[Scan]
initial_time=2016-01-28T21:25:40
final_time=2016-01-28T21:25:59
ip_count=19
run=1026
dataset=8
scan=602
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.3805E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.0254E-9
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=3.83008E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.47502E-10
mult1=-9.73579E-9
mult2=-2.58411E-9
rf_tmon=-4.88701E-3
rf_agc=3.2908E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.74048E-9
bslens_vset=-6.2E0
bslens_vmon=-6.79009E0
bslens_imon=3.42811E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.92174E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12306E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=3.18513E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02999E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0569E1
cs_ea1_imon=1.07334E-5
lens1_vset=-5.0E0
lens1_vmon=-5.24986E0
lens1_imon=1.97341E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.46834E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84377E1
cs_ef1a_imon=3.04368E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.12185E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.31528E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16468E1
os_ea1_imon=2.49619E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.09894E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.16007E0
cs_ionrep_imon=8.83987E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91779E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=1.97365E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.08691E-8
tplens_vset=1.4E-1
tplens_vmon=1.7311E0
tplens_imon=5.85965E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2636E1
iondef3_imon=1.45949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26189E1
iondef2_imon=1.53595E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.99192E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=3.97476E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.36123E0
ionrepsh_imon=8.40452E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32549E1
lens5b_imon=2.12384E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46564E0
os_ea2_imon=-8.65564E-9
lens4b_vset=-4.05E2
lens4b_vmon=-4.06213E2
lens4b_imon=2.00814E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08873E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89122E-1
os_ef2bup_imon=-5.29571E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=3.36584E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.23168E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.08973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72089E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.75942E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.08555E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-8.71708E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.0031E-1
window_imon=-9.20362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.8679E1
mask2_imon=-5.03332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=8.17446E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=5.88446E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50187E3
multb_neg_imon=7.75327E-5
defgridb_vset=0.0E0
defgridb_vmon=-9.00613E-1
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.41001E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0748E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59851E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31766E1
cs_fil1_imon=7.82608E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.7896E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61539E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.29428E-2
os_fil2_imon=-2.38537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19038E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.70969E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35052E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21746E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.97901E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95696E-1
res40_imon=-2.45642E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16178E-1	-7.98368E-1	-9.13148E0	-9.14161E0	5.10216E-3	9.37462E-2	2.73063E1	-3.27422E1	-3.25847E1	2.67974E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.02253E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16274E-1	-7.9813E-1	-9.13174E0	-9.14187E0	4.76837E-3	9.39131E-2	2.74613E1	-3.26705E1	-3.26476E1	2.67649E1	1.20106E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16083E-1	-7.98225E-1	-9.13146E0	-9.14164E0	4.57764E-3	9.36508E-2	2.72528E1	-3.2638E1	-3.26248E1	2.68141E1	1.20122E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.03185E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16464E-1	-7.97963E-1	-9.13143E0	-9.14171E0	4.88758E-3	9.37462E-2	2.73315E1	-3.265E1	-3.26404E1	2.68123E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16083E-1	-7.98154E-1	-9.13122E0	-9.14164E0	4.673E-3	9.38177E-2	2.73122E1	-3.26844E1	-3.26154E1	2.68082E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.15964E-1	-7.98321E-1	-9.13117E0	-9.14156E0	5.03063E-3	9.38416E-2	2.72348E1	-3.26675E1	-3.26356E1	2.6777E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.1594E-1	-7.97987E-1	-9.13138E0	-9.14149E0	4.673E-3	9.38654E-2	2.73237E1	-3.26771E1	-3.26098E1	2.68106E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.1656E-1	-7.98392E-1	-9.13124E0	-9.14192E0	4.79221E-3	9.3627E-2	2.73099E1	-3.26476E1	-3.26284E1	2.681E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16464E-1	-7.98249E-1	-9.13124E0	-9.14149E0	4.74453E-3	9.377E-2	2.73009E1	-3.26464E1	-3.26254E1	2.67848E1	1.2033E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.97704E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16321E-1	-7.98249E-1	-9.13122E0	-9.14176E0	4.76837E-3	9.377E-2	2.72756E1	-3.2682E1	-3.26024E1	2.67944E1	1.19861E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00563E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16536E-1	-7.98202E-1	-9.13131E0	-9.14192E0	4.91142E-3	9.36747E-2	2.72781E1	-3.26771E1	-3.26002E1	2.681E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.1656E-1	-7.98607E-1	-9.13117E0	-9.1419E0	4.62532E-3	9.38892E-2	2.73399E1	-3.26771E1	-3.2602E1	2.68076E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9926E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.1656E-1	-7.98392E-1	-9.131E0	-9.1419E0	4.81606E-3	9.38177E-2	2.73399E1	-3.26464E1	-3.26639E1	2.68051E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02511E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16464E-1	-7.98512E-1	-9.13098E0	-9.14152E0	4.8399E-3	9.36508E-2	2.73321E1	-3.26729E1	-3.2638E1	2.68036E1	1.19978E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.98026E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.1656E-1	-7.98249E-1	-9.13117E0	-9.14161E0	4.76837E-3	9.34601E-2	2.72883E1	-3.26663E1	-3.2599E1	2.68101E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.98156E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16202E-1	-7.98178E-1	-9.13134E0	-9.14202E0	4.86374E-3	9.38177E-2	2.72702E1	-3.26561E1	-3.26296E1	2.67872E1	1.20297E-7	2.52585E-3	2.52585E-3	6.28511E-3	2.99613E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16774E-1	-7.98464E-1	-9.13084E0	-9.14161E0	4.64916E-3	9.38654E-2	2.72943E1	-3.26386E1	-3.26344E1	2.68028E1	1.19913E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16107E-1	-7.98345E-1	-9.13126E0	-9.1419E0	4.62532E-3	9.40323E-2	2.72216E1	-3.26362E1	-3.26386E1	2.67842E1	1.20069E-7	2.52538E-3	2.52538E-3	6.34037E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16226E-1	-7.98368E-1	-9.1311E0	-9.14204E0	4.45843E-3	9.38654E-2	2.73794E1	-3.26738E1	-3.26526E1	2.68267E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16321E-1	-7.98297E-1	-9.13079E0	-9.14185E0	4.64916E-3	9.36508E-2	2.72089E1	-3.26189E1	-3.2636E1	2.68178E1	1.198E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.97901E-1