[Scan]
initial_time=2016-01-28T21:06:23
final_time=2016-01-28T21:06:43
ip_count=19
run=1026
dataset=7
scan=559
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.85554E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.66566E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.42858E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.48699E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.63066E-8
mult1=-9.32034E-9
mult2=-2.74467E-9
rf_tmon=-4.25287E-3
rf_agc=3.41615E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.12946E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.57511E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19441E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53777E1
cs_ef1b_imon=3.19416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=1.07653E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07017E0
lens1_imon=1.52391E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97661E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.39437E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=3.04125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.12474E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.30173E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.46433E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27274E0
cs_ionrep_imon=9.4805E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93555E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=1.95593E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.86882E-8
tplens_vset=1.4E-1
tplens_vmon=1.63789E0
tplens_imon=-1.07759E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26668E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.48973E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25151E0
ionrepsh_imon=8.46823E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33374E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.14481E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43497E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71188E1
cs_ef2a_imon=3.19243E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09916E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80434E-1
os_ef2bup_imon=-5.27485E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10822E1
os_restr2_imon=3.3714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.31309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01792E1
cs_anode2_imon=2.0932E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73023E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6817E1
iondef4_imon=1.09407E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.77031E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=7.09011E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-9.41213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.92068E-6
window_vset=0.0E0
window_vmon=2.08418E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39348E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-5.03332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.99395E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.55341E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.33562E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51186E0
defgridb_imon=6.13576E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33172E1
os_fil1_imon=9.41007E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07926E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59863E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31797E1
cs_fil1_imon=6.99202E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.92281E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61352E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14232E-2
os_fil2_imon=-2.34483E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.23092E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.71475E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.4375E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21667E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31462E-3
inlet_lpb_pmon=3.01666E-1
chamber_ion_pmon=1.19974E-7
chamber_cvt_pmon=2.51846E-3
foreline_cvt_pmon=2.51846E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.81216E-1
res40_imon=-2.39039E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80017E1	-6.19888E-4	-8.80001E1	3.09944E-4	4.76837E-3	9.32693E-2	2.72769E1	-3.26434E1	-3.26236E1	2.68076E1	1.20209E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80016E1	-5.96046E-4	-8.80004E1	2.6226E-4	5.03063E-3	9.34124E-2	2.73124E1	-3.26444E1	-3.26487E1	2.6804E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80017E1	-1.04904E-3	-8.80006E1	1.43051E-4	5.00679E-3	9.34362E-2	2.72721E1	-3.26254E1	-3.26359E1	2.67998E1	1.20031E-7	2.52362E-3	2.52362E-3	6.30182E-3	2.98554E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80019E1	-9.05991E-4	-8.80003E1	2.14577E-4	5.19753E-3	9.35078E-2	2.72384E1	-3.26705E1	-3.26242E1	2.67944E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.98342E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80018E1	-5.00679E-4	-8.80003E1	1.90735E-4	5.00679E-3	9.35316E-2	2.72925E1	-3.26543E1	-3.2611E1	2.67914E1	1.20137E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.00144E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80017E1	-8.10623E-4	-8.80003E1	7.15256E-5	4.98295E-3	9.32693E-2	2.73139E1	-3.26832E1	-3.26001E1	2.68274E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80014E1	-8.10623E-4	-8.80003E1	-1.19209E-4	5.22137E-3	9.32932E-2	2.73063E1	-3.26838E1	-3.25971E1	2.67692E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80015E1	-8.82149E-4	-8.80004E1	4.76837E-5	5.22137E-3	9.31263E-2	2.72859E1	-3.2596E1	-3.26717E1	2.68256E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80015E1	-5.24521E-4	-8.80002E1	4.76837E-5	4.48227E-3	9.34362E-2	2.72607E1	-3.26539E1	-3.26203E1	2.67858E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.98156E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80017E1	-6.19888E-4	-8.80003E1	1.19209E-4	4.55379E-3	9.33886E-2	2.73274E1	-3.26578E1	-3.26324E1	2.68218E1	1.20078E-7	2.51369E-3	2.51369E-3	6.3074E-3	3.01237E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80016E1	-9.29832E-4	-8.80003E1	2.38419E-4	4.93526E-3	9.35793E-2	2.73057E1	-3.26813E1	-3.26314E1	2.68157E1	1.19895E-7	2.51874E-3	2.51874E-3	6.31902E-3	2.99811E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80018E1	-6.91414E-4	-8.80002E1	-4.76837E-5	4.86374E-3	9.3627E-2	2.73287E1	-3.26714E1	-3.26154E1	2.6801E1	1.19991E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00432E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80015E1	-1.00136E-3	-8.80005E1	2.38419E-5	4.79221E-3	9.35078E-2	2.72811E1	-3.26386E1	-3.25797E1	2.68166E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80018E1	-8.34465E-4	-8.80003E1	-9.53674E-5	4.93526E-3	9.35078E-2	2.71867E1	-3.25521E1	-3.26843E1	2.67704E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.44059E-2	-8.80017E1	-8.10623E-4	-8.80002E1	2.14577E-4	4.95911E-3	9.34601E-2	2.73556E1	-3.26723E1	-3.26512E1	2.68082E1	1.198E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80016E1	-6.67572E-4	-8.80002E1	1.90735E-4	5.03063E-3	9.35793E-2	2.72955E1	-3.26843E1	-3.26026E1	2.68028E1	1.20069E-7	2.51716E-3	2.51716E-3	6.3074E-3	3.02265E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80018E1	-9.05991E-4	-8.80004E1	1.90735E-4	4.79221E-3	9.37939E-2	2.71871E1	-3.25358E1	-3.2685E1	2.67824E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.43285E-2	-8.80018E1	-8.82149E-4	-8.80004E1	3.09944E-4	4.72069E-3	9.33886E-2	2.7298E1	-3.26632E1	-3.2629E1	2.68117E1	1.20069E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80017E1	-1.04904E-3	-8.8E1	-2.38419E-5	4.88758E-3	9.33647E-2	2.73093E1	-3.26789E1	-3.26074E1	2.68346E1	1.20243E-7	2.51603E-3	2.51603E-3	6.31798E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80018E1	-8.82149E-4	-8.80003E1	0.0E0	4.91142E-3	9.377E-2	2.73023E1	-3.26668E1	-3.26056E1	2.6817E1	1.19974E-7	2.51846E-3	2.51846E-3	6.31462E-3	3.01666E-1