[Scan]
initial_time=2016-01-28T21:24:47
final_time=2016-01-28T21:25:06
ip_count=19
run=1026
dataset=8
scan=600
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08846E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.39233E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.04309E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.68965E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-2.46549E-10
mult1=-9.36713E-9
mult2=-2.56691E-9
rf_tmon=-4.72271E-3
rf_agc=3.36039E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.72049E-9
bslens_vset=-6.2E0
bslens_vmon=-6.73405E0
bslens_imon=3.37148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21022E1
lens5a_imon=1.96457E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12336E2
lens4a_imon=2.04509E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53569E1
cs_ef1b_imon=3.17818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02822E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06144E1
cs_ea1_imon=1.12537E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33186E0
lens1_imon=1.86723E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64886E1
os_ef1alow_imon=2.99885E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02746E1
cs_ea2_imon=1.42941E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.03361E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.12622E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.31458E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1655E1
os_ea1_imon=2.52592E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.08817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27982E0
cs_ionrep_imon=8.94959E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91759E2
cs_nozzle_imon=1.93006E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.96288E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.08905E-8
tplens_vset=1.4E-1
tplens_vmon=1.67742E0
tplens_imon=4.30231E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26374E1
iondef2_imon=1.53205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98838E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.96211E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.41314E0
ionrepsh_imon=8.88234E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32938E1
lens5b_imon=2.12066E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4096E0
os_ea2_imon=-4.51082E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06205E2
lens4b_imon=2.01143E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71148E1
cs_ef2a_imon=3.20772E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07889E0
os_ef2alow_imon=-2.49465E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76958E-1
os_ef2bup_imon=-5.15322E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.36237E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.24761E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.09668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73616E1
iondef1_imon=1.06237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.0819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.78552E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.08773E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-9.93342E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.01468E-1
window_imon=-1.02809E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39272E-4
mask2_vset=0.0E0
mask2_vmon=-1.869E1
mask2_imon=-5.17233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92586E3
multa_neg_imon=7.04893E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93757E3
defgrida_imon=6.27733E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.95501E-5
defgridb_vset=0.0E0
defgridb_vmon=-9.03566E-1
defgridb_imon=5.72519E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33176E1
os_fil1_imon=9.40648E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6008E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31793E1
cs_fil1_imon=6.99202E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.30885E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61446E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.46067E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28653E-1
cs_fil2_imon=-2.08998E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17676E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21652E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35662E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16226E-1	-7.98488E-1	-9.13174E0	-9.14195E0	4.673E-3	9.39131E-2	2.73393E1	-3.27582E1	-3.25377E1	2.68118E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00302E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16321E-1	-7.98297E-1	-9.13157E0	-9.14173E0	4.55379E-3	9.37939E-2	2.73814E1	-3.26242E1	-3.26068E1	2.68148E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.03286E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16298E-1	-7.98321E-1	-9.13165E0	-9.14171E0	4.24385E-3	9.39369E-2	2.73263E1	-3.26561E1	-3.26325E1	2.68052E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.02396E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.15988E-1	-7.97915E-1	-9.13141E0	-9.14195E0	4.31538E-3	9.35793E-2	2.73075E1	-3.26735E1	-3.26122E1	2.67854E1	1.20209E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16202E-1	-7.98225E-1	-9.13172E0	-9.14197E0	4.43459E-3	9.37223E-2	2.72576E1	-3.26831E1	-3.26392E1	2.6789E1	1.19653E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16107E-1	-7.98702E-1	-9.13174E0	-9.14192E0	4.72069E-3	9.39846E-2	2.73369E1	-3.26398E1	-3.26188E1	2.68148E1	1.20017E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.16178E-1	-7.98416E-1	-9.13167E0	-9.14171E0	4.74453E-3	9.38416E-2	2.72378E1	-3.26374E1	-3.2641E1	2.681E1	1.19965E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.16226E-1	-7.98607E-1	-9.1315E0	-9.14176E0	4.69685E-3	9.3627E-2	2.73611E1	-3.26408E1	-3.26608E1	2.68134E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16464E-1	-7.98488E-1	-9.13169E0	-9.14166E0	4.48227E-3	9.39369E-2	2.7266E1	-3.26296E1	-3.26206E1	2.6816E1	1.20158E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.98156E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16369E-1	-7.98249E-1	-9.13157E0	-9.1419E0	4.62532E-3	9.35078E-2	2.73105E1	-3.26651E1	-3.2635E1	2.6774E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09665E0	-8.1625E-1	-7.98368E-1	-9.1316E0	-9.14161E0	4.41074E-3	9.36508E-2	2.73552E1	-3.26449E1	-3.26284E1	2.68052E1	1.19705E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16059E-1	-7.98726E-1	-9.13167E0	-9.14171E0	4.673E-3	9.377E-2	2.72751E1	-3.26554E1	-3.26116E1	2.68106E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16202E-1	-7.98321E-1	-9.1316E0	-9.1418E0	4.79221E-3	9.35555E-2	2.72835E1	-3.26705E1	-3.26242E1	2.68022E1	1.19394E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.03185E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16321E-1	-7.98726E-1	-9.13174E0	-9.14221E0	4.81606E-3	9.39846E-2	2.72979E1	-3.26398E1	-3.26272E1	2.68117E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.16131E-1	-7.98678E-1	-9.13174E0	-9.14168E0	4.69685E-3	9.36031E-2	2.72957E1	-3.26325E1	-3.2639E1	2.6807E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.1594E-1	-7.98678E-1	-9.13146E0	-9.14178E0	5.03063E-3	9.39369E-2	2.73303E1	-3.26783E1	-3.26374E1	2.68034E1	1.20209E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16298E-1	-7.98678E-1	-9.1316E0	-9.14199E0	4.74453E-3	9.41038E-2	2.73345E1	-3.26518E1	-3.26248E1	2.6789E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16369E-1	-7.98893E-1	-9.13157E0	-9.14199E0	4.69685E-3	9.36985E-2	2.72945E1	-3.26561E1	-3.26213E1	2.67799E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16369E-1	-7.9875E-1	-9.13153E0	-9.14207E0	4.48227E-3	9.40561E-2	2.72727E1	-3.26862E1	-3.26402E1	2.67935E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16345E-1	-7.98607E-1	-9.13148E0	-9.14192E0	4.45843E-3	9.38892E-2	2.73616E1	-3.26374E1	-3.26296E1	2.68088E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1