[Scan]
initial_time=2016-01-28T21:32:20
final_time=2016-01-28T21:32:39
ip_count=19
run=1026
dataset=8
scan=617
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=1.39243E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.00479E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=2.98643E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.63524E-10
mult1=-8.84961E-9
mult2=-2.66091E-9
rf_tmon=-5.01134E-3
rf_agc=3.31141E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.69374E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.7804E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53609E1
cs_ef1b_imon=3.18304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04565E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=1.08679E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38967E0
lens1_imon=2.58573E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.97731E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.38906E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=3.0416E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.1222E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11245E1
os_restr1_imon=4.30798E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.47778E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63832E1
os_ef1bup_imon=3.09651E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=9.57252E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=1.96844E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.08388E-8
tplens_vset=1.4E-1
tplens_vmon=1.63966E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.52037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2667E1
iondef2_imon=1.58762E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98594E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=3.99762E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=8.55671E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7486E1
cs_ef2b_imon=3.13786E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46328E0
os_ea2_imon=-5.14791E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70991E1
cs_ef2a_imon=3.2032E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05861E0
os_ef2alow_imon=-2.46685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97231E-1
os_ef2bup_imon=-5.1706E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=3.35854E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.29468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.08208E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73137E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.09685E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.75434E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.07636E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-9.41213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47508E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56451E1
einzel_imon=7.73302E-6
window_vset=0.0E0
window_vmon=2.24636E-1
window_imon=-8.1958E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39254E-4
mask2_vset=0.0E0
mask2_vmon=-1.86946E1
mask2_imon=-4.92906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.52863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.46304E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22838E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33173E1
os_fil1_imon=9.41215E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07781E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59899E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3177E1
cs_fil1_imon=6.47652E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.24514E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61706E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.48384E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.173E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.63882E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.05522E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31577E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21824E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35662E-1
res40_imon=-2.22011E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.15749E-1	-7.98488E-1	-9.13136E0	-9.14166E0	4.673E-3	9.35555E-2	2.72871E1	-3.26813E1	-3.26056E1	2.68002E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16059E-1	-7.98321E-1	-9.13143E0	-9.14187E0	4.93526E-3	9.34601E-2	2.72335E1	-3.26756E1	-3.2577E1	2.67898E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97445E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16131E-1	-7.98368E-1	-9.13141E0	-9.14176E0	4.72069E-3	9.35316E-2	2.714E1	-3.26538E1	-3.26272E1	2.68273E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.98222E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09711E0	-8.16035E-1	-7.98392E-1	-9.13131E0	-9.1419E0	4.55379E-3	9.36985E-2	2.73163E1	-3.26732E1	-3.26366E1	2.68016E1	1.19891E-7	2.51393E-3	2.51393E-3	6.32858E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09673E0	-8.1594E-1	-7.98512E-1	-9.13136E0	-9.14195E0	4.45843E-3	9.35555E-2	2.73828E1	-3.26823E1	-3.26064E1	2.6798E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.16059E-1	-7.98273E-1	-9.13141E0	-9.14187E0	4.62532E-3	9.34601E-2	2.72126E1	-3.2626E1	-3.26591E1	2.6828E1	1.20244E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16035E-1	-7.98535E-1	-9.13143E0	-9.14159E0	4.95911E-3	9.36985E-2	2.73806E1	-3.26844E1	-3.2626E1	2.6796E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.15773E-1	-7.98154E-1	-9.1316E0	-9.1418E0	4.79221E-3	9.38177E-2	2.71795E1	-3.26518E1	-3.26116E1	2.68244E1	1.20042E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.98842E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.15845E-1	-7.98225E-1	-9.13157E0	-9.14166E0	5.17368E-3	9.38654E-2	2.73796E1	-3.26603E1	-3.26272E1	2.6818E1	1.19872E-7	2.51804E-3	2.51804E-3	6.34099E-3	2.99348E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.15654E-1	-7.98273E-1	-9.13155E0	-9.14185E0	5.24521E-3	9.41038E-2	2.72727E1	-3.26308E1	-3.26326E1	2.6825E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9943E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.15725E-1	-7.98368E-1	-9.13136E0	-9.14195E0	4.95911E-3	9.39608E-2	2.72762E1	-3.26461E1	-3.2603E1	2.6795E1	1.19965E-7	2.5188E-3	2.5188E-3	6.28006E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.15654E-1	-7.98631E-1	-9.13141E0	-9.14187E0	5.00679E-3	9.35793E-2	2.73904E1	-3.26753E1	-3.25942E1	2.6798E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.15773E-1	-7.98535E-1	-9.13129E0	-9.1419E0	4.86374E-3	9.37462E-2	2.71855E1	-3.26488E1	-3.25984E1	2.6807E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.03185E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.15892E-1	-7.98535E-1	-9.13155E0	-9.14176E0	4.74453E-3	9.38654E-2	2.74077E1	-3.26714E1	-3.26219E1	2.67944E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.03185E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.15988E-1	-7.98798E-1	-9.13141E0	-9.1418E0	4.45843E-3	9.4223E-2	2.72482E1	-3.26603E1	-3.26223E1	2.67962E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.15892E-1	-7.98488E-1	-9.13143E0	-9.14195E0	4.93526E-3	9.38416E-2	2.73918E1	-3.26632E1	-3.26319E1	2.67848E1	1.19978E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.99879E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.15916E-1	-7.98416E-1	-9.13136E0	-9.14187E0	4.93526E-3	9.38654E-2	2.71951E1	-3.26771E1	-3.26705E1	2.68198E1	1.19851E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.15821E-1	-7.98583E-1	-9.13143E0	-9.1418E0	5.03063E-3	9.38892E-2	2.73841E1	-3.26272E1	-3.26378E1	2.68154E1	1.2026E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01223E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.15845E-1	-7.9875E-1	-9.13162E0	-9.14195E0	4.81606E-3	9.39131E-2	2.73393E1	-3.26773E1	-3.26213E1	2.6801E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16035E-1	-7.98512E-1	-9.13148E0	-9.14195E0	4.79221E-3	9.377E-2	2.73137E1	-3.2667E1	-3.26266E1	2.68052E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1