[Scan]
initial_time=2016-01-28T21:14:34
final_time=2016-01-28T21:14:53
ip_count=19
run=1026
dataset=8
scan=577
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=1.40863E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=1.99542E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=7.36511E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-2.83587E-10
mult1=-1.00534E-8
mult2=-2.63677E-9
rf_tmon=-4.38625E-3
rf_agc=3.33877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.74861E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=2.00038E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12435E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54175E1
cs_ef1b_imon=3.16722E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02413E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04579E1
cs_ea1_imon=1.09914E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3996E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64212E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0354E1
cs_ea2_imon=1.40015E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=3.01946E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.12226E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11105E1
os_restr1_imon=4.31292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.47875E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.06019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21004E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=1.9844E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.09194E-8
tplens_vset=1.4E-1
tplens_vmon=1.65585E0
tplens_imon=-1.29913E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.99761E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=8.54721E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33459E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74375E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43415E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00641E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.23065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.84295E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.59582E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.36941E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.27945E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02428E1
cs_anode2_imon=2.08603E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73538E1
iondef1_imon=1.11716E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.73773E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.06679E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47078E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=8.04103E-6
window_vset=0.0E0
window_vmon=2.20947E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39827E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-8.10312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=8.53639E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.40226E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.30711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34141E0
defgridb_imon=6.24004E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.42516E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0814E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5988E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31686E1
cs_fil1_imon=6.39801E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=7.58732E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6154E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.33153E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.562E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-3.12848E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.845E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21744E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.24454E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=248
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17299E-1	-7.9906E-1	-9.13105E0	-9.14202E0	4.81606E-3	9.35793E-2	2.73257E1	-3.26502E1	-3.26531E1	2.68328E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00563E-1
2.0E0	3.9E1	1.0E0	3.16E2	1.6E2	-2.09549E0	-8.17227E-1	-7.98965E-1	-9.13079E0	-9.14183E0	4.60148E-3	9.35316E-2	2.72636E1	-3.26549E1	-3.2629E1	2.68024E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01738E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17108E-1	-7.98774E-1	-9.13086E0	-9.14192E0	4.8399E-3	9.33886E-2	2.72477E1	-3.26631E1	-3.26289E1	2.68186E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17132E-1	-7.98893E-1	-9.13088E0	-9.14199E0	4.64916E-3	9.35793E-2	2.72618E1	-3.26549E1	-3.25942E1	2.6813E1	1.19891E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16917E-1	-7.9875E-1	-9.13081E0	-9.14185E0	4.62532E-3	9.36985E-2	2.729E1	-3.26469E1	-3.26057E1	2.67752E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16846E-1	-7.99108E-1	-9.13084E0	-9.14223E0	4.36306E-3	9.34839E-2	2.7335E1	-3.26604E1	-3.264E1	2.68173E1	1.20293E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.00097E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16965E-1	-7.98559E-1	-9.13079E0	-9.14195E0	4.91142E-3	9.34362E-2	2.73045E1	-3.26413E1	-3.2613E1	2.68041E1	1.201E-7	2.51498E-3	2.51498E-3	6.34164E-3	2.9917E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17132E-1	-7.98774E-1	-9.1311E0	-9.14192E0	5.05447E-3	9.35078E-2	2.72781E1	-3.26452E1	-3.26302E1	2.67914E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.17156E-1	-7.98869E-1	-9.13136E0	-9.14176E0	5.07832E-3	9.37939E-2	2.73357E1	-3.26723E1	-3.26284E1	2.68226E1	1.19913E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.1718E-1	-7.98678E-1	-9.13124E0	-9.14202E0	5.126E-3	9.36508E-2	2.73159E1	-3.26945E1	-3.26314E1	2.67885E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.17084E-1	-7.9875E-1	-9.13103E0	-9.14195E0	5.05447E-3	9.35316E-2	2.73243E1	-3.26609E1	-3.26302E1	2.68316E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.97647E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.16894E-1	-7.98965E-1	-9.13117E0	-9.14156E0	4.76837E-3	9.34601E-2	2.73435E1	-3.26783E1	-3.26549E1	2.67914E1	1.19925E-7	2.51581E-3	2.51581E-3	6.33538E-3	2.99348E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09673E0	-8.17108E-1	-7.9875E-1	-9.13095E0	-9.14161E0	4.86374E-3	9.36508E-2	2.7276E1	-3.26601E1	-3.26142E1	2.67834E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.17037E-1	-7.98798E-1	-9.13115E0	-9.14187E0	4.93526E-3	9.35555E-2	2.72246E1	-3.26759E1	-3.26194E1	2.67902E1	1.20202E-7	2.51862E-3	2.51862E-3	6.31894E-3	3.01701E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.16965E-1	-7.98869E-1	-9.13136E0	-9.14176E0	4.69685E-3	9.36508E-2	2.73434E1	-3.26425E1	-3.26284E1	2.68064E1	1.20069E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02396E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.17227E-1	-7.98416E-1	-9.13095E0	-9.14197E0	4.98295E-3	9.35793E-2	2.7251E1	-3.26795E1	-3.26296E1	2.6803E1	1.19697E-7	2.51203E-3	2.51203E-3	6.34518E-3	2.99686E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.17299E-1	-7.98893E-1	-9.131E0	-9.14185E0	5.03063E-3	9.38654E-2	2.74178E1	-3.26408E1	-3.26396E1	2.67998E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.17394E-1	-7.99203E-1	-9.13119E0	-9.14187E0	5.14984E-3	9.36508E-2	2.71777E1	-3.26554E1	-3.26308E1	2.68178E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17108E-1	-7.99274E-1	-9.13129E0	-9.14176E0	5.19753E-3	9.377E-2	2.739E1	-3.26844E1	-3.26242E1	2.68244E1	1.19861E-7	2.52428E-3	2.52428E-3	6.28552E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.17132E-1	-7.98893E-1	-9.13141E0	-9.14183E0	5.05447E-3	9.36985E-2	2.73538E1	-3.26609E1	-3.26236E1	2.68172E1	1.19697E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01995E-1