[Scan]
initial_time=2016-01-28T21:31:53
final_time=2016-01-28T21:32:12
ip_count=19
run=1026
dataset=8
scan=616
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.15773E-1
ql1_imon=1.39171E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.97607E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=2.43354E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-2.54774E-10
mult1=-1.00173E-8
mult2=-2.84237E-9
rf_tmon=-4.23604E-3
rf_agc=3.33516E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.73875E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60545E0
bslens_imon=2.80163E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.99635E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53626E1
cs_ef1b_imon=3.19407E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04673E2
lens23_imon=1.02351E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04787E1
cs_ea1_imon=1.10711E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44069E0
lens1_imon=2.4707E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64498E1
os_ef1alow_imon=2.95858E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03632E1
cs_ea2_imon=1.41157E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84634E1
cs_ef1a_imon=3.04655E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.12438E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11247E1
os_restr1_imon=4.30414E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14781E1
os_ea1_imon=2.46355E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63817E1
os_ef1bup_imon=3.09481E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22939E0
cs_ionrep_imon=9.60721E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01666E1
cs_anode1_imon=1.96722E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.09707E-8
tplens_vset=1.4E-1
tplens_vmon=1.64468E0
tplens_imon=-2.81898E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.48944E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.61325E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02882E2
lens6_imon=2.98505E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.0593E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27027E0
ionrepsh_imon=8.55601E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33567E1
lens5b_imon=2.17272E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74728E1
cs_ef2b_imon=3.13374E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47337E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71044E1
cs_ef2a_imon=3.1999E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08894E0
os_ef2alow_imon=-2.63839E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00451E-1
os_ef2bup_imon=-5.30849E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11046E1
os_restr2_imon=3.36844E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.3094E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01608E1
cs_anode2_imon=2.08321E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.08609E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.09457E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.75484E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.07145E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08408E0
cs_ionaccel_imon=-7.81769E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56269E1
einzel_imon=7.79682E-6
window_vset=0.0E0
window_vmon=1.92571E-1
window_imon=-9.95844E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39213E-4
mask2_vset=0.0E0
mask2_vmon=-1.86707E1
mask2_imon=-3.96433E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.84742E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.40688E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.08432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64061E0
defgridb_imon=6.34458E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.40811E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07777E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5996E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31743E1
cs_fil1_imon=7.71418E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.92727E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61491E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01316E-2
os_fil2_imon=-2.3344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16767E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.71399E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-1.6792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21406E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21763E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.96887E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.96363E-1
res40_imon=-2.37761E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16131E-1	-7.9844E-1	-9.13124E0	-9.14211E0	4.79221E-3	9.38654E-2	2.73788E1	-3.26874E1	-3.26431E1	2.6792E1	1.19851E-7	2.51557E-3	2.51557E-3	6.33112E-3	3.02459E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16011E-1	-7.98273E-1	-9.13143E0	-9.14204E0	4.673E-3	9.408E-2	2.72727E1	-3.26468E1	-3.26199E1	2.68094E1	1.20004E-7	2.50775E-3	2.50775E-3	6.3074E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.15797E-1	-7.98011E-1	-9.13134E0	-9.14176E0	4.8399E-3	9.41038E-2	2.73666E1	-3.26624E1	-3.26249E1	2.67717E1	1.19819E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.01742E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.15725E-1	-7.98392E-1	-9.1315E0	-9.14183E0	4.72069E-3	9.40084E-2	2.71306E1	-3.26487E1	-3.26407E1	2.67956E1	1.1993E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.01237E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.15892E-1	-7.98345E-1	-9.13138E0	-9.14154E0	4.72069E-3	9.38654E-2	2.71603E1	-3.26669E1	-3.26008E1	2.68076E1	1.19872E-7	2.51025E-3	2.51025E-3	6.31858E-3	3.01742E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.15654E-1	-7.98392E-1	-9.13153E0	-9.14204E0	4.76837E-3	9.39131E-2	2.71339E1	-3.26567E1	-3.26242E1	2.6822E1	1.19913E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.15749E-1	-7.9844E-1	-9.13153E0	-9.14204E0	5.05447E-3	9.38177E-2	2.72897E1	-3.26511E1	-3.26493E1	2.68076E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.15487E-1	-7.98392E-1	-9.13124E0	-9.14209E0	5.22137E-3	9.40084E-2	2.74013E1	-3.26526E1	-3.26425E1	2.68202E1	1.20226E-7	2.51886E-3	2.51886E-3	6.323E-3	3.01485E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.15606E-1	-7.98464E-1	-9.13136E0	-9.14207E0	4.98295E-3	9.39131E-2	2.72672E1	-3.2635E1	-3.26567E1	2.67992E1	1.19705E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16035E-1	-7.98059E-1	-9.13153E0	-9.14171E0	4.95911E-3	9.40323E-2	2.72276E1	-3.26506E1	-3.26272E1	2.68004E1	1.20069E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.16035E-1	-7.9844E-1	-9.13136E0	-9.14185E0	5.10216E-3	9.3627E-2	2.74565E1	-3.26771E1	-3.26038E1	2.68262E1	1.19705E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09688E0	-8.16131E-1	-7.98297E-1	-9.13129E0	-9.14202E0	5.14984E-3	9.377E-2	2.72782E1	-3.26389E1	-3.26389E1	2.68177E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.16011E-1	-7.98321E-1	-9.1315E0	-9.14199E0	4.98295E-3	9.38177E-2	2.73242E1	-3.26992E1	-3.26483E1	2.67777E1	1.20016E-7	2.51244E-3	2.51244E-3	6.31761E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.16202E-1	-7.98249E-1	-9.13148E0	-9.14218E0	4.79221E-3	9.35316E-2	2.74409E1	-3.26488E1	-3.2644E1	2.68172E1	1.1973E-7	2.51874E-3	2.51874E-3	6.31321E-3	2.99535E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16059E-1	-7.98297E-1	-9.13131E0	-9.14192E0	4.55379E-3	9.39131E-2	2.72292E1	-3.26713E1	-3.26101E1	2.684E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.15845E-1	-7.98345E-1	-9.13138E0	-9.14183E0	4.45843E-3	9.38892E-2	2.71567E1	-3.26903E1	-3.26536E1	2.6783E1	1.19653E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.15725E-1	-7.98225E-1	-9.13131E0	-9.14171E0	4.31538E-3	9.36508E-2	2.7374E1	-3.26642E1	-3.26335E1	2.6792E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.15868E-1	-7.9813E-1	-9.13129E0	-9.14166E0	4.93526E-3	9.37223E-2	2.71711E1	-3.26807E1	-3.25737E1	2.67842E1	1.20158E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.0071E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.15701E-1	-7.98392E-1	-9.13129E0	-9.14195E0	4.673E-3	9.37223E-2	2.74243E1	-3.26343E1	-3.26178E1	2.68046E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.97963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.15773E-1	-7.98249E-1	-9.13136E0	-9.1419E0	4.60148E-3	9.3627E-2	2.73411E1	-3.26621E1	-3.26056E1	2.67914E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.96887E-1