[Scan]
initial_time=2016-01-28T21:22:07
final_time=2016-01-28T21:22:26
ip_count=19
run=1026
dataset=8
scan=594
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.39886E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.98429E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=4.07362E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-2.73788E-10
mult1=-1.02359E-8
mult2=-2.70566E-9
rf_tmon=-4.30735E-3
rf_agc=3.30774E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.70234E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67095E0
bslens_imon=2.64957E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1959E1
lens5a_imon=1.97105E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05302E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=3.17227E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02279E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.07448E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3695E0
lens1_imon=2.77078E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64044E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0396E1
cs_ea2_imon=1.42158E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=3.04144E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.12412E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15428E1
os_ea1_imon=2.45772E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25516E0
cs_ionrep_imon=9.39682E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93556E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.08415E-8
tplens_vset=1.4E-1
tplens_vmon=1.69102E0
tplens_imon=-9.04627E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26517E1
iondef3_imon=1.48402E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26327E1
iondef2_imon=1.60743E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.9832E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=3.90155E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23863E0
ionrepsh_imon=8.44185E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33541E1
lens5b_imon=2.18519E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47737E0
os_ea2_imon=-4.13684E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00388E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.37013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22985E2
cs_ionfoca_imon=6.30773E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72861E1
iondef1_imon=1.12407E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67947E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.76043E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.06195E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-8.3554E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.84281E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-6.48134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-4.1748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92709E3
multa_neg_imon=7.65216E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.52456E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.96899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31162E0
defgridb_imon=6.34826E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.40378E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08068E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59913E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=6.61424E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.99597E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61529E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02788E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57946E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.01125E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21846E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.04051E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.15845E-1	-7.98392E-1	-9.13136E0	-9.1418E0	5.38826E-3	9.38177E-2	2.72931E1	-3.26562E1	-3.26106E1	2.68166E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.15845E-1	-7.98392E-1	-9.13141E0	-9.14197E0	5.00679E-3	9.36031E-2	2.73369E1	-3.26634E1	-3.26104E1	2.6787E1	1.1969E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.15868E-1	-7.98202E-1	-9.13136E0	-9.14223E0	4.88758E-3	9.35078E-2	2.7299E1	-3.26387E1	-3.26398E1	2.6816E1	1.19819E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.98554E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09665E0	-8.15988E-1	-7.98512E-1	-9.13141E0	-9.14166E0	5.07832E-3	9.37462E-2	2.72967E1	-3.2663E1	-3.26208E1	2.68309E1	1.19822E-7	2.51752E-3	2.51752E-3	6.3074E-3	2.98213E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.16011E-1	-7.98655E-1	-9.13179E0	-9.14192E0	5.22137E-3	9.34362E-2	2.72745E1	-3.26332E1	-3.26068E1	2.67824E1	1.20019E-7	2.52147E-3	2.52147E-3	6.32518E-3	2.99073E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.15749E-1	-7.98845E-1	-9.13143E0	-9.14209E0	5.07832E-3	9.35555E-2	2.72809E1	-3.26608E1	-3.26349E1	2.6807E1	1.19697E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.15964E-1	-7.98702E-1	-9.13146E0	-9.14192E0	5.00679E-3	9.34839E-2	2.73189E1	-3.26669E1	-3.26386E1	2.67986E1	1.19809E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.15988E-1	-7.98416E-1	-9.13174E0	-9.14226E0	5.19753E-3	9.38177E-2	2.72558E1	-3.26621E1	-3.26194E1	2.67926E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.15916E-1	-7.98607E-1	-9.13186E0	-9.14195E0	5.19753E-3	9.377E-2	2.73063E1	-3.26673E1	-3.26354E1	2.67992E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.15773E-1	-7.98583E-1	-9.13177E0	-9.14195E0	4.74453E-3	9.36747E-2	2.73253E1	-3.26689E1	-3.26248E1	2.68436E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9978E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.15868E-1	-7.98774E-1	-9.13134E0	-9.14178E0	5.19753E-3	9.3627E-2	2.72809E1	-3.26997E1	-3.25906E1	2.6825E1	1.19819E-7	2.5225E-3	2.5225E-3	6.35223E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16369E-1	-7.98607E-1	-9.13143E0	-9.14207E0	5.26905E-3	9.36747E-2	2.73339E1	-3.26756E1	-3.26676E1	2.68082E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.1594E-1	-7.98726E-1	-9.13134E0	-9.1419E0	5.126E-3	9.3627E-2	2.73145E1	-3.26614E1	-3.26413E1	2.68106E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.16154E-1	-7.98917E-1	-9.13119E0	-9.14185E0	4.95911E-3	9.3627E-2	2.73145E1	-3.26856E1	-3.26231E1	2.67833E1	1.19653E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16298E-1	-7.9875E-1	-9.13134E0	-9.14209E0	4.86374E-3	9.36031E-2	2.73063E1	-3.26741E1	-3.2635E1	2.67884E1	1.19749E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.98156E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16417E-1	-7.98845E-1	-9.13131E0	-9.14207E0	5.22137E-3	9.377E-2	2.73442E1	-3.26597E1	-3.2617E1	2.68094E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0148E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16441E-1	-7.98845E-1	-9.13112E0	-9.14211E0	5.24521E-3	9.39369E-2	2.7311E1	-3.26885E1	-3.26449E1	2.68208E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16536E-1	-7.98559E-1	-9.13136E0	-9.14204E0	4.79221E-3	9.40323E-2	2.72967E1	-3.26549E1	-3.2623E1	2.67577E1	1.20122E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16536E-1	-7.98345E-1	-9.13126E0	-9.14216E0	4.79221E-3	9.3627E-2	2.73057E1	-3.2636E1	-3.26236E1	2.68128E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16417E-1	-7.98488E-1	-9.1315E0	-9.1418E0	4.86374E-3	9.40323E-2	2.72861E1	-3.26327E1	-3.26517E1	2.67947E1	1.19705E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00302E-1