[Scan]
initial_time=2016-01-28T21:26:06
final_time=2016-01-28T21:26:26
ip_count=19
run=1026
dataset=8
scan=603
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09673E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.4014E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.02127E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=3.60584E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.80511E-10
mult1=-9.9812E-9
mult2=-2.6707E-9
rf_tmon=-6.42906E-3
rf_agc=3.25525E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.69835E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60065E0
bslens_imon=2.84057E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21305E1
lens5a_imon=2.04868E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.0466E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=3.18885E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04508E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05697E1
cs_ea1_imon=1.14204E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44105E0
lens1_imon=2.32146E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02753E1
cs_ea2_imon=1.34896E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8416E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.12212E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.32878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15636E1
os_ea1_imon=2.5422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.34222E0
cs_ionrep_imon=9.54578E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93009E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=1.96927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.08838E-8
tplens_vset=1.4E-1
tplens_vmon=1.58736E0
tplens_imon=-2.89745E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26657E1
iondef3_imon=1.54543E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.51479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02815E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.9833E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34282E0
ionrepsh_imon=9.1925E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3421E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37166E0
os_ea2_imon=-8.04039E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.01102E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.36004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23174E2
cs_ionfoca_imon=6.31983E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71975E1
iondef1_imon=1.0274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.78038E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.08364E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86909E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92559E3
multa_neg_imon=6.7231E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93758E3
defgrida_imon=6.93579E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.6676E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=5.38206E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.41123E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07539E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3177E1
cs_fil1_imon=6.7524E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.99286E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61389E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10551E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72699E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-1.89712E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64077E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2179E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28969E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16226E-1	-7.98512E-1	-9.1316E0	-9.14204E0	4.91142E-3	9.34362E-2	2.74502E1	-3.26915E1	-3.2521E1	2.68154E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9926E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16107E-1	-7.98559E-1	-9.13107E0	-9.14195E0	4.88758E-3	9.34839E-2	2.72733E1	-3.26915E1	-3.25912E1	2.68082E1	1.198E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16035E-1	-7.9844E-1	-9.13105E0	-9.14209E0	4.72069E-3	9.34124E-2	2.71741E1	-3.26644E1	-3.26561E1	2.6807E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02133E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.15868E-1	-7.98535E-1	-9.13117E0	-9.14211E0	5.126E-3	9.37939E-2	2.7248E1	-3.26368E1	-3.2611E1	2.6813E1	1.20158E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.15892E-1	-7.98392E-1	-9.13124E0	-9.14209E0	5.26905E-3	9.36031E-2	2.74427E1	-3.26741E1	-3.25809E1	2.68136E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.15701E-1	-7.98464E-1	-9.13153E0	-9.14192E0	4.79221E-3	9.35078E-2	2.73098E1	-3.26826E1	-3.26502E1	2.6801E1	1.19925E-7	2.51359E-3	2.51359E-3	6.35786E-3	2.99879E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.15964E-1	-7.98512E-1	-9.13165E0	-9.14207E0	4.69685E-3	9.39131E-2	2.72582E1	-3.26524E1	-3.2638E1	2.68286E1	1.19851E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.15845E-1	-7.98607E-1	-9.13162E0	-9.14185E0	4.8399E-3	9.39131E-2	2.73916E1	-3.26464E1	-3.2611E1	2.68262E1	1.20226E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16035E-1	-7.98512E-1	-9.13129E0	-9.14195E0	4.64916E-3	9.39846E-2	2.73151E1	-3.26579E1	-3.26107E1	2.67879E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16035E-1	-7.98249E-1	-9.13112E0	-9.14202E0	4.55379E-3	9.39369E-2	2.73246E1	-3.2682E1	-3.25623E1	2.68082E1	1.19851E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.02253E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16178E-1	-7.98249E-1	-9.13115E0	-9.14204E0	4.74453E-3	9.36985E-2	2.7257E1	-3.26458E1	-3.26128E1	2.67968E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16536E-1	-7.97892E-1	-9.13146E0	-9.14171E0	4.60148E-3	9.42945E-2	2.72787E1	-3.26615E1	-3.26236E1	2.68208E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16679E-1	-7.98225E-1	-9.13122E0	-9.14156E0	4.48227E-3	9.38177E-2	2.73586E1	-3.26759E1	-3.2632E1	2.67873E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16584E-1	-7.98416E-1	-9.13146E0	-9.14199E0	4.50611E-3	9.38416E-2	2.73074E1	-3.26516E1	-3.25947E1	2.68094E1	1.19749E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.1625E-1	-7.98178E-1	-9.13136E0	-9.14195E0	4.36306E-3	9.37223E-2	2.73481E1	-3.26485E1	-3.26291E1	2.67926E1	1.1964E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.00852E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16154E-1	-7.98035E-1	-9.13148E0	-9.14171E0	4.69685E-3	9.37223E-2	2.7257E1	-3.26711E1	-3.2611E1	2.6792E1	1.19937E-7	2.51725E-3	2.51725E-3	6.33021E-3	2.9944E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16107E-1	-7.98249E-1	-9.13153E0	-9.14168E0	4.74453E-3	9.38654E-2	2.73629E1	-3.2652E1	-3.26514E1	2.68088E1	1.19809E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16083E-1	-7.98273E-1	-9.13177E0	-9.14192E0	4.93526E-3	9.377E-2	2.72552E1	-3.26711E1	-3.26146E1	2.67968E1	1.19646E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01223E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16035E-1	-7.98106E-1	-9.1315E0	-9.1418E0	5.00679E-3	9.38177E-2	2.7098E1	-3.26927E1	-3.26101E1	2.68111E1	1.20069E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09673E0	-8.16011E-1	-7.98011E-1	-9.13138E0	-9.14195E0	4.57764E-3	9.37223E-2	2.71975E1	-3.26482E1	-3.26657E1	2.684E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00453E-1