[Scan]
initial_time=2016-01-28T21:27:26
final_time=2016-01-28T21:27:46
ip_count=19
run=1026
dataset=8
scan=606
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=1.39403E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.95866E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.06761E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.59948E-10
mult1=-9.57029E-9
mult2=-2.88592E-9
rf_tmon=-3.51254E-3
rf_agc=3.42058E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.74142E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=2.00578E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=3.17119E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04569E2
lens23_imon=1.01905E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=1.09409E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42844E0
lens1_imon=2.83336E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64837E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04057E1
cs_ea2_imon=1.38609E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84022E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.12771E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.33311E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14897E1
os_ea1_imon=2.47587E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=9.69358E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0223E1
cs_anode1_imon=1.95413E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.09545E-8
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26708E1
iondef2_imon=1.5977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98191E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=3.95625E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23227E0
ionrepsh_imon=8.72746E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34421E1
lens5b_imon=2.19685E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44496E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.2011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.35859E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.34651E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.11487E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72384E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67999E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.7489E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.83143E-1
olens1_imon=7.09197E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16798E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56603E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.38366E-1
window_imon=-7.31025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-4.78747E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.83703E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.72671E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33205E1
os_fil1_imon=9.41195E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08218E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59945E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=8.51834E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01101E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61667E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10551E-2
os_fil2_imon=-2.21547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68058E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27321E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01939E-1
res40_imon=-2.17982E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16274E-1	-7.98154E-1	-9.13119E0	-9.14199E0	4.86374E-3	9.39846E-2	2.74172E1	-3.26372E1	-3.26178E1	2.67949E1	1.19913E-7	2.51007E-3	2.51007E-3	6.32936E-3	2.9926E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16083E-1	-7.98726E-1	-9.13131E0	-9.14209E0	4.98295E-3	9.37939E-2	2.74006E1	-3.2648E1	-3.26266E1	2.68124E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16059E-1	-7.98321E-1	-9.13136E0	-9.14214E0	5.05447E-3	9.38416E-2	2.72848E1	-3.26671E1	-3.26202E1	2.67968E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16274E-1	-7.98512E-1	-9.1311E0	-9.14223E0	4.93526E-3	9.41038E-2	2.71561E1	-3.26543E1	-3.26086E1	2.68034E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.16154E-1	-7.98488E-1	-9.13124E0	-9.14226E0	4.62532E-3	9.36747E-2	2.74535E1	-3.26843E1	-3.2626E1	2.68094E1	1.19913E-7	2.51552E-3	2.51552E-3	6.28552E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.16321E-1	-7.98655E-1	-9.13124E0	-9.14228E0	4.86374E-3	9.38654E-2	2.73576E1	-3.2652E1	-3.25918E1	2.68024E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09657E0	-8.16059E-1	-7.98368E-1	-9.13131E0	-9.14209E0	4.76837E-3	9.36508E-2	2.71705E1	-3.26651E1	-3.26561E1	2.68034E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.1594E-1	-7.98416E-1	-9.13124E0	-9.14202E0	4.86374E-3	9.38654E-2	2.73151E1	-3.26762E1	-3.26189E1	2.68142E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.15821E-1	-7.9813E-1	-9.13143E0	-9.14204E0	4.98295E-3	9.36508E-2	2.72784E1	-3.2648E1	-3.26822E1	2.67943E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16011E-1	-7.97939E-1	-9.13174E0	-9.14211E0	5.22137E-3	9.37462E-2	2.7229E1	-3.26385E1	-3.27059E1	2.67889E1	1.1969E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.99594E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.15892E-1	-7.9782E-1	-9.13172E0	-9.14183E0	4.79221E-3	9.37223E-2	2.73147E1	-3.26603E1	-3.26332E1	2.68184E1	1.19667E-7	2.52066E-3	2.52066E-3	6.34164E-3	2.9917E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.15797E-1	-7.98059E-1	-9.13146E0	-9.14185E0	4.62532E-3	9.38416E-2	2.73106E1	-3.27079E1	-3.26031E1	2.68048E1	1.19926E-7	2.51659E-3	2.51659E-3	6.32982E-3	2.99535E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16107E-1	-7.98655E-1	-9.13141E0	-9.14207E0	4.88758E-3	9.34362E-2	2.72093E1	-3.26245E1	-3.26336E1	2.67958E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.15988E-1	-7.98607E-1	-9.13172E0	-9.14209E0	4.62532E-3	9.33647E-2	2.73736E1	-3.26326E1	-3.2602E1	2.6813E1	1.19877E-7	2.52494E-3	2.52494E-3	6.32808E-3	2.99804E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.15916E-1	-7.98583E-1	-9.13153E0	-9.14214E0	4.45843E-3	9.36747E-2	2.72861E1	-3.26585E1	-3.26297E1	2.68244E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16035E-1	-7.98845E-1	-9.1316E0	-9.1418E0	4.31538E-3	9.36747E-2	2.72644E1	-3.26579E1	-3.26402E1	2.681E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.99E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16274E-1	-7.98607E-1	-9.13193E0	-9.1418E0	4.52995E-3	9.34124E-2	2.73496E1	-3.26585E1	-3.26416E1	2.67878E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16202E-1	-7.9813E-1	-9.13191E0	-9.14195E0	4.48227E-3	9.37223E-2	2.7229E1	-3.26537E1	-3.26248E1	2.68389E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16321E-1	-7.98297E-1	-9.1316E0	-9.14197E0	4.79221E-3	9.408E-2	2.74832E1	-3.26413E1	-3.26596E1	2.68283E1	1.20142E-7	2.51498E-3	2.51498E-3	6.33919E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16178E-1	-7.98464E-1	-9.1316E0	-9.14204E0	4.91142E-3	9.36508E-2	2.72384E1	-3.26708E1	-3.26236E1	2.67999E1	1.20106E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00197E-1