[Scan]
initial_time=2016-01-28T21:23:27
final_time=2016-01-28T21:23:46
ip_count=19
run=1026
dataset=8
scan=597
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.39919E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.99866E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=3.44455E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-2.93219E-10
mult1=-1.021E-8
mult2=-2.75254E-9
rf_tmon=-6.14667E-3
rf_agc=3.25285E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.69041E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68155E0
bslens_imon=2.21409E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18574E1
lens5a_imon=1.95891E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.0584E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53286E1
cs_ef1b_imon=3.17623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04672E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04021E1
cs_ea1_imon=1.02946E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37374E0
lens1_imon=3.11664E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=3.01153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04805E1
cs_ea2_imon=1.4464E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=3.01405E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.12376E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14722E1
os_ea1_imon=2.40876E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19429E0
cs_ionrep_imon=9.25752E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.94135E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=1.97359E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.08491E-8
tplens_vset=1.4E-1
tplens_vmon=1.69924E0
tplens_imon=-5.67882E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.47153E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.62903E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98487E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=4.02521E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.19311E0
ionrepsh_imon=7.97271E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.22011E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55177E0
os_ea2_imon=-3.80294E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06043E2
lens4b_imon=1.99979E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.22525E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04555E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36757E-1
os_ef2bup_imon=-4.88279E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.36328E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22953E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0226E1
cs_anode2_imon=2.11054E-5
iondef1_vset=2.763E1
iondef1_vmon=2.723E1
iondef1_imon=1.16112E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.7583E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.08751E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1824E0
cs_ionaccel_imon=-7.20213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=8.11671E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86789E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92718E3
multa_neg_imon=7.90192E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93677E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.85426E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.91345E0
defgridb_imon=6.91797E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33205E1
os_fil1_imon=9.42012E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0784E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59932E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31692E1
cs_fil1_imon=7.8456E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.17306E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61282E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52365E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27062E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21572E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.52394E-1
res40_imon=-2.15099E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16369E-1	-7.98178E-1	-9.13146E0	-9.14202E0	4.8399E-3	9.40084E-2	2.71635E1	-3.26419E1	-3.27216E1	2.68227E1	1.19953E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.9943E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16131E-1	-7.98512E-1	-9.13138E0	-9.14195E0	4.81606E-3	9.39608E-2	2.73324E1	-3.26556E1	-3.26306E1	2.67914E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16154E-1	-7.9844E-1	-9.13165E0	-9.14149E0	4.74453E-3	9.377E-2	2.7308E1	-3.26585E1	-3.26242E1	2.67879E1	1.1988E-7	2.5199E-3	2.5199E-3	6.323E-3	3.00494E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16107E-1	-7.98416E-1	-9.13122E0	-9.14159E0	4.72069E-3	9.37939E-2	2.72868E1	-3.26803E1	-3.26172E1	2.68202E1	1.19891E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16107E-1	-7.98512E-1	-9.13124E0	-9.14207E0	4.95911E-3	9.377E-2	2.73171E1	-3.26422E1	-3.26494E1	2.67986E1	1.20311E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16083E-1	-7.98488E-1	-9.13134E0	-9.1418E0	4.64916E-3	9.36508E-2	2.72871E1	-3.26717E1	-3.26278E1	2.67914E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16035E-1	-7.98559E-1	-9.13122E0	-9.14221E0	4.88758E-3	9.35555E-2	2.73315E1	-3.26591E1	-3.262E1	2.68016E1	1.19601E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.15916E-1	-7.98965E-1	-9.13119E0	-9.14197E0	5.126E-3	9.36508E-2	2.7251E1	-3.26675E1	-3.26116E1	2.68135E1	1.19627E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00432E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.15916E-1	-7.98678E-1	-9.13134E0	-9.14197E0	5.05447E-3	9.38654E-2	2.73237E1	-3.26759E1	-3.25912E1	2.68009E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16178E-1	-7.98178E-1	-9.13138E0	-9.14142E0	4.60148E-3	9.36747E-2	2.73399E1	-3.26987E1	-3.2584E1	2.68106E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16226E-1	-7.98416E-1	-9.13122E0	-9.14161E0	4.64916E-3	9.377E-2	2.72408E1	-3.2649E1	-3.2626E1	2.68052E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16107E-1	-7.98297E-1	-9.13138E0	-9.14171E0	4.81606E-3	9.39131E-2	2.73273E1	-3.27131E1	-3.2641E1	2.68226E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16178E-1	-7.98321E-1	-9.13155E0	-9.14159E0	4.74453E-3	9.37223E-2	2.73549E1	-3.26527E1	-3.26289E1	2.67989E1	1.20069E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16274E-1	-7.98249E-1	-9.13134E0	-9.14149E0	4.74453E-3	9.37223E-2	2.71336E1	-3.26805E1	-3.26005E1	2.68082E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.02621E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16417E-1	-7.98464E-1	-9.13146E0	-9.1414E0	4.76837E-3	9.37223E-2	2.73554E1	-3.27202E1	-3.26419E1	2.67933E1	1.20092E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.02368E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16417E-1	-7.98512E-1	-9.13112E0	-9.14135E0	4.673E-3	9.38892E-2	2.73028E1	-3.26735E1	-3.26532E1	2.68059E1	1.1995E-7	2.51296E-3	2.51296E-3	6.31321E-3	2.99811E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16917E-1	-7.98512E-1	-9.13119E0	-9.14142E0	4.98295E-3	9.40323E-2	2.73143E1	-3.26731E1	-3.26401E1	2.68202E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.16536E-1	-7.98082E-1	-9.13146E0	-9.14149E0	5.07832E-3	9.38177E-2	2.72252E1	-3.26092E1	-3.26681E1	2.67914E1	1.20137E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.00942E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.16488E-1	-7.98416E-1	-9.1311E0	-9.14168E0	5.00679E-3	9.39846E-2	2.74148E1	-3.27068E1	-3.26254E1	2.67914E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.1625E-1	-7.98726E-1	-9.13112E0	-9.14197E0	4.74453E-3	9.37462E-2	2.723E1	-3.26554E1	-3.26128E1	2.67902E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.01223E-1