[Scan]
initial_time=2016-01-28T21:28:46
final_time=2016-01-28T21:29:06
ip_count=19
run=1026
dataset=8
scan=609
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.38839E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.03211E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.59559E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=-2.52187E-10
mult1=-9.42379E-9
mult2=-2.76487E-9
rf_tmon=-4.34384E-3
rf_agc=3.31519E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.75219E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68367E0
bslens_imon=2.74323E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19782E1
lens5a_imon=1.95542E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1241E2
lens4a_imon=2.05156E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53557E1
cs_ef1b_imon=3.16775E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=1.08185E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39052E0
lens1_imon=2.60419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.97661E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03632E1
cs_ea2_imon=1.40687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=3.04542E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.12426E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11367E1
os_restr1_imon=4.30277E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15178E1
os_ea1_imon=2.46816E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6349E1
os_ef1bup_imon=3.10068E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22487E0
cs_ionrep_imon=9.30283E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.93458E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.96844E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.08529E-8
tplens_vset=1.4E-1
tplens_vmon=1.67504E0
tplens_imon=-6.5539E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2619E1
iondef3_imon=1.48022E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.58451E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98617E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.97493E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24978E0
ionrepsh_imon=8.45116E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.19666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74206E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.474E0
os_ea2_imon=-6.77351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00727E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71078E1
cs_ef2a_imon=3.1886E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07773E0
os_ef2alow_imon=-2.45642E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0534E-1
os_ef2bup_imon=-5.20187E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.35785E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.29024E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01792E1
cs_anode2_imon=2.09112E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72332E1
iondef1_imon=1.12738E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68113E1
iondef4_imon=1.10449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.77875E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.08258E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10987E0
cs_ionaccel_imon=-8.47382E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.81642E-6
window_vset=0.0E0
window_vmon=1.71349E-1
window_imon=-1.01419E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39251E-4
mask2_vset=0.0E0
mask2_vmon=-1.8712E1
mask2_imon=-5.03332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92703E3
multa_neg_imon=8.05835E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.37239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.56126E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40651E0
defgridb_imon=6.35849E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3317E1
os_fil1_imon=9.40729E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07764E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59959E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31772E1
cs_fil1_imon=6.70241E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.639E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6147E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14051E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5625E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-1.58027E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.71543E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21651E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.323E-3
inlet_lpb_pmon=3.00741E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51058E-3
foreline_cvt_pmon=2.51058E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.88746E-1
res40_imon=-2.25138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16107E-1	-7.98559E-1	-9.1311E0	-9.14187E0	4.64916E-3	9.42469E-2	2.71909E1	-3.27119E1	-3.2617E1	2.67938E1	1.20293E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99845E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16107E-1	-7.98535E-1	-9.13129E0	-9.14171E0	4.81606E-3	9.41277E-2	2.74036E1	-3.26579E1	-3.26538E1	2.68545E1	1.19913E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16321E-1	-7.98464E-1	-9.13148E0	-9.1419E0	4.64916E-3	9.38177E-2	2.7198E1	-3.26793E1	-3.26291E1	2.68138E1	1.19782E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.00247E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.15964E-1	-7.98392E-1	-9.13141E0	-9.14199E0	4.86374E-3	9.41038E-2	2.72443E1	-3.26413E1	-3.26366E1	2.67787E1	1.20154E-7	2.51498E-3	2.51498E-3	6.3131E-3	3.00522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16107E-1	-7.98726E-1	-9.13131E0	-9.14211E0	4.81606E-3	9.38416E-2	2.74067E1	-3.26291E1	-3.26358E1	2.68076E1	1.2026E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.1594E-1	-7.98678E-1	-9.13131E0	-9.14226E0	4.64916E-3	9.39846E-2	2.72443E1	-3.26408E1	-3.26413E1	2.68082E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	1.0E0	1.163E3	7.54E2	-2.09565E0	-8.15892E-1	-7.98583E-1	-9.13172E0	-9.14166E0	4.48227E-3	9.38892E-2	2.73559E1	-3.2645E1	-3.26364E1	2.68028E1	1.20174E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.1594E-1	-7.98655E-1	-9.13174E0	-9.1419E0	4.91142E-3	9.36985E-2	2.72603E1	-3.26437E1	-3.2613E1	2.67938E1	1.20174E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.15892E-1	-7.98464E-1	-9.13148E0	-9.14202E0	5.03063E-3	9.38416E-2	2.73309E1	-3.26771E1	-3.26056E1	2.6795E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03449E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.16369E-1	-7.98416E-1	-9.13148E0	-9.14202E0	4.81606E-3	9.37462E-2	2.72997E1	-3.26723E1	-3.26482E1	2.67788E1	1.198E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00966E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16393E-1	-7.98512E-1	-9.13155E0	-9.14211E0	4.74453E-3	9.38892E-2	2.72845E1	-3.26809E1	-3.2626E1	2.68208E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16202E-1	-7.98702E-1	-9.13177E0	-9.14185E0	5.05447E-3	9.38416E-2	2.73859E1	-3.26667E1	-3.26419E1	2.68146E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.1625E-1	-7.98535E-1	-9.13136E0	-9.14185E0	4.76837E-3	9.39846E-2	2.71404E1	-3.26768E1	-3.26156E1	2.68028E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16083E-1	-7.98535E-1	-9.1316E0	-9.14197E0	4.55379E-3	9.37223E-2	2.73263E1	-3.26667E1	-3.26089E1	2.68034E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.15797E-1	-7.98512E-1	-9.13122E0	-9.14197E0	4.673E-3	9.41038E-2	2.72138E1	-3.26536E1	-3.26272E1	2.67613E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01995E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16083E-1	-7.98392E-1	-9.1311E0	-9.14223E0	4.93526E-3	9.39608E-2	2.73728E1	-3.26664E1	-3.26095E1	2.68163E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.15964E-1	-7.98297E-1	-9.13124E0	-9.14199E0	4.74453E-3	9.38177E-2	2.73175E1	-3.26493E1	-3.26676E1	2.68019E1	1.20042E-7	2.52131E-3	2.52131E-3	6.32858E-3	3.00097E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16178E-1	-7.98297E-1	-9.13124E0	-9.14192E0	4.36306E-3	9.38892E-2	2.7299E1	-3.26652E1	-3.26145E1	2.67764E1	1.20442E-7	2.52442E-3	2.52442E-3	6.31711E-3	3.00798E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16035E-1	-7.98392E-1	-9.13131E0	-9.14173E0	4.3869E-3	9.39369E-2	2.72721E1	-3.26636E1	-3.26476E1	2.68163E1	1.19933E-7	2.52113E-3	2.52113E-3	6.3074E-3	3.00432E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16154E-1	-7.98297E-1	-9.13124E0	-9.14209E0	4.62532E-3	9.39131E-2	2.72332E1	-3.26801E1	-3.2619E1	2.68113E1	1.20226E-7	2.51058E-3	2.51058E-3	6.323E-3	3.00741E-1