[Scan]
initial_time=2016-01-28T21:13:14
final_time=2016-01-28T21:13:33
ip_count=19
run=1026
dataset=8
scan=574
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08835E-4
ql1_vset=
ql1_vmon=-8.1737E-1
ql1_imon=1.41442E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.98052E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=9.95588E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.95758E-10
mult1=-1.02461E-8
mult2=-2.80245E-9
rf_tmon=-5.28148E-3
rf_agc=3.34057E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.69252E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61489E0
bslens_imon=2.57865E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19771E1
lens5a_imon=1.97908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05259E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53702E1
cs_ef1b_imon=3.19173E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02397E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.051E1
cs_ea1_imon=1.08679E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39498E0
lens1_imon=2.68483E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.978E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04085E1
cs_ea2_imon=1.38375E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.04473E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.1211E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=4.31458E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=2.48875E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63751E1
os_ef1bup_imon=3.09269E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23971E0
cs_ionrep_imon=9.31061E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=1.95593E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.07946E-8
tplens_vset=1.4E-1
tplens_vmon=1.62846E0
tplens_imon=-1.43153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98201E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.94733E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22968E0
ionrepsh_imon=8.6452E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.14725E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4273E0
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.0075E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.18756E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07541E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99548E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.37314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23108E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01722E1
cs_anode2_imon=2.09946E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72811E1
iondef1_imon=1.08432E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.0972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.75807E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.06818E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-8.54332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56376E1
einzel_imon=7.70869E-6
window_vset=0.0E0
window_vmon=2.19423E-1
window_imon=-1.07327E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39345E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.76312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.73911E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.64543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.31438E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.39918E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07868E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59771E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31718E1
cs_fil1_imon=6.98623E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.44207E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61203E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25988E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.75145E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28029E-1
cs_fil2_imon=-2.18265E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.91815E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21697E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.37196E-1
res40_imon=-2.37302E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.1737E-1	-7.98392E-1	-9.13112E0	-9.14156E0	4.86374E-3	9.34601E-2	2.72937E1	-3.26543E1	-3.26314E1	2.68208E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1
2.0E0	1.9E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.17323E-1	-7.98559E-1	-9.13103E0	-9.14211E0	4.88758E-3	9.3627E-2	2.73163E1	-3.2636E1	-3.26124E1	2.6774E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.03286E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.17442E-1	-7.98655E-1	-9.131E0	-9.14185E0	4.88758E-3	9.36508E-2	2.72907E1	-3.26579E1	-3.26591E1	2.67798E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1737E-1	-7.98678E-1	-9.13119E0	-9.14204E0	4.72069E-3	9.36508E-2	2.73086E1	-3.26773E1	-3.2606E1	2.68022E1	1.20363E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.17752E-1	-7.98869E-1	-9.131E0	-9.14197E0	4.72069E-3	9.37462E-2	2.73558E1	-3.26349E1	-3.26107E1	2.68082E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.1749E-1	-7.9875E-1	-9.13088E0	-9.14204E0	4.93526E-3	9.34839E-2	2.72696E1	-3.26346E1	-3.26242E1	2.67812E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.1749E-1	-7.98774E-1	-9.131E0	-9.14197E0	5.00679E-3	9.34839E-2	2.73351E1	-3.26579E1	-3.26218E1	2.67938E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17394E-1	-7.98655E-1	-9.13091E0	-9.14185E0	4.88758E-3	9.35555E-2	2.72192E1	-3.26567E1	-3.2644E1	2.68112E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.17323E-1	-7.98798E-1	-9.13095E0	-9.14214E0	4.64916E-3	9.32217E-2	2.73187E1	-3.26921E1	-3.26343E1	2.67943E1	1.20122E-7	2.52757E-3	2.52757E-3	6.34037E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.17227E-1	-7.98655E-1	-9.131E0	-9.14202E0	4.79221E-3	9.35793E-2	2.73574E1	-3.26549E1	-3.25918E1	2.68045E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.17251E-1	-7.98798E-1	-9.13079E0	-9.14204E0	4.88758E-3	9.34601E-2	2.72859E1	-3.26579E1	-3.26506E1	2.67943E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17275E-1	-7.98821E-1	-9.13105E0	-9.14204E0	4.98295E-3	9.32693E-2	2.72865E1	-3.26326E1	-3.26086E1	2.6792E1	1.20069E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.17466E-1	-7.98845E-1	-9.13112E0	-9.1419E0	4.95911E-3	9.3627E-2	2.73193E1	-3.26815E1	-3.26549E1	2.68046E1	1.19809E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.02922E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.17537E-1	-7.98631E-1	-9.13095E0	-9.14216E0	4.91142E-3	9.34839E-2	2.73137E1	-3.26536E1	-3.26162E1	2.68202E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02922E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09688E0	-8.17513E-1	-7.98726E-1	-9.13088E0	-9.1418E0	4.76837E-3	9.37223E-2	2.72979E1	-3.26633E1	-3.25731E1	2.681E1	1.19757E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.17347E-1	-7.98702E-1	-9.13105E0	-9.14216E0	4.72069E-3	9.33409E-2	2.73299E1	-3.26779E1	-3.26354E1	2.68148E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16965E-1	-7.98607E-1	-9.13117E0	-9.14187E0	4.88758E-3	9.33886E-2	2.72793E1	-3.26915E1	-3.2608E1	2.68118E1	1.2033E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.17156E-1	-7.98869E-1	-9.13115E0	-9.14218E0	4.91142E-3	9.39131E-2	2.73243E1	-3.2608E1	-3.26266E1	2.67758E1	1.198E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.17251E-1	-7.98535E-1	-9.13119E0	-9.14221E0	5.03063E-3	9.36747E-2	2.73039E1	-3.26838E1	-3.26325E1	2.68059E1	1.20278E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.1737E-1	-7.98535E-1	-9.13124E0	-9.14204E0	4.98295E-3	9.34124E-2	2.72811E1	-3.26663E1	-3.26104E1	2.68148E1	1.20158E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.03286E-1