[Scan]
initial_time=2016-01-28T21:29:40
final_time=2016-01-28T21:29:59
ip_count=19
run=1026
dataset=8
scan=611
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.15868E-1
ql1_imon=1.39291E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.04836E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=2.96736E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.82586E-10
mult1=-9.33101E-9
mult2=-2.84037E-9
rf_tmon=-5.16132E-3
rf_agc=3.26667E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.69969E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60726E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53611E1
cs_ef1b_imon=3.17713E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04536E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=1.07102E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42002E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.96119E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84332E1
cs_ef1a_imon=3.03866E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.12411E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1118E1
os_restr1_imon=4.31338E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14885E1
os_ea1_imon=2.44703E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63666E1
os_ef1bup_imon=3.09817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=9.68277E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91918E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02027E1
cs_anode1_imon=1.9593E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.08076E-8
tplens_vset=1.4E-1
tplens_vmon=1.6156E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.51226E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02886E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.06693E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=8.65536E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74788E1
cs_ef2b_imon=3.13185E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42934E0
os_ea2_imon=-7.78805E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7122E1
cs_ef2a_imon=3.19697E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08512E0
os_ef2alow_imon=-2.64168E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84533E-1
os_ef2bup_imon=-5.24277E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10936E1
os_restr2_imon=3.37287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23007E2
cs_ionfoca_imon=6.3119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01865E1
cs_anode2_imon=2.08542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73399E1
iondef1_imon=1.12365E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.09027E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.785E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.07313E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12765E0
cs_ionaccel_imon=-8.34015E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.74772E-6
window_vset=0.0E0
window_vmon=2.27577E-1
window_imon=-9.98689E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39342E-4
mask2_vset=0.0E0
mask2_vmon=-1.8688E1
mask2_imon=-5.15896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.71447E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.97185E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54292E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33154E1
os_fil1_imon=9.4252E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08003E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59905E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31719E1
cs_fil1_imon=7.14929E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.94999E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61366E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.48161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.27147E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57875E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28307E-1
cs_fil2_imon=-2.06993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48552E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21538E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.3486E-1
res40_imon=-2.39093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16059E-1	-7.98512E-1	-9.13119E0	-9.14173E0	4.76837E-3	9.39369E-2	2.72744E1	-3.26461E1	-3.26325E1	2.67902E1	1.19809E-7	2.52209E-3	2.52209E-3	6.34037E-3	2.9926E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.15964E-1	-7.98416E-1	-9.13117E0	-9.14173E0	4.69685E-3	9.3627E-2	2.71612E1	-3.26554E1	-3.25979E1	2.68176E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16083E-1	-7.98774E-1	-9.13148E0	-9.14183E0	4.69685E-3	9.36747E-2	2.72508E1	-3.26644E1	-3.26478E1	2.68047E1	1.20069E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00302E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16035E-1	-7.98512E-1	-9.1316E0	-9.14187E0	4.673E-3	9.38177E-2	2.74441E1	-3.26428E1	-3.26625E1	2.67972E1	1.2026E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16011E-1	-7.98178E-1	-9.13143E0	-9.14176E0	4.79221E-3	9.36508E-2	2.73039E1	-3.26542E1	-3.2574E1	2.67995E1	1.20092E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.01862E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16035E-1	-7.9813E-1	-9.13157E0	-9.14209E0	4.8399E-3	9.377E-2	2.71291E1	-3.26482E1	-3.26176E1	2.68041E1	1.20191E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16345E-1	-7.98345E-1	-9.13117E0	-9.14187E0	4.8399E-3	9.39131E-2	2.71477E1	-3.26494E1	-3.25954E1	2.68064E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16107E-1	-7.98154E-1	-9.13117E0	-9.14192E0	4.86374E-3	9.38177E-2	2.72952E1	-3.26735E1	-3.26046E1	2.68166E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.1625E-1	-7.9813E-1	-9.13165E0	-9.1419E0	5.03063E-3	9.39369E-2	2.74355E1	-3.26338E1	-3.26338E1	2.68112E1	1.1979E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.99845E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16369E-1	-7.98297E-1	-9.13167E0	-9.14233E0	4.69685E-3	9.41277E-2	2.72252E1	-3.265E1	-3.26224E1	2.6818E1	1.20191E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.00144E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16178E-1	-7.98178E-1	-9.13148E0	-9.14197E0	4.91142E-3	9.37462E-2	2.72025E1	-3.26832E1	-3.26183E1	2.67944E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16059E-1	-7.98035E-1	-9.13126E0	-9.14195E0	4.55379E-3	9.37223E-2	2.73689E1	-3.26606E1	-3.26462E1	2.67958E1	1.20106E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.03027E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16369E-1	-7.98321E-1	-9.13124E0	-9.14202E0	4.76837E-3	9.37223E-2	2.74277E1	-3.26561E1	-3.2635E1	2.68004E1	1.19991E-7	2.51596E-3	2.51596E-3	6.3074E-3	3.00432E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.15964E-1	-7.98202E-1	-9.13155E0	-9.14199E0	4.88758E-3	9.3627E-2	2.74872E1	-3.26869E1	-3.25731E1	2.68183E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.15916E-1	-7.98559E-1	-9.13134E0	-9.14221E0	4.72069E-3	9.33647E-2	2.7508E1	-3.26763E1	-3.26057E1	2.68101E1	1.19822E-7	2.52058E-3	2.52058E-3	6.29211E-3	2.98454E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16107E-1	-7.98416E-1	-9.13129E0	-9.14176E0	4.98295E-3	9.3627E-2	2.73594E1	-3.26596E1	-3.26602E1	2.67958E1	1.20337E-7	2.51296E-3	2.51296E-3	6.31902E-3	2.9926E-1
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16202E-1	-7.98416E-1	-9.13131E0	-9.14204E0	5.10216E-3	9.33886E-2	2.72378E1	-3.26687E1	-3.2617E1	2.67914E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16321E-1	-7.98154E-1	-9.13105E0	-9.14218E0	4.95911E-3	9.35793E-2	2.72952E1	-3.26272E1	-3.2644E1	2.67995E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.1625E-1	-7.98583E-1	-9.13119E0	-9.14199E0	5.03063E-3	9.36508E-2	2.73517E1	-3.26596E1	-3.26673E1	2.6795E1	1.1979E-7	2.51919E-3	2.51919E-3	6.30212E-3	3.01862E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.15868E-1	-7.98512E-1	-9.1315E0	-9.14202E0	4.95911E-3	9.37939E-2	2.73399E1	-3.26771E1	-3.26152E1	2.68082E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1