[Scan]
initial_time=2016-01-28T21:15:27
final_time=2016-01-28T21:15:46
ip_count=19
run=1026
dataset=8
scan=579
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=1.40226E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.01588E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=6.5974E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-3.06082E-10
mult1=-8.9792E-9
mult2=-2.77813E-9
rf_tmon=-6.36766E-3
rf_agc=3.28667E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.70449E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6963E0
bslens_imon=2.61405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=1.96563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53453E1
cs_ef1b_imon=3.18895E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02326E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04805E1
cs_ea1_imon=1.07724E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36489E0
lens1_imon=2.62113E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04026E1
cs_ea2_imon=1.3972E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.03847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.12067E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.31875E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=2.48557E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=9.46988E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=1.97018E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.09052E-8
tplens_vset=1.4E-1
tplens_vmon=1.62374E0
tplens_imon=-2.10402E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2603E1
iondef3_imon=1.47153E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.00574E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=8.4293E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.20206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42081E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71275E1
cs_ef2a_imon=3.19312E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08294E0
os_ef2alow_imon=-2.48423E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01285E-1
os_ef2bup_imon=-5.21925E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=3.36654E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.30495E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02058E1
cs_anode2_imon=2.09251E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72968E1
iondef1_imon=1.08184E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.08086E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.65436E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.06819E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09713E0
cs_ionaccel_imon=-9.30788E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47362E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.75039E-6
window_vset=0.0E0
window_vmon=2.26374E-1
window_imon=-9.13411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.24183E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.36393E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=6.88611E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38193E0
defgridb_imon=6.00834E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.40862E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60003E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31767E1
cs_fil1_imon=8.08672E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.22197E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61499E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96504E-2
os_fil2_imon=-2.30428E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14983E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5806E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.21161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30998E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21789E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20023E-1
res40_imon=-2.34174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16774E-1	-7.99012E-1	-9.13122E0	-9.14218E0	4.64916E-3	9.36031E-2	2.72597E1	-3.26826E1	-3.26018E1	2.68172E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0071E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16631E-1	-7.98988E-1	-9.13112E0	-9.14195E0	4.36306E-3	9.34839E-2	2.73034E1	-3.26538E1	-3.2626E1	2.68088E1	1.20004E-7	2.52707E-3	2.52707E-3	6.33436E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16536E-1	-7.98988E-1	-9.13138E0	-9.1419E0	4.81606E-3	9.34124E-2	2.73449E1	-3.2645E1	-3.26254E1	2.67938E1	1.19991E-7	2.51182E-3	2.51182E-3	6.32328E-3	3.006E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16655E-1	-7.98893E-1	-9.13124E0	-9.14195E0	4.48227E-3	9.34601E-2	2.73216E1	-3.26461E1	-3.26248E1	2.68106E1	1.19766E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.02277E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.17299E-1	-7.98893E-1	-9.1311E0	-9.14195E0	4.3869E-3	9.35793E-2	2.72642E1	-3.27251E1	-3.25743E1	2.67968E1	1.198E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16774E-1	-7.98941E-1	-9.13103E0	-9.14199E0	4.41074E-3	9.34601E-2	2.72931E1	-3.26633E1	-3.25996E1	2.6834E1	1.20278E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17013E-1	-7.98702E-1	-9.13105E0	-9.14178E0	4.55379E-3	9.37462E-2	2.72574E1	-3.26425E1	-3.2656E1	2.68094E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16894E-1	-7.99084E-1	-9.13119E0	-9.14214E0	4.41074E-3	9.35793E-2	2.73257E1	-3.26714E1	-3.2659E1	2.67824E1	1.19653E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16965E-1	-7.9906E-1	-9.13122E0	-9.14185E0	4.673E-3	9.37223E-2	2.73399E1	-3.26119E1	-3.2659E1	2.6795E1	1.20383E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16774E-1	-7.9906E-1	-9.13148E0	-9.14173E0	4.69685E-3	9.33409E-2	2.72255E1	-3.26897E1	-3.26095E1	2.67769E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16751E-1	-7.98917E-1	-9.13136E0	-9.14207E0	5.05447E-3	9.36985E-2	2.73303E1	-3.26585E1	-3.26152E1	2.67956E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16774E-1	-7.98845E-1	-9.13117E0	-9.1418E0	4.88758E-3	9.3627E-2	2.73568E1	-3.26777E1	-3.26446E1	2.68112E1	1.19913E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16965E-1	-7.99131E-1	-9.13103E0	-9.14202E0	4.93526E-3	9.35555E-2	2.72757E1	-3.26891E1	-3.25942E1	2.68154E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.17132E-1	-7.98798E-1	-9.13107E0	-9.14187E0	4.8399E-3	9.34124E-2	2.72732E1	-3.26384E1	-3.26467E1	2.68227E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17084E-1	-7.98535E-1	-9.13115E0	-9.14209E0	4.95911E-3	9.35078E-2	2.73706E1	-3.26663E1	-3.26651E1	2.67782E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17084E-1	-7.98917E-1	-9.13126E0	-9.14185E0	5.43594E-3	9.36985E-2	2.71982E1	-3.26675E1	-3.26464E1	2.68034E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.17227E-1	-7.98774E-1	-9.13115E0	-9.14204E0	5.05447E-3	9.35078E-2	2.73924E1	-3.26714E1	-3.26449E1	2.67637E1	1.20226E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16989E-1	-7.99012E-1	-9.13124E0	-9.14197E0	5.22137E-3	9.34362E-2	2.72156E1	-3.26224E1	-3.26266E1	2.68154E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02511E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.17418E-1	-7.99179E-1	-9.13107E0	-9.14178E0	5.29289E-3	9.35078E-2	2.74024E1	-3.26555E1	-3.2606E1	2.67798E1	1.19646E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.17299E-1	-7.98702E-1	-9.13124E0	-9.14199E0	5.05447E-3	9.36747E-2	2.72968E1	-3.26897E1	-3.2603E1	2.68238E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01871E-1