[Scan]
initial_time=2016-01-28T21:15:00
final_time=2016-01-28T21:15:20
ip_count=19
run=1026
dataset=8
scan=578
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08855E-4
ql1_vset=
ql1_vmon=-8.17585E-1
ql1_imon=1.40989E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.00698E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=7.80511E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.65348E-10
mult1=-9.87765E-9
mult2=-2.90748E-9
rf_tmon=-5.02269E-3
rf_agc=3.25127E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.70305E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.46185E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19512E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=3.19714E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0458E2
lens23_imon=1.02422E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=1.09883E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40029E0
lens1_imon=2.75208E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.3926E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.03712E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.12354E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.29382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15099E1
os_ea1_imon=2.46115E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20078E0
cs_ionrep_imon=9.36724E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=1.95161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.08696E-8
tplens_vset=1.4E-1
tplens_vmon=1.65795E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25971E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.59718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02881E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=3.95737E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22437E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33333E1
lens5b_imon=2.16915E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44028E0
os_ea2_imon=-4.97094E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06047E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.21335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.30596E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.35211E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.30778E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73735E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.77784E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82952E-1
olens1_imon=7.06424E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.05899E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55937E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-4.75143E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.5409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.74808E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.21528E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.40114E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07978E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31756E1
cs_fil1_imon=6.90256E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04645E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61223E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62996E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.01725E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56869E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21691E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.40671E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16989E-1	-7.98893E-1	-9.13146E0	-9.14202E0	4.76837E-3	9.39131E-2	2.7358E1	-3.26657E1	-3.26639E1	2.67812E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.1687E-1	-7.99322E-1	-9.13143E0	-9.14173E0	4.60148E-3	9.34601E-2	2.73045E1	-3.26838E1	-3.26231E1	2.68012E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.17251E-1	-7.99155E-1	-9.13155E0	-9.14178E0	4.74453E-3	9.377E-2	2.72733E1	-3.26627E1	-3.26303E1	2.68106E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.99686E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1706E-1	-7.99012E-1	-9.13103E0	-9.14154E0	4.64916E-3	9.39131E-2	2.73393E1	-3.26514E1	-3.26207E1	2.68052E1	1.19965E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17275E-1	-7.98821E-1	-9.13107E0	-9.1413E0	4.64916E-3	9.377E-2	2.72799E1	-3.26705E1	-3.26296E1	2.68148E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.03712E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.1737E-1	-7.98631E-1	-9.13146E0	-9.14183E0	4.69685E-3	9.377E-2	2.73652E1	-3.26669E1	-3.26248E1	2.68376E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.17299E-1	-7.98821E-1	-9.13134E0	-9.1419E0	4.81606E-3	9.36747E-2	2.73411E1	-3.2659E1	-3.25883E1	2.68124E1	1.19953E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.1706E-1	-7.98965E-1	-9.1311E0	-9.14185E0	4.72069E-3	9.377E-2	2.72751E1	-3.26206E1	-3.26248E1	2.68099E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.17251E-1	-7.98774E-1	-9.13146E0	-9.14195E0	4.79221E-3	9.38416E-2	2.72558E1	-3.26326E1	-3.26134E1	2.67812E1	1.20226E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16941E-1	-7.98869E-1	-9.13124E0	-9.14178E0	4.64916E-3	9.38654E-2	2.72961E1	-3.26597E1	-3.26104E1	2.68136E1	1.20435E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16751E-1	-7.9906E-1	-9.13124E0	-9.14214E0	4.43459E-3	9.35793E-2	2.7345E1	-3.26633E1	-3.26374E1	2.68073E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.03027E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.17013E-1	-7.99131E-1	-9.13143E0	-9.14207E0	4.673E-3	9.38654E-2	2.72348E1	-3.26549E1	-3.26044E1	2.68004E1	1.19866E-7	2.52125E-3	2.52125E-3	6.30335E-3	3.03066E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.16703E-1	-7.98917E-1	-9.13122E0	-9.14209E0	4.76837E-3	9.34601E-2	2.72853E1	-3.26783E1	-3.26476E1	2.68168E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16822E-1	-7.98774E-1	-9.13112E0	-9.14171E0	4.72069E-3	9.36985E-2	2.73411E1	-3.26621E1	-3.26002E1	2.68118E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16894E-1	-7.98941E-1	-9.13131E0	-9.14178E0	4.95911E-3	9.38177E-2	2.73357E1	-3.26543E1	-3.26567E1	2.68198E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17084E-1	-7.99155E-1	-9.13141E0	-9.14223E0	4.74453E-3	9.38416E-2	2.73045E1	-3.26723E1	-3.26338E1	2.68038E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17037E-1	-7.99084E-1	-9.13126E0	-9.14197E0	4.98295E-3	9.40323E-2	2.73429E1	-3.26723E1	-3.26266E1	2.68088E1	1.20069E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16822E-1	-7.99108E-1	-9.13134E0	-9.14199E0	4.72069E-3	9.39131E-2	2.72951E1	-3.26614E1	-3.26349E1	2.68118E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17108E-1	-7.99084E-1	-9.13122E0	-9.14185E0	4.64916E-3	9.36985E-2	2.72414E1	-3.26657E1	-3.26735E1	2.67902E1	1.19851E-7	2.52061E-3	2.52061E-3	6.28592E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.17585E-1	-7.98655E-1	-9.13115E0	-9.14204E0	4.91142E-3	9.377E-2	2.73735E1	-3.26714E1	-3.25971E1	2.68118E1	1.20158E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00197E-1