[Scan]
initial_time=2016-01-28T21:30:33
final_time=2016-01-28T21:30:53
ip_count=19
run=1026
dataset=8
scan=613
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.39665E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.00567E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.34704E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-2.82693E-10
mult1=-9.54774E-9
mult2=-2.69466E-9
rf_tmon=-6.03251E-3
rf_agc=3.24263E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.70891E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.57157E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.17479E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=1.07051E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41739E0
lens1_imon=2.61759E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.41844E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.0519E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.12398E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.31473E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=2.45301E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63857E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=9.48404E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.09074E-8
tplens_vset=1.4E-1
tplens_vmon=1.6668E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.5947E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.9864E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.98693E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=8.59565E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.19782E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74886E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44323E0
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70891E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0966E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.3658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74956E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.76059E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.07991E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-8.96807E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86909E1
mask2_imon=-4.71539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.6577E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.21362E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.48073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.40475E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33175E1
os_fil1_imon=9.42012E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08146E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5999E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31797E1
cs_fil1_imon=6.49411E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.13702E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61446E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55783E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.04128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21659E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55688E-1
res40_imon=-2.32758E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.1625E-1	-7.98559E-1	-9.13126E0	-9.14221E0	4.74453E-3	9.35793E-2	2.7266E1	-3.26536E1	-3.26344E1	2.68118E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.15916E-1	-7.98392E-1	-9.13131E0	-9.14187E0	4.88758E-3	9.39369E-2	2.7355E1	-3.26494E1	-3.26026E1	2.6786E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16178E-1	-7.98321E-1	-9.13129E0	-9.1419E0	4.57764E-3	9.35316E-2	2.7262E1	-3.26724E1	-3.26098E1	2.68149E1	1.20174E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16059E-1	-7.97939E-1	-9.13117E0	-9.14197E0	4.88758E-3	9.38177E-2	2.74043E1	-3.26814E1	-3.26095E1	2.67932E1	1.20307E-7	2.51752E-3	2.51752E-3	6.32784E-3	3.00149E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16083E-1	-7.98345E-1	-9.1315E0	-9.14202E0	4.86374E-3	9.32693E-2	2.71884E1	-3.26567E1	-3.26219E1	2.68051E1	1.20005E-7	2.52338E-3	2.52338E-3	6.33065E-3	3.01193E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16011E-1	-7.98273E-1	-9.13165E0	-9.14183E0	4.8399E-3	9.34601E-2	2.74298E1	-3.26599E1	-3.26311E1	2.67905E1	1.20366E-7	2.51655E-3	2.51655E-3	6.32316E-3	3.02061E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16202E-1	-7.98345E-1	-9.13165E0	-9.14199E0	4.60148E-3	9.35555E-2	2.72402E1	-3.26544E1	-3.2624E1	2.68173E1	1.20289E-7	2.51596E-3	2.51596E-3	6.30083E-3	2.99884E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16059E-1	-7.98416E-1	-9.13143E0	-9.14202E0	4.55379E-3	9.35793E-2	2.73767E1	-3.26217E1	-3.2637E1	2.68376E1	1.19728E-7	2.50945E-3	2.50945E-3	6.33521E-3	2.99845E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16202E-1	-7.98178E-1	-9.13179E0	-9.14216E0	4.76837E-3	9.36747E-2	2.71695E1	-3.26683E1	-3.26011E1	2.68267E1	1.20191E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16369E-1	-7.98106E-1	-9.13169E0	-9.14214E0	4.60148E-3	9.34124E-2	2.73983E1	-3.26531E1	-3.2616E1	2.6813E1	1.19891E-7	2.51603E-3	2.51603E-3	6.33919E-3	2.99093E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.1656E-1	-7.9813E-1	-9.13177E0	-9.14216E0	4.55379E-3	9.35793E-2	2.72598E1	-3.26891E1	-3.2637E1	2.6819E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.15988E-1	-7.97939E-1	-9.13172E0	-9.14204E0	4.60148E-3	9.38892E-2	2.73865E1	-3.26726E1	-3.26113E1	2.68226E1	1.20031E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.00144E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.15988E-1	-7.98178E-1	-9.1315E0	-9.14214E0	4.62532E-3	9.36508E-2	2.7215E1	-3.26374E1	-3.265E1	2.68153E1	1.20311E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.1594E-1	-7.9813E-1	-9.13155E0	-9.14199E0	4.72069E-3	9.38416E-2	2.73556E1	-3.26771E1	-3.26332E1	2.67817E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.1594E-1	-7.98154E-1	-9.13169E0	-9.14209E0	4.79221E-3	9.38177E-2	2.7352E1	-3.26554E1	-3.26056E1	2.68094E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09711E0	-8.15988E-1	-7.98512E-1	-9.13146E0	-9.1419E0	4.88758E-3	9.39846E-2	2.7485E1	-3.26408E1	-3.26585E1	2.67872E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.16107E-1	-7.98321E-1	-9.13153E0	-9.14202E0	4.8399E-3	9.377E-2	2.7221E1	-3.26524E1	-3.2608E1	2.67956E1	1.198E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16059E-1	-7.98178E-1	-9.13157E0	-9.14202E0	4.91142E-3	9.35555E-2	2.73069E1	-3.26278E1	-3.26166E1	2.6807E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.16154E-1	-7.98082E-1	-9.13148E0	-9.14178E0	4.55379E-3	9.36747E-2	2.72968E1	-3.26773E1	-3.26225E1	2.67891E1	1.2026E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16107E-1	-7.98249E-1	-9.13131E0	-9.14176E0	5.00679E-3	9.36747E-2	2.74956E1	-3.26663E1	-3.26386E1	2.6798E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1