[Scan]
initial_time=2016-01-28T21:31:26
final_time=2016-01-28T21:31:46
ip_count=19
run=1026
dataset=8
scan=615
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=1.39332E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.08145E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.45314E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-2.81894E-10
mult1=-9.12632E-9
mult2=-2.79047E-9
rf_tmon=-4.60856E-3
rf_agc=3.24564E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.64077E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19754E1
lens5a_imon=1.97448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.538E1
cs_ef1b_imon=3.19069E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04552E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05088E1
cs_ea1_imon=1.0921E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41798E0
lens1_imon=2.49017E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64493E1
os_ef1alow_imon=2.9853E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.42339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84371E1
cs_ef1a_imon=3.03882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.12612E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10973E1
os_restr1_imon=4.31458E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15654E1
os_ea1_imon=2.48911E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.09616E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23971E0
cs_ionrep_imon=9.33538E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.95246E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.08543E-8
tplens_vset=1.4E-1
tplens_vmon=1.7075E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.6039E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.98011E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20845E0
ionrepsh_imon=8.71953E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.746E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42671E0
os_ea2_imon=-7.66089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.0075E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.20389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0812E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96652E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=3.35785E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.28548E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.0873E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72324E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.08468E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.76423E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.07455E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1284E0
cs_ionaccel_imon=-8.9256E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.32166E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39317E-4
mask2_vset=0.0E0
mask2_vmon=-1.86749E1
mask2_imon=-6.70144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.59399E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.24902E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.32854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.40474E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07723E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59816E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31753E1
cs_fil1_imon=7.91296E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01487E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61587E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.45488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16142E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.67172E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-2.22899E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32156E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21732E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.98842E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.76003E-1
res40_imon=-2.33131E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.15868E-1	-7.98631E-1	-9.13138E0	-9.14223E0	4.8399E-3	9.34362E-2	2.71789E1	-3.26484E1	-3.26095E1	2.68028E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.15892E-1	-7.98321E-1	-9.1315E0	-9.14211E0	4.95911E-3	9.36747E-2	2.73488E1	-3.26541E1	-3.26422E1	2.67851E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.15797E-1	-7.98655E-1	-9.13155E0	-9.14176E0	4.8399E-3	9.36985E-2	2.74911E1	-3.26608E1	-3.26295E1	2.68314E1	1.20045E-7	2.51725E-3	2.51725E-3	6.3074E-3	2.9944E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.15868E-1	-7.98392E-1	-9.13181E0	-9.14173E0	4.74453E-3	9.39131E-2	2.74235E1	-3.26837E1	-3.26422E1	2.67872E1	1.1988E-7	2.51369E-3	2.51369E-3	6.3074E-3	2.98031E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.15821E-1	-7.98154E-1	-9.13146E0	-9.14183E0	5.05447E-3	9.37462E-2	2.71812E1	-3.26502E1	-3.26242E1	2.68106E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99613E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16059E-1	-7.98368E-1	-9.13119E0	-9.14195E0	4.8399E-3	9.38892E-2	2.71364E1	-3.26602E1	-3.26231E1	2.68117E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00966E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16059E-1	-7.9813E-1	-9.13117E0	-9.14204E0	5.14984E-3	9.40561E-2	2.71092E1	-3.26771E1	-3.26188E1	2.67866E1	1.20055E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.03027E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.15868E-1	-7.98225E-1	-9.13115E0	-9.14214E0	4.8399E-3	9.36985E-2	2.73405E1	-3.26661E1	-3.26219E1	2.68334E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.1594E-1	-7.98011E-1	-9.13112E0	-9.1419E0	4.8399E-3	9.38177E-2	2.71453E1	-3.2638E1	-3.26326E1	2.68088E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16035E-1	-7.98011E-1	-9.1311E0	-9.14197E0	4.98295E-3	9.37939E-2	2.71489E1	-3.26663E1	-3.26464E1	2.6795E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16154E-1	-7.98678E-1	-9.13119E0	-9.14187E0	4.88758E-3	9.39131E-2	2.7229E1	-3.26738E1	-3.26042E1	2.68082E1	1.20069E-7	2.52647E-3	2.52647E-3	6.3074E-3	2.98481E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.15916E-1	-7.98368E-1	-9.13107E0	-9.14197E0	5.03063E-3	9.39369E-2	2.72853E1	-3.26621E1	-3.26332E1	2.68232E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9943E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.15821E-1	-7.98368E-1	-9.13136E0	-9.14214E0	5.19753E-3	9.38177E-2	2.73688E1	-3.26496E1	-3.26402E1	2.68106E1	1.19705E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09665E0	-8.15892E-1	-7.98583E-1	-9.13124E0	-9.14185E0	5.05447E-3	9.40084E-2	2.74445E1	-3.26585E1	-3.26561E1	2.68052E1	1.198E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.15725E-1	-7.9844E-1	-9.13143E0	-9.14168E0	4.98295E-3	9.38177E-2	2.72198E1	-3.26795E1	-3.26603E1	2.67872E1	1.20017E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.00563E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.15797E-1	-7.98178E-1	-9.13119E0	-9.14178E0	5.05447E-3	9.39369E-2	2.70986E1	-3.26284E1	-3.26278E1	2.67601E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.15725E-1	-7.98202E-1	-9.13122E0	-9.14199E0	4.79221E-3	9.39846E-2	2.73075E1	-3.26809E1	-3.2629E1	2.67674E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.97901E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.15988E-1	-7.97987E-1	-9.13117E0	-9.14197E0	4.88758E-3	9.40561E-2	2.74936E1	-3.26621E1	-3.2645E1	2.67992E1	1.19953E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.97394E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.15773E-1	-7.98464E-1	-9.13136E0	-9.14216E0	4.95911E-3	9.377E-2	2.73859E1	-3.26573E1	-3.26608E1	2.68094E1	1.20191E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.97499E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.16059E-1	-7.98273E-1	-9.13124E0	-9.14192E0	4.88758E-3	9.39369E-2	2.72324E1	-3.26579E1	-3.26026E1	2.68196E1	1.19841E-7	2.52025E-3	2.52025E-3	6.32858E-3	2.98842E-1