[Scan]
initial_time=2016-01-28T21:11:54
final_time=2016-01-28T21:12:13
ip_count=19
run=1026
dataset=8
scan=571
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.17561E-1
ql1_imon=1.42313E-8
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=2.00387E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=1.20164E-9
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-3.40474E-10
mult1=-1.03387E-8
mult2=-2.85064E-9
rf_tmon=-4.3384E-3
rf_agc=3.32088E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.70598E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.57865E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19907E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.18165E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05342E1
cs_ea1_imon=1.07264E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41562E0
lens1_imon=2.77332E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04274E1
cs_ea2_imon=1.39402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=3.04195E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.12408E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=4.32154E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=2.47424E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19252E0
cs_ionrep_imon=9.35662E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01786E1
cs_anode1_imon=1.9674E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.08123E-8
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-9.71409E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.59895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98406E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.94317E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=8.77616E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.13543E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41963E0
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09626E0
os_ef2alow_imon=-2.51898E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00127E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.36376E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.09737E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72561E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.73202E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.07819E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1342E0
cs_ionaccel_imon=-9.34263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.74344E-6
window_vset=0.0E0
window_vmon=2.25795E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39452E-4
mask2_vset=0.0E0
mask2_vmon=-1.86981E1
mask2_imon=-5.06807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.77096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.71976E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50173E3
multb_neg_imon=7.33208E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33176E1
os_fil1_imon=9.43248E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07746E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59778E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31692E1
cs_fil1_imon=7.84925E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.54633E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6124E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.40275E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09191E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64768E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27779E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33315E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21757E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13652E-1
res40_imon=-2.41125E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17609E-1	-7.98988E-1	-9.13117E0	-9.14233E0	4.79221E-3	9.36031E-2	2.73676E1	-3.26496E1	-3.26101E1	2.67978E1	1.20142E-7	2.51709E-3	2.51709E-3	6.3445E-3	2.98842E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.17633E-1	-7.99036E-1	-9.13088E0	-9.14183E0	5.07832E-3	9.35793E-2	2.71909E1	-3.26747E1	-3.2629E1	2.67795E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.17513E-1	-7.98917E-1	-9.13091E0	-9.1419E0	5.05447E-3	9.38177E-2	2.74083E1	-3.26679E1	-3.26189E1	2.68111E1	1.20244E-7	2.52027E-3	2.52027E-3	6.29624E-3	3.0201E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.17561E-1	-7.98655E-1	-9.13124E0	-9.14192E0	4.95911E-3	9.36031E-2	2.71812E1	-3.26425E1	-3.26573E1	2.67866E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.17275E-1	-7.98655E-1	-9.13122E0	-9.14164E0	4.76837E-3	9.35078E-2	2.71357E1	-3.26711E1	-3.26128E1	2.68034E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17513E-1	-7.98631E-1	-9.1311E0	-9.14164E0	4.57764E-3	9.35793E-2	2.73814E1	-3.26633E1	-3.26116E1	2.68035E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17347E-1	-7.98702E-1	-9.13098E0	-9.14195E0	4.81606E-3	9.35793E-2	2.71681E1	-3.26398E1	-3.26182E1	2.67911E1	1.2026E-7	2.50989E-3	2.50989E-3	6.32356E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.17251E-1	-7.98893E-1	-9.13105E0	-9.14195E0	4.98295E-3	9.33886E-2	2.72955E1	-3.26759E1	-3.26038E1	2.6798E1	1.2033E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.17943E-1	-7.98965E-1	-9.13105E0	-9.14216E0	4.76837E-3	9.35078E-2	2.73075E1	-3.26783E1	-3.2635E1	2.68304E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.1768E-1	-7.98893E-1	-9.13112E0	-9.14192E0	5.14984E-3	9.39131E-2	2.72883E1	-3.26585E1	-3.26386E1	2.67848E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17728E-1	-7.98965E-1	-9.13098E0	-9.14185E0	4.98295E-3	9.36747E-2	2.72793E1	-3.26681E1	-3.26567E1	2.67962E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.17609E-1	-7.98893E-1	-9.13117E0	-9.14164E0	5.07832E-3	9.35793E-2	2.71435E1	-3.26644E1	-3.26154E1	2.6807E1	1.19809E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.01085E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17442E-1	-7.98702E-1	-9.13141E0	-9.14204E0	5.126E-3	9.34124E-2	2.73958E1	-3.26386E1	-3.26188E1	2.68004E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01738E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.17561E-1	-7.98821E-1	-9.13131E0	-9.14195E0	4.60148E-3	9.377E-2	2.73387E1	-3.26561E1	-3.26119E1	2.68435E1	1.20114E-7	2.51809E-3	2.51809E-3	6.32916E-3	3.00896E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17657E-1	-7.98917E-1	-9.13115E0	-9.14199E0	4.64916E-3	9.36031E-2	2.72456E1	-3.26639E1	-3.2629E1	2.67818E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.17299E-1	-7.98678E-1	-9.1311E0	-9.14199E0	4.93526E-3	9.37939E-2	2.72945E1	-3.2682E1	-3.26537E1	2.67866E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17418E-1	-7.98655E-1	-9.13122E0	-9.14147E0	4.88758E-3	9.36747E-2	2.72799E1	-3.26567E1	-3.26326E1	2.68094E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.1749E-1	-7.98965E-1	-9.13119E0	-9.14166E0	4.76837E-3	9.36747E-2	2.73541E1	-3.26915E1	-3.26396E1	2.68001E1	1.19872E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.00144E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.1749E-1	-7.98869E-1	-9.13122E0	-9.14204E0	4.52995E-3	9.34839E-2	2.72119E1	-3.26579E1	-3.26266E1	2.68334E1	1.19941E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17561E-1	-7.9906E-1	-9.13134E0	-9.1419E0	4.76837E-3	9.36747E-2	2.72561E1	-3.26785E1	-3.26236E1	2.6789E1	1.20311E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9892E-1