[Scan]
initial_time=2016-01-28T21:19:27
final_time=2016-01-28T21:19:46
ip_count=19
run=1026
dataset=8
scan=588
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.39627E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.03276E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=4.7673E-10
ql4_vset=
ql4_vmon=-9.14228E0
ql4_imon=-3.00789E-10
mult1=-1.01739E-8
mult2=-2.80644E-9
rf_tmon=-5.59992E-3
rf_agc=3.11285E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.67742E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.56803E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19671E1
lens5a_imon=1.99501E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.17731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04569E2
lens23_imon=1.01983E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04758E1
cs_ea1_imon=1.09352E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44571E0
lens1_imon=2.73793E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03555E1
cs_ea2_imon=1.38163E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12232E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1155E1
os_restr1_imon=4.32914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=2.4884E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26567E0
cs_ionrep_imon=9.62916E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=1.96458E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.0838E-8
tplens_vset=1.4E-1
tplens_vmon=1.64556E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.59435E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=3.98252E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24915E0
ionrepsh_imon=8.52486E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.20135E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73937E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43792E0
os_ea2_imon=-7.20077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11039E1
os_restr2_imon=3.37085E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.32724E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73772E1
iondef1_imon=1.0691E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.79989E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.0655E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-7.45441E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47515E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9259E3
multa_neg_imon=7.44534E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.42599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.53382E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54729E0
defgridb_imon=6.3906E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.41291E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08308E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59827E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31769E1
cs_fil1_imon=8.3021E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.002E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61393E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01569E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57807E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27969E-1
cs_fil2_imon=-2.04128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21693E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04342E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.17108E-1	-7.98774E-1	-9.13143E0	-9.14202E0	4.93526E-3	9.39608E-2	2.73877E1	-3.26455E1	-3.26018E1	2.68076E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
2.0E0	5.1E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.16631E-1	-7.98941E-1	-9.13131E0	-9.14195E0	4.95911E-3	9.37939E-2	2.71796E1	-3.2664E1	-3.26242E1	2.68038E1	1.20004E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16941E-1	-7.9844E-1	-9.13146E0	-9.14214E0	4.8399E-3	9.37939E-2	2.73847E1	-3.26602E1	-3.26366E1	2.67816E1	1.19713E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.99879E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16846E-1	-7.98535E-1	-9.13141E0	-9.14204E0	4.62532E-3	9.37939E-2	2.72379E1	-3.26732E1	-3.2639E1	2.68118E1	1.19749E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.1687E-1	-7.98941E-1	-9.13143E0	-9.14204E0	4.91142E-3	9.39846E-2	2.73835E1	-3.26321E1	-3.25868E1	2.67992E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16751E-1	-7.98869E-1	-9.13103E0	-9.14183E0	4.93526E-3	9.36747E-2	2.71712E1	-3.26396E1	-3.26313E1	2.68004E1	1.19978E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16846E-1	-7.98774E-1	-9.13136E0	-9.14199E0	4.88758E-3	9.39131E-2	2.73964E1	-3.26416E1	-3.26236E1	2.68142E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.98156E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16655E-1	-7.98321E-1	-9.13153E0	-9.14204E0	4.88758E-3	9.38416E-2	2.73297E1	-3.26759E1	-3.26254E1	2.68166E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16417E-1	-7.98631E-1	-9.13136E0	-9.14209E0	4.8399E-3	9.38416E-2	2.71606E1	-3.26402E1	-3.26213E1	2.67972E1	1.19913E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16774E-1	-7.98583E-1	-9.13117E0	-9.1419E0	4.86374E-3	9.35793E-2	2.73865E1	-3.26799E1	-3.2637E1	2.68176E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.00453E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16607E-1	-7.98655E-1	-9.13131E0	-9.14207E0	4.8399E-3	9.35555E-2	2.71633E1	-3.26597E1	-3.26392E1	2.6795E1	1.19761E-7	2.51456E-3	2.51456E-3	6.33512E-3	3.00882E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16703E-1	-7.98821E-1	-9.13136E0	-9.14216E0	4.91142E-3	9.38177E-2	2.73393E1	-3.26567E1	-3.26386E1	2.67998E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.1687E-1	-7.98535E-1	-9.13115E0	-9.14195E0	4.88758E-3	9.377E-2	2.73305E1	-3.26178E1	-3.26703E1	2.68134E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16703E-1	-7.98702E-1	-9.13126E0	-9.14199E0	4.81606E-3	9.39846E-2	2.7385E1	-3.26723E1	-3.25978E1	2.68298E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01738E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16631E-1	-7.98631E-1	-9.13105E0	-9.14207E0	4.74453E-3	9.38654E-2	2.73429E1	-3.26554E1	-3.26056E1	2.67945E1	1.19653E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01609E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16774E-1	-7.98655E-1	-9.131E0	-9.14183E0	5.07832E-3	9.37939E-2	2.719E1	-3.2645E1	-3.26327E1	2.68244E1	1.19925E-7	2.51248E-3	2.51248E-3	6.32978E-3	3.00942E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16488E-1	-7.9844E-1	-9.13088E0	-9.14187E0	4.74453E-3	9.38177E-2	2.73068E1	-3.26499E1	-3.26163E1	2.67786E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16941E-1	-7.98583E-1	-9.13107E0	-9.14202E0	4.72069E-3	9.39131E-2	2.74532E1	-3.26652E1	-3.26321E1	2.67739E1	1.20375E-7	2.52197E-3	2.52197E-3	6.3126E-3	3.00741E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16822E-1	-7.98464E-1	-9.13124E0	-9.14187E0	4.74453E-3	9.39846E-2	2.72591E1	-3.26685E1	-3.26113E1	2.67705E1	1.20031E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01209E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16727E-1	-7.98535E-1	-9.13103E0	-9.14228E0	4.88758E-3	9.408E-2	2.73772E1	-3.26585E1	-3.26224E1	2.67908E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01995E-1