[Scan]
initial_time=2016-01-28T21:19:53
final_time=2016-01-28T21:20:13
ip_count=19
run=1026
dataset=8
scan=589
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.0873E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.39714E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.03384E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=4.34816E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-3.00443E-10
mult1=-9.32203E-9
mult2=-2.56843E-9
rf_tmon=-7.40589E-3
rf_agc=3.09613E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.73608E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.68916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19568E1
lens5a_imon=1.96937E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53478E1
cs_ef1b_imon=3.18056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02399E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05228E1
cs_ea1_imon=1.07246E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36174E0
lens1_imon=2.51973E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04057E1
cs_ea2_imon=1.41673E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=3.06343E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.12113E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11646E1
os_restr1_imon=4.32085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15426E1
os_ea1_imon=2.47335E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.10019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=9.4124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=1.95557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.08872E-8
tplens_vset=1.4E-1
tplens_vmon=1.64624E0
tplens_imon=-6.86289E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26378E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26484E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98616E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.96982E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=8.57965E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.16873E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43655E0
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70993E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11057E1
os_restr2_imon=3.37265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01425E1
cs_anode2_imon=2.10874E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71818E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.10972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.75464E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.06159E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-6.73362E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56051E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.44049E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.31214E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.12686E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.41327E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07672E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5979E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31786E1
cs_fil1_imon=7.91768E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02422E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61443E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10551E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62773E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-1.90914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21851E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16345E-1	-7.98416E-1	-9.13136E0	-9.14178E0	4.69685E-3	9.38654E-2	2.71747E1	-3.26301E1	-3.26048E1	2.68785E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00041E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16226E-1	-7.98512E-1	-9.13131E0	-9.14173E0	5.07832E-3	9.40323E-2	2.73964E1	-3.26723E1	-3.26164E1	2.68136E1	1.20158E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.97647E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16083E-1	-7.98559E-1	-9.13126E0	-9.14183E0	4.72069E-3	9.38892E-2	2.72408E1	-3.26764E1	-3.26411E1	2.68047E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16488E-1	-7.98535E-1	-9.13129E0	-9.14211E0	5.29289E-3	9.37462E-2	2.74196E1	-3.2656E1	-3.26211E1	2.6822E1	1.19991E-7	2.52236E-3	2.52236E-3	6.29684E-3	3.00348E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16345E-1	-7.98535E-1	-9.13155E0	-9.14176E0	5.24521E-3	9.37939E-2	2.72203E1	-3.26556E1	-3.26123E1	2.68007E1	1.19925E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.1625E-1	-7.98512E-1	-9.13126E0	-9.14161E0	4.95911E-3	9.377E-2	2.74174E1	-3.26597E1	-3.26447E1	2.68157E1	1.1993E-7	2.5199E-3	2.5199E-3	6.30221E-3	3.0223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16178E-1	-7.98678E-1	-9.13136E0	-9.14204E0	4.79221E-3	9.36508E-2	2.72594E1	-3.26723E1	-3.26266E1	2.67776E1	1.20005E-7	2.51296E-3	2.51296E-3	6.3074E-3	3.0286E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16464E-1	-7.98464E-1	-9.13148E0	-9.14204E0	4.91142E-3	9.37462E-2	2.73039E1	-3.26645E1	-3.26326E1	2.68292E1	1.198E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16679E-1	-7.98583E-1	-9.13115E0	-9.14192E0	4.98295E-3	9.40323E-2	2.72751E1	-3.26482E1	-3.26218E1	2.6801E1	1.20122E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16584E-1	-7.98535E-1	-9.13138E0	-9.14221E0	4.93526E-3	9.39608E-2	2.72955E1	-3.26663E1	-3.26512E1	2.68268E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16679E-1	-7.98512E-1	-9.13148E0	-9.14195E0	4.8399E-3	9.40561E-2	2.72347E1	-3.26768E1	-3.26113E1	2.67998E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9874E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16607E-1	-7.98392E-1	-9.13131E0	-9.14204E0	4.8399E-3	9.377E-2	2.73417E1	-3.26673E1	-3.26502E1	2.68136E1	1.19713E-7	2.51804E-3	2.51804E-3	6.34661E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16607E-1	-7.98607E-1	-9.13112E0	-9.14176E0	4.8399E-3	9.38416E-2	2.74054E1	-3.26496E1	-3.25894E1	2.68029E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09286E0	-8.16727E-1	-7.98965E-1	-9.13119E0	-9.14197E0	4.76837E-3	9.37223E-2	2.72357E1	-3.26516E1	-3.26266E1	2.67957E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.16607E-1	-7.98464E-1	-9.13143E0	-9.14214E0	4.62532E-3	9.39608E-2	2.73201E1	-3.26466E1	-3.2621E1	2.67895E1	1.20276E-7	2.51783E-3	2.51783E-3	6.30221E-3	3.00494E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09333E0	-8.16393E-1	-7.98726E-1	-9.13136E0	-9.14202E0	4.8399E-3	9.40323E-2	2.72384E1	-3.26425E1	-3.26174E1	2.68154E1	1.20208E-7	2.53091E-3	2.53091E-3	6.3074E-3	2.9971E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.1625E-1	-7.98273E-1	-9.1316E0	-9.14197E0	5.00679E-3	9.36508E-2	2.7347E1	-3.26797E1	-3.26325E1	2.681E1	1.20031E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99613E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09309E0	-8.16512E-1	-7.98488E-1	-9.13129E0	-9.14202E0	5.17368E-3	9.38177E-2	2.72184E1	-3.26508E1	-3.26319E1	2.67995E1	1.19953E-7	2.52115E-3	2.52115E-3	6.32356E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16703E-1	-7.98464E-1	-9.13153E0	-9.14178E0	5.00679E-3	9.39131E-2	2.73411E1	-3.26861E1	-3.26044E1	2.68052E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16798E-1	-7.98273E-1	-9.13136E0	-9.1419E0	5.07832E-3	9.37462E-2	2.71818E1	-3.26484E1	-3.26378E1	2.68082E1	1.198E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99686E-1