[Scan]
initial_time=2016-01-28T21:05:30
final_time=2016-01-28T21:05:50
ip_count=19
run=1026
dataset=7
scan=557
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.798E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.77939E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.45249E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.55725E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.63261E-8
mult1=-9.82677E-9
mult2=-2.68824E-9
rf_tmon=-3.70836E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.36799E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65225E0
bslens_imon=2.80313E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19775E1
lens5a_imon=2.00349E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05246E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53474E1
cs_ef1b_imon=3.18761E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02196E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05356E1
cs_ea1_imon=1.07396E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09083E0
lens1_imon=1.38805E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64802E1
os_ef1alow_imon=2.98327E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03965E1
cs_ea2_imon=1.41088E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84338E1
cs_ef1a_imon=3.04203E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.122E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11398E1
os_restr1_imon=4.31151E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15006E1
os_ea1_imon=2.46471E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63642E1
os_ef1bup_imon=3.09854E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.62024E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93386E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01865E1
cs_anode1_imon=1.9593E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.87285E-8
tplens_vset=1.4E-1
tplens_vmon=1.6745E0
tplens_imon=-5.32386E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.50485E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26514E1
iondef2_imon=1.60068E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.98814E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22776E0
ionrepsh_imon=8.67311E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.18693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74682E1
cs_ef2b_imon=3.13409E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42118E0
os_ea2_imon=-6.48472E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7117E1
cs_ef2a_imon=3.19023E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05892E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25701E-1
os_ef2bup_imon=-5.14921E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11061E1
os_restr2_imon=3.36314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.3049E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.08954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72205E1
iondef1_imon=1.09979E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68406E1
iondef4_imon=1.09327E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.81636E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.0891E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15946E0
cs_ionaccel_imon=-1.00617E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47234E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.90865E-6
window_vset=0.0E0
window_vmon=2.36933E-1
window_imon=-9.94946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86675E1
mask2_imon=-5.34609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=6.67402E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.26971E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.09705E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39E0
defgridb_imon=6.13494E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.41697E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59827E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31703E1
cs_fil1_imon=7.15553E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02244E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61139E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.13477E-2
os_fil2_imon=-2.27577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14671E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58421E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.26022E-1
cs_fil2_imon=-2.48785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.86602E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21707E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32129E-3
inlet_lpb_pmon=3.02051E-1
chamber_ion_pmon=1.20035E-7
chamber_cvt_pmon=2.5159E-3
foreline_cvt_pmon=2.5159E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.90573E-1
res40_imon=-2.23748E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80015E1	-9.05991E-4	-8.80004E1	-7.15256E-5	5.45979E-3	9.35555E-2	2.73033E1	-3.26815E1	-3.26242E1	2.67955E1	1.19829E-7	2.51384E-3	2.51384E-3	6.3245E-3	2.98361E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80018E1	-1.09673E-3	-8.80006E1	-1.66893E-4	5.34058E-3	9.35555E-2	2.73847E1	-3.2667E1	-3.26407E1	2.68232E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80015E1	-1.00136E-3	-8.80006E1	-2.38419E-5	5.50747E-3	9.35555E-2	2.7286E1	-3.26579E1	-3.26173E1	2.68099E1	1.19925E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.03081E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80013E1	-1.14441E-3	-8.80006E1	2.38419E-5	5.74589E-3	9.34601E-2	2.73207E1	-3.26128E1	-3.25936E1	2.6798E1	1.20042E-7	2.51182E-3	2.51182E-3	6.3445E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80013E1	-8.58307E-4	-8.80005E1	1.66893E-4	5.17368E-3	9.38416E-2	2.72829E1	-3.26458E1	-3.26278E1	2.6807E1	1.19913E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80014E1	-8.58307E-4	-8.80004E1	1.90735E-4	5.03063E-3	9.38177E-2	2.72449E1	-3.26555E1	-3.26089E1	2.67938E1	1.19697E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80015E1	-4.76837E-4	-8.80005E1	1.19209E-4	4.88758E-3	9.35078E-2	2.73502E1	-3.26236E1	-3.26332E1	2.67914E1	1.19965E-7	2.51116E-3	2.51116E-3	6.33486E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80013E1	-7.15256E-4	-8.80003E1	9.53674E-5	4.81606E-3	9.36985E-2	2.73538E1	-3.26717E1	-3.26152E1	2.6825E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80013E1	-8.34465E-4	-8.80003E1	-1.43051E-4	5.45979E-3	9.35316E-2	2.72901E1	-3.26777E1	-3.2644E1	2.68172E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80014E1	-6.67572E-4	-8.80006E1	7.15256E-5	5.17368E-3	9.35793E-2	2.7299E1	-3.2634E1	-3.26229E1	2.68058E1	1.19653E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80014E1	-9.29832E-4	-8.80005E1	-1.19209E-4	5.34058E-3	9.38416E-2	2.72744E1	-3.26408E1	-3.26372E1	2.67722E1	1.19872E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.9829E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.43285E-2	-8.80014E1	-7.15256E-4	-8.80003E1	-9.53674E-5	5.43594E-3	9.38416E-2	2.73375E1	-3.26697E1	-3.26101E1	2.6792E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0071E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80016E1	-7.39098E-4	-8.80006E1	1.43051E-4	5.24521E-3	9.38654E-2	2.73285E1	-3.26579E1	-3.26717E1	2.681E1	1.20122E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80014E1	-6.67572E-4	-8.80005E1	1.19209E-4	5.14984E-3	9.38892E-2	2.73806E1	-3.27086E1	-3.25481E1	2.67781E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.41738E-2	-8.80014E1	-8.34465E-4	-8.80004E1	0.0E0	5.10216E-3	9.377E-2	2.7318E1	-3.27007E1	-3.25905E1	2.68045E1	1.20174E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.98481E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.45602E-2	-8.80015E1	-6.4373E-4	-8.80004E1	-4.76837E-5	5.26905E-3	9.37223E-2	2.72895E1	-3.26729E1	-3.26344E1	2.68165E1	1.19913E-7	2.52428E-3	2.52428E-3	6.28552E-3	2.98222E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.46377E-2	-8.80014E1	-7.62939E-4	-8.80006E1	2.14577E-4	5.10216E-3	9.3627E-2	2.72163E1	-3.26391E1	-3.26846E1	2.6814E1	1.19601E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80017E1	-1.12057E-3	-8.80004E1	2.6226E-4	5.03063E-3	9.36985E-2	2.72961E1	-3.26452E1	-3.26434E1	2.67764E1	1.20177E-7	2.52093E-3	2.52093E-3	6.3126E-3	3.00247E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80017E1	-9.29832E-4	-8.80003E1	9.53674E-5	5.00679E-3	9.37939E-2	2.73581E1	-3.26744E1	-3.26193E1	2.67742E1	1.19925E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00942E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80014E1	-5.00679E-4	-8.80003E1	2.6226E-4	4.86374E-3	9.36508E-2	2.72205E1	-3.26514E1	-3.26549E1	2.68406E1	1.20035E-7	2.5159E-3	2.5159E-3	6.32129E-3	3.02051E-1