[Scan]
initial_time=2016-01-28T21:10:34
final_time=2016-01-28T21:10:53
ip_count=19
run=1026
dataset=8
scan=568
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09711E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.17966E-1
ql1_imon=1.43153E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.0075E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=1.83859E-9
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-3.80874E-10
mult1=-9.3094E-9
mult2=-2.73195E-9
rf_tmon=-5.55021E-3
rf_agc=3.30588E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.6786E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66438E0
bslens_imon=2.48699E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19806E1
lens5a_imon=1.9729E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.19368E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.01982E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04293E1
cs_ea1_imon=1.10365E-5
lens1_vset=-5.0E0
lens1_vmon=-5.46791E0
lens1_imon=2.78098E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64842E1
os_ef1alow_imon=2.97688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.39644E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84414E1
cs_ef1a_imon=3.04343E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.12328E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11266E1
os_restr1_imon=4.30376E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15545E1
os_ea1_imon=2.47983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63869E1
os_ef1bup_imon=3.09364E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22561E0
cs_ionrep_imon=9.58242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93285E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01822E1
cs_anode1_imon=1.975E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.08856E-8
tplens_vset=1.4E-1
tplens_vmon=1.63349E0
tplens_imon=-2.93975E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26327E1
iondef3_imon=1.51086E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.56767E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98552E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.96853E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26468E0
ionrepsh_imon=8.36674E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18703E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74865E1
cs_ef2b_imon=3.12556E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4567E0
os_ea2_imon=-6.07827E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71005E1
cs_ef2a_imon=3.21314E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09154E0
os_ef2alow_imon=-2.60336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71908E-1
os_ef2bup_imon=-5.06328E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11084E1
os_restr2_imon=3.3735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.29332E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01439E1
cs_anode2_imon=2.1159E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73229E1
iondef1_imon=1.06789E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.08445E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.73458E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.07047E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14182E0
cs_ionaccel_imon=-8.20692E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56204E1
einzel_imon=7.60999E-6
window_vset=0.0E0
window_vmon=2.51604E-1
window_imon=-7.89553E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.87084E1
mask2_imon=-4.12002E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92694E3
multa_neg_imon=7.2623E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.84516E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.07558E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39905E0
defgridb_imon=6.01087E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33199E1
os_fil1_imon=9.41668E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07576E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5978E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=6.63082E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02961E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61298E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14051E-2
os_fil2_imon=-2.51604E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.36877E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46182E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28393E-1
cs_fil2_imon=-2.27602E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.66167E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21735E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29067E-3
inlet_lpb_pmon=3.0201E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40085E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95163E-1
res40_imon=-2.26473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.18753E-1	-7.98917E-1	-9.13095E0	-9.14202E0	5.19753E-3	9.3627E-2	2.73706E1	-3.26938E1	-3.26514E1	2.6807E1	1.19991E-7	2.52113E-3	2.52113E-3	6.32592E-3	3.00139E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18491E-1	-7.99084E-1	-9.13088E0	-9.14185E0	5.05447E-3	9.37223E-2	2.73081E1	-3.26633E1	-3.26062E1	2.67926E1	1.19851E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.18396E-1	-7.98869E-1	-9.13091E0	-9.14171E0	5.24521E-3	9.34362E-2	2.72681E1	-3.26619E1	-3.26146E1	2.68076E1	1.20158E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01995E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.18682E-1	-7.98798E-1	-9.13084E0	-9.14185E0	5.10216E-3	9.40084E-2	2.72978E1	-3.2667E1	-3.2604E1	2.68444E1	1.20243E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.18443E-1	-7.98917E-1	-9.13103E0	-9.14187E0	5.29289E-3	9.39369E-2	2.72727E1	-3.26567E1	-3.26399E1	2.67833E1	1.19713E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18753E-1	-7.9906E-1	-9.13074E0	-9.14164E0	5.24521E-3	9.32693E-2	2.72396E1	-3.26957E1	-3.25906E1	2.67968E1	1.20042E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.99093E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.18586E-1	-7.98869E-1	-9.13081E0	-9.14207E0	5.34058E-3	9.35555E-2	2.73375E1	-3.26134E1	-3.2638E1	2.68304E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.18372E-1	-7.98965E-1	-9.13086E0	-9.14199E0	5.34058E-3	9.35793E-2	2.72829E1	-3.26585E1	-3.26374E1	2.6783E1	1.19705E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.18181E-1	-7.99227E-1	-9.131E0	-9.14202E0	5.14984E-3	9.37223E-2	2.72496E1	-3.26248E1	-3.26508E1	2.6834E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.17895E-1	-7.99179E-1	-9.13098E0	-9.14168E0	5.10216E-3	9.36031E-2	2.73093E1	-3.26603E1	-3.26296E1	2.68256E1	1.20106E-7	2.50882E-3	2.50882E-3	6.33436E-3	2.98665E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.17752E-1	-7.9906E-1	-9.131E0	-9.14197E0	5.43594E-3	9.3317E-2	2.73856E1	-3.2653E1	-3.26476E1	2.67806E1	1.19965E-7	2.5199E-3	2.5199E-3	6.34588E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.178E-1	-7.98821E-1	-9.13064E0	-9.14185E0	5.22137E-3	9.32932E-2	2.71989E1	-3.26178E1	-3.26431E1	2.68022E1	1.20122E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.18086E-1	-7.98988E-1	-9.13084E0	-9.14176E0	5.03063E-3	9.36508E-2	2.73339E1	-3.26603E1	-3.26452E1	2.68022E1	1.19953E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.1799E-1	-7.98678E-1	-9.13081E0	-9.14187E0	5.34058E-3	9.35316E-2	2.7385E1	-3.26789E1	-3.25888E1	2.68082E1	1.20209E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.97394E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.17871E-1	-7.98702E-1	-9.13072E0	-9.14204E0	5.00679E-3	9.35793E-2	2.73104E1	-3.2649E1	-3.26313E1	2.6792E1	1.20174E-7	2.52318E-3	2.52318E-3	6.28006E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.17966E-1	-7.98583E-1	-9.13079E0	-9.14173E0	4.88758E-3	9.37939E-2	2.7355E1	-3.26981E1	-3.26146E1	2.68148E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.95899E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.17704E-1	-7.98798E-1	-9.13098E0	-9.1419E0	5.00679E-3	9.35078E-2	2.7242E1	-3.26713E1	-3.2615E1	2.6804E1	1.19713E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.95923E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.178E-1	-7.98464E-1	-9.131E0	-9.14214E0	5.126E-3	9.38416E-2	2.73005E1	-3.26822E1	-3.26364E1	2.6781E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.97647E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.1799E-1	-7.98464E-1	-9.13098E0	-9.14185E0	5.19753E-3	9.38177E-2	2.72913E1	-3.26945E1	-3.2629E1	2.67776E1	1.20042E-7	2.51393E-3	2.51393E-3	6.33919E-3	2.99343E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09711E0	-8.17966E-1	-7.98845E-1	-9.13095E0	-9.14178E0	5.00679E-3	9.34601E-2	2.73229E1	-3.26567E1	-3.26327E1	2.67938E1	1.19925E-7	2.52139E-3	2.52139E-3	6.29067E-3	3.0201E-1