[Scan]
initial_time=2016-01-28T21:24:20
final_time=2016-01-28T21:24:39
ip_count=19
run=1026
dataset=8
scan=599
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08879E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.38484E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.98189E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.3747E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=-2.50602E-10
mult1=-1.12214E-8
mult2=-2.6707E-9
rf_tmon=-4.1339E-3
rf_agc=3.40365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.69475E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=3.53075E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21541E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12345E2
lens4a_imon=2.03897E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53522E1
cs_ef1b_imon=3.18304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04503E2
lens23_imon=1.02822E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0684E1
cs_ea1_imon=1.18554E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36489E0
lens1_imon=1.45666E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64857E1
os_ef1alow_imon=2.98043E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.01915E1
cs_ea2_imon=1.39225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84429E1
cs_ef1a_imon=3.04646E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.12802E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11349E1
os_restr1_imon=4.30833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16898E1
os_ea1_imon=2.59494E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.09651E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.36477E0
cs_ionrep_imon=9.1478E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91722E2
cs_nozzle_imon=1.92617E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=1.94828E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.09559E-8
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=5.43492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.54869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26951E1
iondef2_imon=1.47684E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02831E2
lens6_imon=2.98753E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.99497E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.42789E0
ionrepsh_imon=9.25044E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.11145E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.14134E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.27215E0
os_ea2_imon=-8.05023E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06181E2
lens4b_imon=2.01674E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.2032E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0702E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85647E-1
os_ef2bup_imon=-5.18797E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10712E1
os_restr2_imon=3.36793E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23193E2
cs_ionfoca_imon=6.26035E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01751E1
cs_anode2_imon=2.09598E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.02238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.7538E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.09373E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12319E0
cs_ionaccel_imon=-9.09936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.73997E-6
window_vset=0.0E0
window_vmon=2.23478E-1
window_imon=-9.6554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39265E-4
mask2_vset=0.0E0
mask2_vmon=-1.86999E1
mask2_imon=-7.08371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92538E3
multa_neg_imon=6.87549E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93801E3
defgrida_imon=6.57818E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=8.39036E-5
defgridb_vset=0.0E0
defgridb_vmon=-7.17534E-1
defgridb_imon=5.21905E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33178E1
os_fil1_imon=9.4103E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07937E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59941E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3177E1
cs_fil1_imon=7.45538E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.26252E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6128E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21934E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.59832E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.0726E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35052E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21577E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.97187E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.86429E-1
res40_imon=-2.31046E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09719E0	-8.16202E-1	-7.98273E-1	-9.13141E0	-9.14161E0	4.76837E-3	9.37223E-2	2.73976E1	-3.25239E1	-3.26603E1	2.6801E1	1.198E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00197E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16107E-1	-7.98535E-1	-9.13141E0	-9.14164E0	4.79221E-3	9.37462E-2	2.72791E1	-3.26744E1	-3.26685E1	2.68016E1	1.19809E-7	2.52647E-3	2.52647E-3	6.32936E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16321E-1	-7.98702E-1	-9.13136E0	-9.14156E0	4.673E-3	9.36508E-2	2.73147E1	-3.26518E1	-3.26116E1	2.67758E1	1.20069E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01871E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16059E-1	-7.9906E-1	-9.13153E0	-9.14156E0	4.79221E-3	9.35078E-2	2.72986E1	-3.26154E1	-3.26514E1	2.67976E1	1.20004E-7	2.52707E-3	2.52707E-3	6.29665E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.15964E-1	-7.98941E-1	-9.13126E0	-9.14152E0	4.64916E-3	9.3627E-2	2.71771E1	-3.26579E1	-3.26194E1	2.68178E1	1.19902E-7	2.50989E-3	2.50989E-3	6.30202E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16202E-1	-7.98798E-1	-9.13126E0	-9.14183E0	4.88758E-3	9.37223E-2	2.74213E1	-3.26667E1	-3.26148E1	2.67956E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.1625E-1	-7.98726E-1	-9.13131E0	-9.14192E0	4.8399E-3	9.39131E-2	2.71837E1	-3.26657E1	-3.26236E1	2.68202E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16178E-1	-7.98702E-1	-9.13141E0	-9.14209E0	4.91142E-3	9.39608E-2	2.73918E1	-3.26455E1	-3.26213E1	2.67827E1	1.20226E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16107E-1	-7.98774E-1	-9.13165E0	-9.14218E0	4.72069E-3	9.37223E-2	2.71371E1	-3.26405E1	-3.25965E1	2.6774E1	1.20042E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.006E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16345E-1	-7.98821E-1	-9.13162E0	-9.14187E0	4.64916E-3	9.37939E-2	2.73821E1	-3.26591E1	-3.26082E1	2.68037E1	1.19941E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.01104E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16321E-1	-7.98917E-1	-9.13174E0	-9.14195E0	4.91142E-3	9.3627E-2	2.72696E1	-3.26729E1	-3.26248E1	2.67974E1	1.20019E-7	2.51911E-3	2.51911E-3	6.30149E-3	3.01892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16059E-1	-7.98869E-1	-9.13143E0	-9.14204E0	4.88758E-3	9.41277E-2	2.73718E1	-3.26777E1	-3.26344E1	2.67866E1	1.19902E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.15964E-1	-7.98821E-1	-9.13157E0	-9.14221E0	4.55379E-3	9.39131E-2	2.73062E1	-3.26721E1	-3.26226E1	2.67707E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.16083E-1	-7.98678E-1	-9.13169E0	-9.1419E0	4.74453E-3	9.34839E-2	2.72714E1	-3.2648E1	-3.26107E1	2.67945E1	1.20028E-7	2.52197E-3	2.52197E-3	6.323E-3	2.99506E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16083E-1	-7.98774E-1	-9.13169E0	-9.14209E0	4.91142E-3	9.39608E-2	2.73782E1	-3.26832E1	-3.26296E1	2.67711E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.1656E-1	-7.98583E-1	-9.13141E0	-9.14235E0	4.91142E-3	9.38892E-2	2.7229E1	-3.26655E1	-3.26714E1	2.67998E1	1.19595E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.01223E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0968E0	-8.16464E-1	-7.9875E-1	-9.13138E0	-9.14247E0	4.88758E-3	9.39369E-2	2.73754E1	-3.26452E1	-3.26398E1	2.68292E1	1.19697E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.03027E-1
2.1E1	0.0E0	1.0E0	8.49E2	5.88E2	-2.09642E0	-8.16488E-1	-7.98655E-1	-9.13148E0	-9.14199E0	4.93526E-3	9.37939E-2	2.71783E1	-3.26437E1	-3.26419E1	2.6796E1	1.19965E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.99E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.16321E-1	-7.98464E-1	-9.13143E0	-9.14207E0	4.69685E-3	9.37223E-2	2.73351E1	-3.26651E1	-3.26314E1	2.68244E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9714E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.16107E-1	-7.9875E-1	-9.13143E0	-9.14233E0	4.86374E-3	9.37462E-2	2.73424E1	-3.26951E1	-3.26464E1	2.68052E1	1.20174E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.97187E-1