[Scan]
initial_time=2016-01-28T21:04:37
final_time=2016-01-28T21:04:56
ip_count=19
run=1026
dataset=7
scan=555
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.85458E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.98752E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.4097E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.55915E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.63826E-8
mult1=-9.38114E-9
mult2=-2.74089E-9
rf_tmon=-3.83699E-3
rf_agc=3.35274E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.51009E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=2.00578E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.19497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=1.09445E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06779E0
lens1_imon=1.45266E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04153E1
cs_ea2_imon=1.39258E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.04541E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.12062E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.47911E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.10019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=9.3403E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.86427E-8
tplens_vset=1.4E-1
tplens_vmon=1.63723E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.51731E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.59121E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.29291E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21485E0
ionrepsh_imon=8.54E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.14884E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41853E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01293E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73163E1
iondef1_imon=1.07462E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.89505E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.06717E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.23349E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39405E-4
mask2_vset=0.0E0
mask2_vmon=-1.86843E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.20256E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.3554E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=6.34098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33198E1
os_fil1_imon=9.39267E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07557E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59945E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31723E1
cs_fil1_imon=5.91748E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.30521E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61249E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.33754E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58649E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.96513E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21679E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27954E-3
inlet_lpb_pmon=3.01742E-1
chamber_ion_pmon=1.19872E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.40671E-1
res40_imon=-2.21225E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80015E1	-8.58307E-4	-8.80001E1	2.38419E-5	4.81606E-3	9.36747E-2	2.7391E1	-3.26609E1	-3.25996E1	2.67812E1	1.19913E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00041E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80014E1	-6.67572E-4	-8.79998E1	2.38419E-4	4.93526E-3	9.36031E-2	2.72786E1	-3.26697E1	-3.26089E1	2.68208E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80015E1	-8.58307E-4	-8.79999E1	2.14577E-4	4.69685E-3	9.377E-2	2.72561E1	-3.26219E1	-3.26508E1	2.68285E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.01738E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80018E1	-9.05991E-4	-8.80003E1	0.0E0	5.07832E-3	9.35078E-2	2.73255E1	-3.27005E1	-3.2641E1	2.6813E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80017E1	-1.0252E-3	-8.80001E1	-4.76837E-5	5.19753E-3	9.34362E-2	2.7285E1	-3.26756E1	-3.25971E1	2.68146E1	1.20466E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80018E1	-6.91414E-4	-8.80002E1	0.0E0	5.126E-3	9.34124E-2	2.72733E1	-3.26579E1	-3.26026E1	2.68226E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80019E1	-8.10623E-4	-8.80003E1	1.43051E-4	5.36442E-3	9.37462E-2	2.72594E1	-3.26771E1	-3.26398E1	2.68138E1	1.19913E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80015E1	-7.39098E-4	-8.80004E1	1.43051E-4	4.91142E-3	9.36031E-2	2.73039E1	-3.26697E1	-3.26166E1	2.6781E1	1.19978E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80015E1	-9.05991E-4	-8.80002E1	9.53674E-5	5.36442E-3	9.37223E-2	2.72593E1	-3.267E1	-3.26011E1	2.68117E1	1.20311E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80014E1	-1.00136E-3	-8.80006E1	7.15256E-5	5.29289E-3	9.34839E-2	2.72951E1	-3.26984E1	-3.26085E1	2.683E1	1.20142E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.01104E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80015E1	-1.16825E-3	-8.80002E1	2.38419E-4	5.34058E-3	9.34839E-2	2.72904E1	-3.26529E1	-3.26138E1	2.6807E1	1.201E-7	2.50931E-3	2.50931E-3	6.3245E-3	3.00522E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80015E1	-1.09673E-3	-8.80003E1	-1.19209E-4	5.07832E-3	9.35555E-2	2.72697E1	-3.2682E1	-3.26384E1	2.68058E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.98481E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80018E1	-9.53674E-4	-8.8E1	4.76837E-5	5.45979E-3	9.377E-2	2.72823E1	-3.2644E1	-3.2632E1	2.681E1	1.19851E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80016E1	-7.86781E-4	-8.80003E1	9.53674E-5	5.126E-3	9.39846E-2	2.74463E1	-3.27041E1	-3.26164E1	2.68016E1	1.2005E-7	2.52285E-3	2.52285E-3	6.32679E-3	2.99697E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.48695E-2	-8.80018E1	-6.91414E-4	-8.80004E1	0.0E0	5.19753E-3	9.35078E-2	2.72302E1	-3.2652E1	-3.26419E1	2.67776E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80017E1	-9.53674E-4	-8.80007E1	0.0E0	5.126E-3	9.35316E-2	2.73847E1	-3.26976E1	-3.26113E1	2.67932E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9841E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.45602E-2	-8.80017E1	-7.86781E-4	-8.80005E1	1.43051E-4	5.126E-3	9.3174E-2	2.73844E1	-3.26957E1	-3.26122E1	2.67812E1	1.19861E-7	2.52867E-3	2.52867E-3	6.31837E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80015E1	-8.10623E-4	-8.80002E1	5.24521E-4	4.81606E-3	9.30786E-2	2.72674E1	-3.2688E1	-3.26376E1	2.67526E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80015E1	-5.24521E-4	-8.80003E1	3.09944E-4	4.95911E-3	9.33886E-2	2.72582E1	-3.26855E1	-3.25882E1	2.6816E1	1.1979E-7	2.52025E-3	2.52025E-3	6.29157E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80018E1	-4.76837E-4	-8.80005E1	1.66893E-4	4.76837E-3	9.34124E-2	2.73163E1	-3.26596E1	-3.26119E1	2.67992E1	1.19872E-7	2.5147E-3	2.5147E-3	6.27954E-3	3.01742E-1