[Scan]
initial_time=2016-01-28T21:27:53
final_time=2016-01-28T21:28:12
ip_count=19
run=1026
dataset=8
scan=607
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.40264E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.02227E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.34013E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-2.98715E-10
mult1=-9.87765E-9
mult2=-2.87416E-9
rf_tmon=-4.59206E-3
rf_agc=3.34743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.68096E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61125E0
bslens_imon=2.52771E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=2.00026E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05267E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.19039E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0473E2
lens23_imon=1.02264E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04901E1
cs_ea1_imon=1.08463E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41891E0
lens1_imon=2.76062E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64804E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.39992E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84523E1
cs_ef1a_imon=3.03772E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.12736E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11263E1
os_restr1_imon=4.30741E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15178E1
os_ea1_imon=2.45912E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6373E1
os_ef1bup_imon=3.08872E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19474E0
cs_ionrep_imon=9.54964E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93444E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01519E1
cs_anode1_imon=1.96868E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.09133E-8
tplens_vset=1.4E-1
tplens_vmon=1.62637E0
tplens_imon=-4.5835E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26402E1
iondef3_imon=1.50281E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26467E1
iondef2_imon=1.57303E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98481E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.96855E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24283E0
ionrepsh_imon=8.59369E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33547E1
lens5b_imon=2.19354E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74468E1
cs_ef2b_imon=3.13737E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46067E0
os_ea2_imon=-7.3297E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.00512E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71129E1
cs_ef2a_imon=3.19844E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07972E0
os_ef2alow_imon=-2.50927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0488E-1
os_ef2bup_imon=-5.25065E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10698E1
os_restr2_imon=3.3642E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23014E2
cs_ionfoca_imon=6.31666E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01686E1
cs_anode2_imon=2.08444E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72585E1
iondef1_imon=1.09957E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.09191E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.70985E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.07483E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1005E0
cs_ionaccel_imon=-8.68473E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56092E1
einzel_imon=7.6912E-6
window_vset=0.0E0
window_vmon=2.28072E-1
window_imon=-9.75846E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39342E-4
mask2_vset=0.0E0
mask2_vmon=-1.8692E1
mask2_imon=-5.36287E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=8.1974E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.61225E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.36311E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59501E0
defgridb_imon=6.13253E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3321E1
os_fil1_imon=9.40614E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07536E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59955E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31825E1
cs_fil1_imon=7.76876E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.3514E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61752E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.97884E-2
os_fil2_imon=-2.38697E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22673E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.63957E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29893E-1
cs_fil2_imon=-2.40934E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32076E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51007E-3
foreline_cvt_pmon=2.51007E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13372E-1
res40_imon=-2.53947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16393E-1	-7.98249E-1	-9.13165E0	-9.14204E0	5.05447E-3	9.38654E-2	2.72874E1	-3.26266E1	-3.26207E1	2.67842E1	1.1979E-7	2.51498E-3	2.51498E-3	6.33388E-3	3.01609E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16107E-1	-7.98416E-1	-9.13172E0	-9.14211E0	5.05447E-3	9.40561E-2	2.73438E1	-3.26441E1	-3.26235E1	2.67926E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16011E-1	-7.98512E-1	-9.13148E0	-9.14209E0	4.88758E-3	9.42469E-2	2.72485E1	-3.26614E1	-3.26372E1	2.67873E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.98554E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.1625E-1	-7.98893E-1	-9.13143E0	-9.14209E0	4.52995E-3	9.41038E-2	2.74166E1	-3.2675E1	-3.2636E1	2.68154E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.96887E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0968E0	-8.16298E-1	-7.98655E-1	-9.13143E0	-9.14173E0	4.64916E-3	9.36747E-2	2.72372E1	-3.265E1	-3.26122E1	2.68064E1	1.20383E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.96929E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.16059E-1	-7.98249E-1	-9.13169E0	-9.14168E0	4.52995E-3	9.377E-2	2.73131E1	-3.26376E1	-3.26174E1	2.67806E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09704E0	-8.16417E-1	-7.98154E-1	-9.13122E0	-9.14152E0	4.76837E-3	9.37939E-2	2.73128E1	-3.2662E1	-3.26195E1	2.67842E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.02396E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.16393E-1	-7.98345E-1	-9.13124E0	-9.14147E0	4.57764E-3	9.39608E-2	2.72841E1	-3.26615E1	-3.26356E1	2.6795E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16536E-1	-7.98345E-1	-9.13098E0	-9.14207E0	4.74453E-3	9.377E-2	2.73225E1	-3.26482E1	-3.2617E1	2.6801E1	1.19861E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09696E0	-8.16202E-1	-7.98345E-1	-9.13126E0	-9.14168E0	4.60148E-3	9.377E-2	2.71494E1	-3.26585E1	-3.26278E1	2.67848E1	1.19985E-7	2.52026E-3	2.52026E-3	6.33188E-3	2.98317E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09742E0	-8.16274E-1	-7.98392E-1	-9.13134E0	-9.14207E0	4.673E-3	9.37223E-2	2.73363E1	-3.26609E1	-3.262E1	2.6783E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09719E0	-8.16393E-1	-7.98416E-1	-9.13136E0	-9.1418E0	4.41074E-3	9.37223E-2	2.72054E1	-3.26717E1	-3.26242E1	2.68058E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16202E-1	-7.98464E-1	-9.13098E0	-9.14199E0	4.673E-3	9.38654E-2	2.73641E1	-3.26502E1	-3.26343E1	2.68273E1	1.20226E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09665E0	-8.16679E-1	-7.98464E-1	-9.13136E0	-9.14187E0	4.8399E-3	9.40084E-2	2.72084E1	-3.26783E1	-3.2632E1	2.68364E1	1.19697E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.02253E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16417E-1	-7.98225E-1	-9.13134E0	-9.1419E0	4.57764E-3	9.38892E-2	2.74217E1	-3.2653E1	-3.26158E1	2.68172E1	1.19851E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.02253E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.16226E-1	-7.98178E-1	-9.13162E0	-9.14199E0	4.45843E-3	9.38416E-2	2.72102E1	-3.26711E1	-3.26206E1	2.68256E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.03449E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.15988E-1	-7.98106E-1	-9.13138E0	-9.14168E0	4.3869E-3	9.38654E-2	2.73877E1	-3.2662E1	-3.26225E1	2.67962E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.16226E-1	-7.98655E-1	-9.13126E0	-9.14171E0	4.88758E-3	9.40084E-2	2.73405E1	-3.26602E1	-3.26154E1	2.68227E1	1.19953E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-8.16131E-1	-7.98249E-1	-9.13131E0	-9.14154E0	4.3869E-3	9.41038E-2	2.72594E1	-3.26573E1	-3.26242E1	2.68064E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.16274E-1	-7.98464E-1	-9.13134E0	-9.14171E0	4.57764E-3	9.39131E-2	2.72585E1	-3.26467E1	-3.26402E1	2.67944E1	1.19861E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.03185E-1