[Scan]
initial_time=2016-01-28T21:08:48
final_time=2016-01-28T21:09:07
ip_count=19
run=1026
dataset=8
scan=564
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.19898E-1
ql1_imon=1.62986E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=1.88749E-9
ql3_vset=
ql3_vmon=-9.13064E0
ql3_imon=7.07307E-9
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=-8.01432E-10
mult1=-1.0847E-8
mult2=-2.77225E-9
rf_tmon=-4.44459E-3
rf_agc=3.40583E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.52339E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.63509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=2.00254E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12437E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.18488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02391E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=1.08616E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42002E0
lens1_imon=2.72521E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.40015E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.03532E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.12071E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.31328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.4874E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21545E0
cs_ionrep_imon=9.5566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=1.96927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.06228E-8
tplens_vset=1.4E-1
tplens_vmon=1.64924E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26042E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26508E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.85468E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=8.55802E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34048E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42874E0
os_ea2_imon=-3.8947E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70999E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0924E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.3658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.0858E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67656E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.379E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.08189E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-8.03104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.85362E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.7397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=6.62216E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.42967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.34098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.41141E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08476E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59863E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=7.58732E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68963E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61423E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57875E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59873E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21808E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.59002E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=141
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.20971E-1	-7.98798E-1	-9.132E0	-9.14223E0	5.03063E-3	9.33647E-2	2.72871E1	-3.26561E1	-3.26543E1	2.6771E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.20684E-1	-7.98655E-1	-9.13188E0	-9.14176E0	5.17368E-3	9.34124E-2	2.72827E1	-3.26537E1	-3.26077E1	2.67902E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02659E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.20303E-1	-7.98655E-1	-9.132E0	-9.1419E0	5.22137E-3	9.33647E-2	2.72803E1	-3.26767E1	-3.26608E1	2.68123E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9943E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.20112E-1	-7.98631E-1	-9.13155E0	-9.14185E0	5.24521E-3	9.32693E-2	2.73225E1	-3.26777E1	-3.26374E1	2.6819E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.19802E-1	-7.98583E-1	-9.13167E0	-9.14159E0	4.69685E-3	9.34601E-2	2.72945E1	-3.26697E1	-3.25853E1	2.68148E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.20041E-1	-7.98416E-1	-9.13181E0	-9.1419E0	4.72069E-3	9.35078E-2	2.72933E1	-3.26685E1	-3.26431E1	2.681E1	1.20158E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09673E0	-8.19993E-1	-7.98631E-1	-9.13177E0	-9.1418E0	4.69685E-3	9.35793E-2	2.73062E1	-3.26795E1	-3.26271E1	2.6802E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.19778E-1	-7.98535E-1	-9.13222E0	-9.14178E0	4.673E-3	9.32693E-2	2.73082E1	-3.26609E1	-3.26254E1	2.68157E1	1.19967E-7	2.5165E-3	2.5165E-3	6.33809E-3	2.98696E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.19707E-1	-7.98702E-1	-9.13196E0	-9.14173E0	4.76837E-3	9.35555E-2	2.72889E1	-3.26585E1	-3.26062E1	2.6792E1	1.20226E-7	2.51411E-3	2.51411E-3	6.3016E-3	2.98985E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.19683E-1	-7.98821E-1	-9.13136E0	-9.14185E0	4.79221E-3	9.31263E-2	2.73476E1	-3.26531E1	-3.26632E1	2.68036E1	1.20017E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02659E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.19755E-1	-7.98631E-1	-9.13155E0	-9.14152E0	4.43459E-3	9.39608E-2	2.73291E1	-3.26663E1	-3.26146E1	2.67968E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.19468E-1	-7.98583E-1	-9.13169E0	-9.14168E0	4.48227E-3	9.37462E-2	2.72968E1	-3.26726E1	-3.2629E1	2.67968E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99175E-1
1.6E1	0.0E0	1.0E0	6.47E2	4.41E2	-2.09426E0	-8.19492E-1	-7.98368E-1	-9.13191E0	-9.14156E0	4.64916E-3	9.37223E-2	2.73346E1	-3.26856E1	-3.25918E1	2.67824E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.19588E-1	-7.98512E-1	-9.13141E0	-9.14173E0	4.79221E-3	9.33886E-2	2.7412E1	-3.27636E1	-3.26062E1	2.68267E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.0071E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.19707E-1	-7.99227E-1	-9.13138E0	-9.14228E0	4.48227E-3	9.38177E-2	2.72961E1	-3.26482E1	-3.2599E1	2.68519E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.19921E-1	-7.98845E-1	-9.13093E0	-9.14199E0	4.673E-3	9.37223E-2	2.73093E1	-3.2641E1	-3.26458E1	2.68053E1	1.20069E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.02133E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-8.19898E-1	-7.98893E-1	-9.13086E0	-9.14185E0	4.72069E-3	9.36985E-2	2.73688E1	-3.27522E1	-3.25533E1	2.68124E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.19921E-1	-7.9875E-1	-9.13107E0	-9.1418E0	4.72069E-3	9.36508E-2	2.72721E1	-3.26484E1	-3.26107E1	2.67974E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.19755E-1	-7.98678E-1	-9.13081E0	-9.14176E0	4.45843E-3	9.33886E-2	2.73098E1	-3.26626E1	-3.26531E1	2.68325E1	1.20055E-7	2.50989E-3	2.50989E-3	6.29665E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.19898E-1	-7.98821E-1	-9.13064E0	-9.14223E0	4.673E-3	9.38177E-2	2.73257E1	-3.26508E1	-3.26042E1	2.67656E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1