[Scan]
initial_time=2016-01-28T21:17:40
final_time=2016-01-28T21:18:00
ip_count=19
run=1026
dataset=8
scan=584
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.39597E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.01912E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=5.75268E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.39909E-10
mult1=-9.94858E-9
mult2=-2.79381E-9
rf_tmon=-4.60976E-3
rf_agc=3.26897E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.71809E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62688E0
bslens_imon=2.56142E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19792E1
lens5a_imon=1.98978E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.18308E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04853E1
cs_ea1_imon=1.09321E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41419E0
lens1_imon=2.67896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65005E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03935E1
cs_ea2_imon=1.41239E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.12297E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15177E1
os_ea1_imon=2.45662E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63293E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21782E0
cs_ionrep_imon=9.49967E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93383E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.95088E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.08549E-8
tplens_vset=1.4E-1
tplens_vmon=1.67327E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26154E1
iondef3_imon=1.49871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.59714E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98511E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=3.96899E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24047E0
ionrepsh_imon=8.54837E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33486E1
lens5b_imon=2.18298E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74153E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42779E0
os_ea2_imon=-4.72452E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.20326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.32037E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.03056E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.35571E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.30442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.08135E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.09064E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67833E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.74883E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.07098E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10011E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39344E-4
mask2_vset=0.0E0
mask2_vmon=-1.86921E1
mask2_imon=-3.27381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.81377E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.48048E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.23344E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47403E0
defgridb_imon=6.15726E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.41057E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0793E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59868E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31723E1
cs_fil1_imon=7.95973E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.25115E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61302E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10672E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.59784E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2758E-1
cs_fil2_imon=-1.93316E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54467E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21464E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.61695E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0968E0	-8.1687E-1	-7.98607E-1	-9.13129E0	-9.14185E0	4.79221E-3	9.36747E-2	2.73027E1	-3.26496E1	-3.26242E1	2.68209E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.16751E-1	-7.98392E-1	-9.13093E0	-9.14185E0	4.76837E-3	9.38654E-2	2.73117E1	-3.26573E1	-3.262E1	2.67956E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16274E-1	-7.98512E-1	-9.13138E0	-9.14185E0	4.673E-3	9.39369E-2	2.73448E1	-3.2654E1	-3.26355E1	2.68076E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16488E-1	-7.98655E-1	-9.13122E0	-9.14216E0	4.64916E-3	9.37462E-2	2.72964E1	-3.26815E1	-3.26073E1	2.67917E1	1.1958E-7	2.51752E-3	2.51752E-3	6.32784E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16679E-1	-7.98559E-1	-9.13136E0	-9.14218E0	4.81606E-3	9.36985E-2	2.72971E1	-3.26817E1	-3.26266E1	2.68015E1	1.19674E-7	2.51758E-3	2.51758E-3	6.3074E-3	3.00916E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16703E-1	-7.98488E-1	-9.13146E0	-9.14216E0	4.57764E-3	9.35555E-2	2.72827E1	-3.26384E1	-3.26266E1	2.67885E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16584E-1	-7.98655E-1	-9.13126E0	-9.14185E0	4.64916E-3	9.36985E-2	2.73051E1	-3.2662E1	-3.26543E1	2.6828E1	1.2026E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.16488E-1	-7.98607E-1	-9.13146E0	-9.14183E0	4.673E-3	9.38177E-2	2.73159E1	-3.2644E1	-3.2602E1	2.68388E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16441E-1	-7.98368E-1	-9.13143E0	-9.14192E0	4.69685E-3	9.377E-2	2.72815E1	-3.26785E1	-3.26219E1	2.68235E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.16727E-1	-7.98774E-1	-9.13143E0	-9.14199E0	4.98295E-3	9.35316E-2	2.72739E1	-3.26567E1	-3.26344E1	2.67911E1	1.19757E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.17132E-1	-7.98702E-1	-9.13146E0	-9.14226E0	4.8399E-3	9.39846E-2	2.73605E1	-3.26679E1	-3.26449E1	2.6843E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9943E-1
1.5E1	0.0E0	1.0E0	6.06E2	4.11E2	-2.09642E0	-8.16989E-1	-7.9875E-1	-9.13117E0	-9.1419E0	5.03063E-3	9.377E-2	2.72961E1	-3.26651E1	-3.26068E1	2.67577E1	1.19757E-7	2.52428E-3	2.52428E-3	6.34588E-3	3.00563E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.1706E-1	-7.99036E-1	-9.13141E0	-9.14199E0	4.86374E-3	9.39131E-2	2.72811E1	-3.26585E1	-3.2647E1	2.67625E1	1.19697E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16965E-1	-7.98845E-1	-9.13124E0	-9.14199E0	4.93526E-3	9.377E-2	2.7263E1	-3.26573E1	-3.26356E1	2.68208E1	1.19925E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01209E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17561E-1	-7.98535E-1	-9.13138E0	-9.1419E0	4.74453E-3	9.39131E-2	2.7262E1	-3.26508E1	-3.26549E1	2.6804E1	1.19851E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.0148E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17013E-1	-7.9844E-1	-9.13124E0	-9.14218E0	5.22137E-3	9.40323E-2	2.72684E1	-3.26386E1	-3.26627E1	2.68348E1	1.19653E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.1687E-1	-7.98297E-1	-9.13134E0	-9.14173E0	5.17368E-3	9.39608E-2	2.73435E1	-3.26627E1	-3.26164E1	2.67986E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16965E-1	-7.9875E-1	-9.13134E0	-9.14185E0	5.34058E-3	9.38177E-2	2.72845E1	-3.26567E1	-3.26337E1	2.68346E1	1.20166E-7	2.51593E-3	2.51593E-3	6.30197E-3	3.01155E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16774E-1	-7.98583E-1	-9.13119E0	-9.1419E0	5.05447E-3	9.37223E-2	2.72588E1	-3.26536E1	-3.26338E1	2.68244E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16894E-1	-7.98488E-1	-9.13117E0	-9.14185E0	4.79221E-3	9.40084E-2	2.73316E1	-3.26443E1	-3.26154E1	2.67833E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.0148E-1