[Scan]
initial_time=2016-01-28T21:26:33
final_time=2016-01-28T21:26:53
ip_count=19
run=1026
dataset=8
scan=604
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.39143E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=2.00646E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=2.99144E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.64168E-10
mult1=-8.72898E-9
mult2=-2.79446E-9
rf_tmon=-4.97506E-3
rf_agc=3.28709E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.68762E-9
bslens_vset=-6.2E0
bslens_vmon=-6.57782E0
bslens_imon=2.22773E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=2.04255E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05453E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=3.19461E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.01779E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04802E1
cs_ea1_imon=1.09373E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44766E0
lens1_imon=3.1542E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.37131E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.03207E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.12305E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11075E1
os_restr1_imon=4.31581E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14362E1
os_ea1_imon=2.46001E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=9.65753E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=1.97215E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.08774E-8
tplens_vset=1.4E-1
tplens_vmon=1.63843E0
tplens_imon=-6.09372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.522E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.61356E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.06867E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.183E0
ionrepsh_imon=8.75269E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.20478E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45217E0
os_ea2_imon=-8.97768E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00237E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.21371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08639E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10655E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.35912E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.08495E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74956E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68009E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.71411E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.07468E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-8.57164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-4.46312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92687E3
multa_neg_imon=7.47293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50089E3
multb_neg_imon=7.02952E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.83165E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.41327E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07786E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59837E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31801E1
cs_fil1_imon=8.12791E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.79174E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61419E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.69734E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-1.80102E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56269E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.97901E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06144E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16059E-1	-7.98535E-1	-9.13126E0	-9.14152E0	4.8399E-3	9.41038E-2	2.74213E1	-3.26726E1	-3.2557E1	2.68124E1	1.19925E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99879E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.15964E-1	-7.98559E-1	-9.13119E0	-9.14154E0	4.98295E-3	9.38416E-2	2.72054E1	-3.26248E1	-3.26278E1	2.68018E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.97901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16011E-1	-7.9844E-1	-9.13134E0	-9.14154E0	5.14984E-3	9.42469E-2	2.74036E1	-3.26452E1	-3.26008E1	2.6816E1	1.19851E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.95876E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.1625E-1	-7.98488E-1	-9.13146E0	-9.14149E0	4.79221E-3	9.41038E-2	2.71963E1	-3.26675E1	-3.26326E1	2.68166E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.97963E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.1625E-1	-7.98583E-1	-9.13155E0	-9.14133E0	4.91142E-3	9.408E-2	2.74048E1	-3.265E1	-3.26038E1	2.68298E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09673E0	-8.16131E-1	-7.98512E-1	-9.13143E0	-9.14152E0	4.50611E-3	9.39131E-2	2.7334E1	-3.26649E1	-3.26048E1	2.6798E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16321E-1	-7.98845E-1	-9.13143E0	-9.14156E0	4.48227E-3	9.39369E-2	2.72715E1	-3.26464E1	-3.26164E1	2.67836E1	1.19965E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16178E-1	-7.98607E-1	-9.13129E0	-9.14147E0	4.57764E-3	9.377E-2	2.73305E1	-3.26691E1	-3.26166E1	2.68366E1	1.19933E-7	2.51918E-3	2.51918E-3	6.3074E-3	3.01284E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16107E-1	-7.9844E-1	-9.13129E0	-9.1418E0	4.673E-3	9.39131E-2	2.72012E1	-3.26458E1	-3.2632E1	2.68196E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16584E-1	-7.98368E-1	-9.13138E0	-9.14183E0	4.64916E-3	9.4223E-2	2.72937E1	-3.26458E1	-3.26224E1	2.67944E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16202E-1	-7.98392E-1	-9.13153E0	-9.14199E0	4.74453E-3	9.41992E-2	2.72543E1	-3.26536E1	-3.26125E1	2.67845E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16226E-1	-7.98368E-1	-9.13129E0	-9.14187E0	5.22137E-3	9.39131E-2	2.72261E1	-3.26667E1	-3.2613E1	2.67763E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16083E-1	-7.98368E-1	-9.13153E0	-9.1419E0	4.79221E-3	9.4223E-2	2.74349E1	-3.26693E1	-3.26101E1	2.68059E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16011E-1	-7.9844E-1	-9.13138E0	-9.14209E0	4.8399E-3	9.408E-2	2.74427E1	-3.2687E1	-3.26306E1	2.679E1	1.19782E-7	2.52093E-3	2.52093E-3	6.3074E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16345E-1	-7.98345E-1	-9.1316E0	-9.14207E0	5.00679E-3	9.39846E-2	2.71222E1	-3.26691E1	-3.26277E1	2.67825E1	1.19907E-7	2.52029E-3	2.52029E-3	6.32518E-3	3.00479E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.1625E-1	-7.98273E-1	-9.1315E0	-9.14197E0	4.55379E-3	9.4223E-2	2.73465E1	-3.26731E1	-3.26495E1	2.67932E1	1.19919E-7	2.51956E-3	2.51956E-3	6.34322E-3	3.00149E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16202E-1	-7.98345E-1	-9.13157E0	-9.14245E0	4.50611E-3	9.4223E-2	2.73014E1	-3.26627E1	-3.26064E1	2.6801E1	1.20116E-7	2.51527E-3	2.51527E-3	6.33065E-3	3.0147E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16345E-1	-7.98011E-1	-9.13124E0	-9.14216E0	4.55379E-3	9.37462E-2	2.71973E1	-3.26654E1	-3.26306E1	2.67956E1	1.19965E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00302E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16441E-1	-7.98106E-1	-9.13165E0	-9.14185E0	4.69685E-3	9.39369E-2	2.73424E1	-3.26627E1	-3.26344E1	2.67946E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16226E-1	-7.98154E-1	-9.13141E0	-9.14202E0	4.55379E-3	9.35555E-2	2.74956E1	-3.26777E1	-3.25948E1	2.68009E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.97901E-1