7	2.51389E-3	2.51389E-3	6.32386E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80015E1	-8.82149E-4	-8.79999E1	1.19209E-4	5.17368E-3	9.38416E-2	2.74326E1	-3.26637E1	-3.26127E1	2.67729E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80015E1	-5.24521E-4	-8.8E1	-3.33786E-4	5.126E-3	9.39369E-2	2.7261E1	-3.26389E1	-3.26334E1	2.68532E1	1.20042E-7	2.52025E-3	2.52025E-3	6.33388E-3	3.00097E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.43285E-2	-8.80014E1	-5.72205E-4	-8.80001E1	0.0E0	4.81606E-3	9.38416E-2	2.72809E1	-3.26691E1	-3.26307E1	2.6801E1	1.19713E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.00942E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80014E1	-1.04904E-3	-8.8E1	-3.8147E-4	4.76837E-3	9.36985E-2	2.73213E1	-3.26458E1	-3.2629E1	2.6786E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.46377E-2	-8.80014E1	-5.96046E-4	-8.80003E1	-2.6226E-4	4.673E-3	9.35555E-2	2.73021E1	-3.265E1	-3.26344E1	2.6792E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80016E1	-1.0252E-3	-8.80003E1	-1.19209E-4	4.91142E-3	9.37462E-2	2.72385E1	-3.26619E1	-3.26075E1	2.67816E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80013E1	-8.58307E-4	-8.80003E1	-2.38419E-5	4.88758E-3	9.41038E-2	2.73825E1	-3.26441E1	-3.26416E1	2.68275E1	1.20042E-7	2.52131E-3	2.52131E-3	6.31269E-3	2.99845E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80014E1	-8.34465E-4	-8.80005E1	9.53674E-5	5.126E-3	9.38177E-2	2.71843E1	-3.26837E1	-3.26128E1	2.67902E1	1.20045E-7	2.51384E-3	2.51384E-3	6.3131E-3	3.00522E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80016E1	-8.82149E-4	-8.80006E1	-3.09944E-4	5.14984E-3	9.37223E-2	2.73778E1	-3.26603E1	-3.26236E1	2.67589E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80015E1	-1.12057E-3	-8.80006E1	-5.96046E-4	5.14984E-3	9.36747E-2	2.71657E1	-3.26603E1	-3.26206E1	2.68082E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80016E1	-9.05991E-4	-8.80003E1	-2.14577E-4	5.29289E-3	9.37462E-2	2.73971E1	-3.26425E1	-3.26213E1	2.67911E1	1.19757E-7	2.50789E-3	2.50789E-3	6.33486E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80017E1	-7.62939E-4	-8.80003E1	-3.8147E-4	5.45979E-3	9.37462E-2	2.71983E1	-3.26585E1	-3.2662E1	2.68371E1	1.20158E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.03286E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.44059E-2	-8.80017E1	-6.91414E-4	-8.8E1	-1.66893E-4	5.31673E-3	9.37223E-2	2.73634E1	-3.2653E1	-3.26302E1	2.67812E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80014E1	-7.15256E-4	-8.80002E1	-4.76837E-5	5.34058E-3	9.35793E-2	2.73183E1	-3.26488E1	-3.26494E1	2.67866E1	1.20226E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80012E1	-4.52995E-4	-8.8E1	-2.38419E-5	5.05447E-3	9.36985E-2	2.72812E1	-3.26701E1	-3.26499E1	2.68016E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80009E1	-4.52995E-4	-8.80004E1	-5.24521E-4	4.88758E-3	9.36747E-2	2.72831E1	-3.26614E1	-3.26191E1	2.68166E1	1.19913E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.80012E1	-5.96046E-4	-8.79995E1	-7.15256E-5	5.38826E-3	9.38654E-2	2.74169E1	-3.26458E1	-3.26002E1	2.69067E1	1.20414E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80012E1	-5.72205E-4	-8.80003E1	7.15256E-5	5.26905E-3	9.39131E-2	2.72502E1	-3.26632E1	-3.26089E1	2.67469E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1