[Scan]
initial_time=2016-01-28T21:14:07
final_time=2016-01-28T21:14:26
ip_count=19
run=1026
dataset=8
scan=576
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.1749E-1
ql1_imon=1.40912E-8
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=1.9976E-9
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=8.63779E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-3.01051E-10
mult1=-9.99052E-9
mult2=-2.72599E-9
rf_tmon=-4.60731E-3
rf_agc=3.34814E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.79176E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63318E0
bslens_imon=2.3946E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.17912E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=1.0914E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44158E0
lens1_imon=2.69545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03448E1
cs_ea2_imon=1.40216E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84094E1
cs_ef1a_imon=3.03532E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.12103E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.31941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=2.47035E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=9.69286E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.95953E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.09136E-8
tplens_vset=1.4E-1
tplens_vmon=1.6373E0
tplens_imon=-1.6085E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26064E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26285E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.04847E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=8.71953E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42494E0
os_ea2_imon=-4.54621E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06037E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.36905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.08099E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.81272E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.07254E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86837E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.62939E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.27379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.34978E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59454E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.41477E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08014E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59926E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31765E1
cs_fil1_imon=7.35306E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.98996E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61373E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.51733E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-1.76498E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21659E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.52394E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16965E-1	-7.98988E-1	-9.13117E0	-9.14185E0	4.673E-3	9.35078E-2	2.7229E1	-3.26815E1	-3.2639E1	2.68256E1	1.20158E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99175E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16965E-1	-7.99012E-1	-9.13134E0	-9.14204E0	4.93526E-3	9.36031E-2	2.74006E1	-3.26976E1	-3.26297E1	2.67839E1	1.19902E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.17037E-1	-7.98845E-1	-9.13119E0	-9.14147E0	4.93526E-3	9.34601E-2	2.7275E1	-3.26926E1	-3.26052E1	2.67931E1	1.19925E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.01209E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.17227E-1	-7.98702E-1	-9.13112E0	-9.14176E0	4.81606E-3	9.35793E-2	2.73297E1	-3.26464E1	-3.26104E1	2.681E1	1.20042E-7	2.51709E-3	2.51709E-3	6.29157E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.17108E-1	-7.98869E-1	-9.13105E0	-9.14176E0	4.45843E-3	9.35555E-2	2.73092E1	-3.26585E1	-3.26446E1	2.68065E1	1.20183E-7	2.51793E-3	2.51793E-3	6.29665E-3	3.00069E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16822E-1	-7.98917E-1	-9.13115E0	-9.14147E0	4.48227E-3	9.36985E-2	2.72904E1	-3.2637E1	-3.26236E1	2.67739E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16989E-1	-7.98845E-1	-9.13112E0	-9.14168E0	4.95911E-3	9.35078E-2	2.72194E1	-3.26462E1	-3.26419E1	2.68112E1	1.20084E-7	2.51359E-3	2.51359E-3	6.34099E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.1706E-1	-7.98655E-1	-9.13105E0	-9.14168E0	5.03063E-3	9.34362E-2	2.72815E1	-3.26632E1	-3.26278E1	2.68018E1	1.20084E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.99083E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.17537E-1	-7.98655E-1	-9.13117E0	-9.14154E0	4.95911E-3	9.35555E-2	2.73086E1	-3.26502E1	-3.26478E1	2.68022E1	1.19902E-7	2.519E-3	2.519E-3	6.31009E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.17251E-1	-7.98845E-1	-9.13107E0	-9.14161E0	4.98295E-3	9.34124E-2	2.72937E1	-3.26765E1	-3.26458E1	2.67668E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.17037E-1	-7.98941E-1	-9.13105E0	-9.14149E0	5.126E-3	9.32455E-2	2.7262E1	-3.26396E1	-3.26443E1	2.6803E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.17227E-1	-7.98965E-1	-9.131E0	-9.14173E0	4.76837E-3	9.35793E-2	2.73655E1	-3.26713E1	-3.26098E1	2.67842E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17156E-1	-7.98798E-1	-9.13124E0	-9.1419E0	5.03063E-3	9.36985E-2	2.72663E1	-3.26725E1	-3.26254E1	2.68004E1	1.19813E-7	2.51923E-3	2.51923E-3	6.31242E-3	3.04138E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.17394E-1	-7.98988E-1	-9.13131E0	-9.14183E0	4.91142E-3	9.38416E-2	2.72865E1	-3.26753E1	-3.26134E1	2.67956E1	1.19738E-7	2.51911E-3	2.51911E-3	6.28967E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.17347E-1	-7.99108E-1	-9.131E0	-9.14195E0	4.76837E-3	9.36985E-2	2.72679E1	-3.26661E1	-3.26449E1	2.68059E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.17347E-1	-7.98988E-1	-9.13115E0	-9.1419E0	5.10216E-3	9.377E-2	2.73381E1	-3.26861E1	-3.26008E1	2.67974E1	1.19851E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00197E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.17347E-1	-7.9937E-1	-9.13081E0	-9.14195E0	4.81606E-3	9.36508E-2	2.73027E1	-3.26639E1	-3.26314E1	2.67764E1	1.20017E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.1737E-1	-7.99203E-1	-9.13122E0	-9.14209E0	4.95911E-3	9.36508E-2	2.73128E1	-3.26685E1	-3.26101E1	2.68134E1	1.19907E-7	2.51647E-3	2.51647E-3	6.32099E-3	3.00378E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.17204E-1	-7.98965E-1	-9.1311E0	-9.14178E0	4.673E-3	9.39608E-2	2.73305E1	-3.26868E1	-3.25989E1	2.68279E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.1749E-1	-7.99012E-1	-9.13119E0	-9.14178E0	4.81606E-3	9.35316E-2	2.73045E1	-3.26285E1	-3.26064E1	2.6792E1	1.20158E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00453E-1