[Scan]
initial_time=2016-01-28T21:21:40
final_time=2016-01-28T21:22:00
ip_count=19
run=1026
dataset=8
scan=593
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.15845E-1
ql1_imon=1.39967E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.01602E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=4.07672E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-2.75064E-10
mult1=-9.53398E-9
mult2=-2.58299E-9
rf_tmon=-5.59237E-3
rf_agc=3.36702E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.72579E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6143E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20456E1
lens5a_imon=2.0074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=3.19347E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04559E2
lens23_imon=1.02068E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05212E1
cs_ea1_imon=1.10272E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45338E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64886E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03454E1
cs_ea2_imon=1.38198E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=3.04681E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.121E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11459E1
os_restr1_imon=4.31215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=2.47035E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63595E1
os_ef1bup_imon=3.09338E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=9.70348E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93179E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=1.97331E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.09117E-8
tplens_vset=1.4E-1
tplens_vmon=1.58008E0
tplens_imon=-1.43153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26955E1
iondef3_imon=1.52851E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.96636E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=8.84341E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.342E1
lens5b_imon=2.17729E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74165E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40075E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.20389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0673E0
os_ef2alow_imon=-2.53635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86226E-1
os_ef2bup_imon=-5.16017E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=3.36306E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01751E1
cs_anode2_imon=2.0932E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72833E1
iondef1_imon=1.08396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.07912E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.75954E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.07296E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10929E0
cs_ionaccel_imon=-8.12629E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47257E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=2.06102E-1
window_imon=-9.5859E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.87016E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=7.53382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.78701E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.04019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.40723E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59782E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31768E1
cs_fil1_imon=7.50751E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.74326E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61471E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.4375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14983E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.66286E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-2.28691E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2173E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.10959E-1
res40_imon=-2.34522E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09665E0	-8.16059E-1	-7.98845E-1	-9.13174E0	-9.1418E0	4.52995E-3	9.37462E-2	2.72915E1	-3.26296E1	-3.25906E1	2.67998E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.1625E-1	-7.9875E-1	-9.13157E0	-9.14218E0	4.95911E-3	9.36747E-2	2.72973E1	-3.26482E1	-3.26362E1	2.67662E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.16298E-1	-7.98774E-1	-9.13126E0	-9.14166E0	4.673E-3	9.36031E-2	2.72461E1	-3.26679E1	-3.26071E1	2.68001E1	1.19653E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.16154E-1	-7.99012E-1	-9.13129E0	-9.1418E0	4.88758E-3	9.36031E-2	2.73824E1	-3.26396E1	-3.26301E1	2.68172E1	1.20055E-7	2.52169E-3	2.52169E-3	6.36144E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.16607E-1	-7.99084E-1	-9.13134E0	-9.1418E0	4.76837E-3	9.3627E-2	2.72048E1	-3.26567E1	-3.26074E1	2.68184E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.1656E-1	-7.98845E-1	-9.13107E0	-9.14209E0	4.76837E-3	9.39369E-2	2.7361E1	-3.26404E1	-3.26152E1	2.6777E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16274E-1	-7.98702E-1	-9.13124E0	-9.14173E0	5.05447E-3	9.36985E-2	2.71657E1	-3.26711E1	-3.2614E1	2.67788E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16226E-1	-7.98965E-1	-9.13136E0	-9.14185E0	4.91142E-3	9.36985E-2	2.73267E1	-3.26561E1	-3.26561E1	2.67794E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16441E-1	-7.98631E-1	-9.13124E0	-9.14183E0	4.95911E-3	9.36985E-2	2.72036E1	-3.26242E1	-3.26038E1	2.67896E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16393E-1	-7.98726E-1	-9.13136E0	-9.1418E0	4.673E-3	9.37462E-2	2.70886E1	-3.26523E1	-3.26271E1	2.68239E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00197E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16202E-1	-7.98535E-1	-9.1315E0	-9.1419E0	4.88758E-3	9.38177E-2	2.72714E1	-3.2682E1	-3.26305E1	2.67995E1	1.20127E-7	2.51783E-3	2.51783E-3	6.33341E-3	2.99014E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.15892E-1	-7.98607E-1	-9.13153E0	-9.14166E0	4.74453E-3	9.36985E-2	2.74251E1	-3.26756E1	-3.2604E1	2.67832E1	1.19619E-7	2.52454E-3	2.52454E-3	6.34231E-3	3.02025E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16011E-1	-7.98845E-1	-9.1316E0	-9.14166E0	5.03063E-3	9.37462E-2	2.7236E1	-3.26681E1	-3.26002E1	2.681E1	1.19819E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00676E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.15892E-1	-7.98559E-1	-9.13174E0	-9.14168E0	4.76837E-3	9.36985E-2	2.7321E1	-3.2639E1	-3.26484E1	2.68024E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9926E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.15988E-1	-7.98607E-1	-9.13179E0	-9.14159E0	5.10216E-3	9.36747E-2	2.7347E1	-3.26561E1	-3.26071E1	2.67824E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16035E-1	-7.99036E-1	-9.13172E0	-9.14166E0	5.14984E-3	9.36985E-2	2.72552E1	-3.26639E1	-3.26194E1	2.67896E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00966E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16011E-1	-7.98774E-1	-9.13148E0	-9.14152E0	4.79221E-3	9.38654E-2	2.72901E1	-3.26615E1	-3.265E1	2.6804E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16011E-1	-7.98416E-1	-9.13148E0	-9.14178E0	5.126E-3	9.36985E-2	2.73257E1	-3.26425E1	-3.26242E1	2.6836E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.15916E-1	-7.98631E-1	-9.13146E0	-9.14161E0	5.26905E-3	9.37939E-2	2.72336E1	-3.26494E1	-3.2632E1	2.68106E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.15845E-1	-7.98702E-1	-9.13143E0	-9.14171E0	5.17368E-3	9.35793E-2	2.72833E1	-3.26603E1	-3.26955E1	2.68082E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9926E-1