[Scan]
initial_time=2016-01-28T21:18:07
final_time=2016-01-28T21:18:26
ip_count=19
run=1026
dataset=8
scan=585
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.40231E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.00949E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=5.36919E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.68996E-10
mult1=-9.63475E-9
mult2=-2.79311E-9
rf_tmon=-5.58677E-3
rf_agc=3.25693E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.70789E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62108E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19508E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=3.19281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04572E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05252E1
cs_ea1_imon=1.10959E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44045E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.9964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.38825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.04829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.12328E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.30031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.44811E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28034E0
cs_ionrep_imon=9.47008E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=1.95052E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.08619E-8
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25832E1
iondef3_imon=1.51299E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27099E1
iondef2_imon=1.59842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=3.97017E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22806E0
ionrepsh_imon=8.51837E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74411E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43355E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.02695E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.36148E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.08063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.10612E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.75788E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.07094E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-9.97719E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.51845E-6
window_vset=0.0E0
window_vmon=2.00524E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39271E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-4.46312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.98844E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.30132E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.32153E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52487E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.40005E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0835E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59864E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31776E1
cs_fil1_imon=6.99266E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01762E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61311E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60711E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.07732E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.53866E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21677E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.83028E-1
res40_imon=-2.26631E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16941E-1	-7.98535E-1	-9.13122E0	-9.14187E0	4.79221E-3	9.37223E-2	2.73249E1	-3.26188E1	-3.26098E1	2.6786E1	1.19713E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.98819E-1
2.0E0	3.1E1	2.0E0	3.16E2	1.6E2	-2.09495E0	-8.16393E-1	-7.98655E-1	-9.13138E0	-9.14209E0	4.81606E-3	9.37223E-2	2.73098E1	-3.2696E1	-3.26096E1	2.68014E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16655E-1	-7.9875E-1	-9.13126E0	-9.14204E0	4.60148E-3	9.36985E-2	2.72727E1	-3.26614E1	-3.26266E1	2.68436E1	1.19983E-7	2.52012E-3	2.52012E-3	6.33406E-3	3.00261E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16464E-1	-7.98869E-1	-9.13146E0	-9.14202E0	4.60148E-3	9.36747E-2	2.73057E1	-3.26649E1	-3.26266E1	2.68047E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16464E-1	-7.98464E-1	-9.13134E0	-9.14202E0	4.64916E-3	9.38177E-2	2.72859E1	-3.26416E1	-3.26458E1	2.68217E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.16512E-1	-7.98726E-1	-9.13138E0	-9.14173E0	4.19617E-3	9.36747E-2	2.73442E1	-3.26494E1	-3.26524E1	2.68172E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16441E-1	-7.98726E-1	-9.1316E0	-9.14168E0	4.43459E-3	9.35793E-2	2.72756E1	-3.26649E1	-3.26213E1	2.6803E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16917E-1	-7.98869E-1	-9.13136E0	-9.14183E0	4.43459E-3	9.35555E-2	2.72727E1	-3.26675E1	-3.26543E1	2.68118E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.1687E-1	-7.98655E-1	-9.13119E0	-9.14207E0	4.29153E-3	9.40084E-2	2.72992E1	-3.26638E1	-3.26384E1	2.67938E1	1.19653E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16703E-1	-7.98631E-1	-9.13129E0	-9.14197E0	4.55379E-3	9.36508E-2	2.73051E1	-3.26573E1	-3.26536E1	2.68041E1	1.20414E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00197E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16607E-1	-7.9875E-1	-9.13165E0	-9.14223E0	4.31538E-3	9.41038E-2	2.72126E1	-3.26603E1	-3.26146E1	2.6777E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16894E-1	-7.98726E-1	-9.1316E0	-9.14195E0	4.24385E-3	9.39846E-2	2.73466E1	-3.26951E1	-3.26218E1	2.68076E1	1.20031E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.03887E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16631E-1	-7.98893E-1	-9.13155E0	-9.14199E0	4.93526E-3	9.38654E-2	2.73333E1	-3.26813E1	-3.262E1	2.6783E1	1.20158E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16727E-1	-7.9844E-1	-9.13162E0	-9.14185E0	4.88758E-3	9.38416E-2	2.73234E1	-3.26585E1	-3.26142E1	2.67896E1	1.20069E-7	2.51225E-3	2.51225E-3	6.3514E-3	2.9952E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16584E-1	-7.98249E-1	-9.13153E0	-9.14161E0	4.8399E-3	9.39131E-2	2.73186E1	-3.26572E1	-3.26456E1	2.68424E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.16798E-1	-7.98392E-1	-9.13143E0	-9.14209E0	4.93526E-3	9.38892E-2	2.72648E1	-3.26585E1	-3.26302E1	2.68148E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.97704E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16679E-1	-7.98726E-1	-9.13119E0	-9.14202E0	5.05447E-3	9.39131E-2	2.73558E1	-3.26236E1	-3.26349E1	2.67824E1	1.20174E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16751E-1	-7.98678E-1	-9.13134E0	-9.1418E0	4.95911E-3	9.41038E-2	2.73057E1	-3.26621E1	-3.26188E1	2.67914E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16679E-1	-7.98655E-1	-9.13172E0	-9.14209E0	5.17368E-3	9.38177E-2	2.72947E1	-3.2648E1	-3.26474E1	2.68123E1	1.19953E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16822E-1	-7.98488E-1	-9.13148E0	-9.14195E0	5.05447E-3	9.377E-2	2.73057E1	-3.27099E1	-3.25832E1	2.678E1	1.19749E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01738E-1