[Scan]
initial_time=2016-01-28T21:19:00
final_time=2016-01-28T21:19:20
ip_count=19
run=1026
dataset=8
scan=587
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.39748E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.03222E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=4.50945E-10
ql4_vset=
ql4_vmon=-9.14228E0
ql4_imon=-2.71428E-10
mult1=-1.02796E-8
mult2=-2.75461E-9
rf_tmon=-5.95473E-3
rf_agc=3.21175E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.72615E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60545E0
bslens_imon=2.33089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19907E1
lens5a_imon=1.99501E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05291E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.18741E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=1.09281E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42034E0
lens1_imon=2.65298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04327E1
cs_ea2_imon=1.38871E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.04181E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.12495E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14751E1
os_ea1_imon=2.46716E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20963E0
cs_ionrep_imon=9.50527E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93537E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=1.96566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.09348E-8
tplens_vset=1.4E-1
tplens_vmon=1.68921E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26183E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.57771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02885E2
lens6_imon=2.98495E-4
ql6_vset=1.0E-1
ql6_vmon=9.43422E-2
ql6_imon=3.99289E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23617E0
ionrepsh_imon=8.30542E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.1964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74333E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4857E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00768E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.20867E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.35968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30176E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73299E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.76055E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.06652E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-8.5356E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-9.00411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86891E1
mask2_imon=-4.31896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.33562E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.8401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.90027E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52367E0
defgridb_imon=6.19593E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33218E1
os_fil1_imon=9.41213E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0811E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60034E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31774E1
cs_fil1_imon=8.47029E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.49141E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61395E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60592E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2171E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=2.99732E-1
chamber_ion_pmon=1.19959E-7
chamber_cvt_pmon=2.51701E-3
foreline_cvt_pmon=2.51701E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.92038E-1
res40_imon=-2.38164E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16512E-1	-7.98249E-1	-9.13131E0	-9.14211E0	4.673E-3	9.41753E-2	2.73216E1	-3.26608E1	-3.26508E1	2.67862E1	1.19646E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.1656E-1	-7.98202E-1	-9.13119E0	-9.14178E0	5.07832E-3	9.38892E-2	2.73309E1	-3.26633E1	-3.26753E1	2.68155E1	1.20004E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16607E-1	-7.98202E-1	-9.13129E0	-9.14199E0	4.93526E-3	9.35555E-2	2.72467E1	-3.26762E1	-3.26301E1	2.68111E1	1.20137E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.00676E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16798E-1	-7.98082E-1	-9.13129E0	-9.1418E0	4.76837E-3	9.37223E-2	2.73934E1	-3.26867E1	-3.26242E1	2.6834E1	1.19941E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16607E-1	-7.98202E-1	-9.13134E0	-9.14199E0	4.69685E-3	9.39846E-2	2.7236E1	-3.26579E1	-3.26278E1	2.68106E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.17013E-1	-7.98631E-1	-9.13107E0	-9.1419E0	4.72069E-3	9.38654E-2	2.71876E1	-3.2667E1	-3.26156E1	2.68412E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16798E-1	-7.98178E-1	-9.1311E0	-9.14176E0	4.88758E-3	9.37462E-2	2.73428E1	-3.26732E1	-3.26119E1	2.68082E1	1.20031E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.98554E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.16607E-1	-7.98249E-1	-9.13107E0	-9.14221E0	4.98295E-3	9.38177E-2	2.71297E1	-3.26591E1	-3.26044E1	2.6801E1	1.19697E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16607E-1	-7.98512E-1	-9.13122E0	-9.14228E0	4.86374E-3	9.38892E-2	2.7411E1	-3.26448E1	-3.26294E1	2.67942E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97704E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16894E-1	-7.98154E-1	-9.13105E0	-9.14218E0	5.07832E-3	9.40084E-2	2.74998E1	-3.26451E1	-3.26336E1	2.68037E1	1.20177E-7	2.51472E-3	2.51472E-3	6.31779E-3	3.01237E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16822E-1	-7.98464E-1	-9.13148E0	-9.14223E0	4.91142E-3	9.36747E-2	2.72443E1	-3.26708E1	-3.26478E1	2.67781E1	1.20226E-7	2.51296E-3	2.51296E-3	6.33065E-3	3.02025E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.16584E-1	-7.98464E-1	-9.13124E0	-9.14228E0	5.05447E-3	9.38654E-2	2.73333E1	-3.26744E1	-3.26034E1	2.68157E1	1.19749E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.1656E-1	-7.98297E-1	-9.13143E0	-9.14195E0	4.93526E-3	9.37462E-2	2.7266E1	-3.2638E1	-3.26314E1	2.67938E1	1.1966E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.00144E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16607E-1	-7.98678E-1	-9.13129E0	-9.14207E0	4.86374E-3	9.38177E-2	2.709E1	-3.26843E1	-3.26122E1	2.68112E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.97963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16655E-1	-7.98726E-1	-9.13122E0	-9.14187E0	4.72069E-3	9.41515E-2	2.71423E1	-3.26738E1	-3.26319E1	2.68215E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09688E0	-8.16631E-1	-7.98702E-1	-9.13134E0	-9.14211E0	4.88758E-3	9.39846E-2	2.7123E1	-3.26362E1	-3.26152E1	2.67788E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16417E-1	-7.98702E-1	-9.13134E0	-9.14211E0	4.81606E-3	9.42945E-2	2.71163E1	-3.26561E1	-3.26602E1	2.68124E1	1.19757E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.16345E-1	-7.98798E-1	-9.13126E0	-9.1424E0	5.03063E-3	9.41992E-2	2.73417E1	-3.26596E1	-3.26278E1	2.6818E1	1.198E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.02769E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.16393E-1	-7.98893E-1	-9.13112E0	-9.14218E0	4.95911E-3	9.41753E-2	2.72462E1	-3.26524E1	-3.26308E1	2.681E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00966E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16345E-1	-7.98845E-1	-9.13122E0	-9.14228E0	4.79221E-3	9.43422E-2	2.73299E1	-3.26773E1	-3.26183E1	2.68118E1	1.19959E-7	2.51701E-3	2.51701E-3	6.31555E-3	2.99732E-1