[Scan]
initial_time=2016-01-28T21:20:20
final_time=2016-01-28T21:20:40
ip_count=19
run=1026
dataset=8
scan=590
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.39866E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=2.04115E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=4.11642E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-2.61974E-10
mult1=-1.00764E-8
mult2=-2.907E-9
rf_tmon=-3.71355E-3
rf_agc=3.40446E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.74311E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=2.00218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.18236E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=1.09769E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45668E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65119E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.37888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.04613E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.12116E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14909E1
os_ea1_imon=2.4719E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22746E0
cs_ionrep_imon=9.56381E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.0892E-8
tplens_vset=1.4E-1
tplens_vmon=1.65225E0
tplens_imon=-1.37123E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26358E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.58436E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98375E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.05084E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23107E0
ionrepsh_imon=8.73106E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.20117E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42393E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00443E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.36364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31298E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7141E1
iondef1_imon=1.0894E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.75595E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.06387E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-7.63461E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.88606E-6
window_vset=0.0E0
window_vmon=2.9663E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-5.03975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.19896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50382E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33198E1
os_fil1_imon=9.41862E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08068E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59969E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31735E1
cs_fil1_imon=6.95061E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.0289E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61275E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97653E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.562E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21655E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=2.98092E-1
chamber_ion_pmon=1.1964E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09748E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16607E-1	-7.98821E-1	-9.13124E0	-9.14192E0	4.95911E-3	9.37462E-2	2.72296E1	-3.2672E1	-3.2639E1	2.68007E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16727E-1	-7.98488E-1	-9.13124E0	-9.14166E0	4.57764E-3	9.36985E-2	2.73541E1	-3.26632E1	-3.26331E1	2.68088E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16655E-1	-7.98607E-1	-9.13115E0	-9.14176E0	4.76837E-3	9.38177E-2	2.71306E1	-3.26603E1	-3.26401E1	2.68064E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16631E-1	-7.98512E-1	-9.13112E0	-9.14159E0	4.45843E-3	9.38892E-2	2.73818E1	-3.26443E1	-3.26278E1	2.68214E1	1.19872E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.99348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16298E-1	-7.98559E-1	-9.13117E0	-9.14168E0	4.55379E-3	9.37223E-2	2.73765E1	-3.26685E1	-3.26331E1	2.67775E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16488E-1	-7.98631E-1	-9.13126E0	-9.14185E0	4.81606E-3	9.40084E-2	2.71675E1	-3.26783E1	-3.26212E1	2.68148E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16369E-1	-7.98607E-1	-9.13105E0	-9.1419E0	4.60148E-3	9.39131E-2	2.73375E1	-3.26236E1	-3.26266E1	2.67968E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16321E-1	-7.98726E-1	-9.13107E0	-9.14178E0	4.72069E-3	9.37462E-2	2.72174E1	-3.26561E1	-3.26362E1	2.68082E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.02769E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16298E-1	-7.98416E-1	-9.13107E0	-9.14209E0	4.91142E-3	9.37223E-2	2.74471E1	-3.26756E1	-3.26566E1	2.67878E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16345E-1	-7.98178E-1	-9.13131E0	-9.14166E0	4.98295E-3	9.39369E-2	2.72618E1	-3.26356E1	-3.26308E1	2.68448E1	1.19705E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.98481E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16226E-1	-7.98297E-1	-9.13148E0	-9.1418E0	4.8399E-3	9.39608E-2	2.73364E1	-3.26508E1	-3.26378E1	2.67908E1	1.19705E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16393E-1	-7.98512E-1	-9.13122E0	-9.14195E0	5.03063E-3	9.40323E-2	2.73622E1	-3.2653E1	-3.26146E1	2.68244E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16464E-1	-7.98535E-1	-9.13134E0	-9.14168E0	4.79221E-3	9.37223E-2	2.726E1	-3.26813E1	-3.26434E1	2.67974E1	1.19861E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16607E-1	-7.98464E-1	-9.13134E0	-9.14195E0	5.10216E-3	9.40084E-2	2.73289E1	-3.2665E1	-3.26108E1	2.67702E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16464E-1	-7.98678E-1	-9.13141E0	-9.1419E0	4.93526E-3	9.38416E-2	2.719E1	-3.2656E1	-3.26376E1	2.68238E1	1.1991E-7	2.517E-3	2.517E-3	6.3074E-3	2.98571E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16536E-1	-7.9844E-1	-9.13136E0	-9.14211E0	4.93526E-3	9.36985E-2	2.72532E1	-3.26922E1	-3.25767E1	2.6792E1	1.19991E-7	2.51271E-3	2.51271E-3	6.31879E-3	3.00522E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16441E-1	-7.98535E-1	-9.13129E0	-9.14187E0	4.79221E-3	9.36985E-2	2.72762E1	-3.26632E1	-3.26396E1	2.68082E1	1.19613E-7	2.51611E-3	2.51611E-3	6.3074E-3	3.01065E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16345E-1	-7.98702E-1	-9.13155E0	-9.14171E0	4.64916E-3	9.37939E-2	2.73546E1	-3.26626E1	-3.26254E1	2.67637E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16417E-1	-7.98583E-1	-9.13122E0	-9.14195E0	4.3869E-3	9.33409E-2	2.73572E1	-3.2681E1	-3.26399E1	2.67572E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16274E-1	-7.98821E-1	-9.13136E0	-9.14183E0	4.86374E-3	9.36985E-2	2.7141E1	-3.26591E1	-3.26358E1	2.68274E1	1.1964E-7	2.52342E-3	2.52342E-3	6.33388E-3	2.98092E-1