[Scan]
initial_time=2016-01-28T21:27:00
final_time=2016-01-28T21:27:19
ip_count=19
run=1026
dataset=8
scan=605
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0968E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.39538E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.06537E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=3.02613E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-2.56169E-10
mult1=-1.03785E-8
mult2=-2.90824E-9
rf_tmon=-4.206E-3
rf_agc=3.34237E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.73819E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.66032E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.17695E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02399E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.0739E-5
lens1_vset=-5.0E0
lens1_vmon=-5.402E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.39871E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.12287E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.31833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=2.47262E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63371E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=9.60346E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.09289E-8
tplens_vset=1.4E-1
tplens_vmon=1.67688E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26663E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27053E1
iondef2_imon=1.59193E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98602E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.993E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=8.53639E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45758E0
os_ea2_imon=-4.65174E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.31298E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74463E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.1144E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.74943E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.08581E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-8.78788E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.37164E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.86873E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.47293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56397E0
defgridb_imon=6.43471E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33209E1
os_fil1_imon=9.41495E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07858E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59899E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31804E1
cs_fil1_imon=6.83649E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.85781E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61632E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.59293E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.86902E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21768E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71305E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16417E-1	-7.98368E-1	-9.1315E0	-9.14233E0	4.74453E-3	9.37223E-2	2.74714E1	-3.26764E1	-3.26272E1	2.68001E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.1656E-1	-7.98249E-1	-9.13155E0	-9.14233E0	4.86374E-3	9.35793E-2	2.72153E1	-3.26659E1	-3.26304E1	2.67945E1	1.19841E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16441E-1	-7.98345E-1	-9.13155E0	-9.14207E0	4.81606E-3	9.41038E-2	2.71319E1	-3.26446E1	-3.26231E1	2.68043E1	1.20084E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00144E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16202E-1	-7.98321E-1	-9.13129E0	-9.14192E0	4.98295E-3	9.377E-2	2.73856E1	-3.26693E1	-3.26362E1	2.6807E1	1.19991E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16226E-1	-7.98416E-1	-9.13146E0	-9.14202E0	4.52995E-3	9.37223E-2	2.72396E1	-3.26496E1	-3.26148E1	2.67992E1	1.19913E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16441E-1	-7.98297E-1	-9.13143E0	-9.14195E0	4.76837E-3	9.37939E-2	2.72949E1	-3.26362E1	-3.26068E1	2.67944E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00563E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16393E-1	-7.98249E-1	-9.13174E0	-9.14211E0	4.64916E-3	9.39846E-2	2.74897E1	-3.26313E1	-3.26325E1	2.68166E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16274E-1	-7.98583E-1	-9.13141E0	-9.14218E0	4.88758E-3	9.41515E-2	2.74433E1	-3.26783E1	-3.26176E1	2.68016E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16035E-1	-7.98202E-1	-9.13148E0	-9.14187E0	4.74453E-3	9.39369E-2	2.72231E1	-3.26733E1	-3.26195E1	2.68105E1	1.19809E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15964E-1	-7.98011E-1	-9.13131E0	-9.14214E0	5.05447E-3	9.39369E-2	2.7388E1	-3.2629E1	-3.26561E1	2.68256E1	1.20121E-7	2.52006E-3	2.52006E-3	6.324E-3	3.00535E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16107E-1	-7.98726E-1	-9.13117E0	-9.14197E0	4.95911E-3	9.37462E-2	2.72048E1	-3.26687E1	-3.25978E1	2.68163E1					
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16274E-1	-7.98583E-1	-9.13131E0	-9.14216E0	4.93526E-3	9.36508E-2	2.7391E1	-3.26573E1	-3.26524E1	2.6789E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16369E-1	-7.98631E-1	-9.13143E0	-9.14218E0	4.88758E-3	9.38416E-2	2.71982E1	-3.26567E1	-3.262E1	2.67955E1	1.20457E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.99613E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16512E-1	-7.98392E-1	-9.13124E0	-9.14209E0	4.79221E-3	9.38416E-2	2.72113E1	-3.26638E1	-3.26472E1	2.67938E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0148E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16059E-1	-7.98273E-1	-9.13117E0	-9.1419E0	4.673E-3	9.39846E-2	2.72979E1	-3.26164E1	-3.2635E1	2.67824E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16035E-1	-7.98154E-1	-9.13136E0	-9.1419E0	4.8399E-3	9.37223E-2	2.7358E1	-3.2653E1	-3.26554E1	2.68136E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16059E-1	-7.98345E-1	-9.13146E0	-9.14199E0	4.57764E-3	9.37939E-2	2.73213E1	-3.26591E1	-3.26428E1	2.6783E1	1.19965E-7	2.51826E-3	2.51826E-3	6.31837E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16226E-1	-7.98678E-1	-9.13115E0	-9.14178E0	4.64916E-3	9.38416E-2	2.71429E1	-3.2675E1	-3.26266E1	2.67793E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.16488E-1	-7.9875E-1	-9.13134E0	-9.14214E0	4.76837E-3	9.38416E-2	2.72402E1	-3.2666E1	-3.25982E1	2.67858E1	1.20192E-7	2.52236E-3	2.52236E-3	6.34982E-3	3.02368E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0968E0	-8.16393E-1	-7.98249E-1	-9.13136E0	-9.14192E0	4.64916E-3	9.39369E-2	2.74463E1	-3.27053E1	-3.26663E1	2.6789E1	1.198E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.9943E-1