[Scan]
initial_time=2016-01-28T21:32:46
final_time=2016-01-28T21:33:06
ip_count=19
run=1026
dataset=8
scan=618
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=1.39317E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.9896E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=2.74062E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-2.49469E-10
mult1=-9.57182E-9
mult2=-2.86832E-9
rf_tmon=-4.43432E-3
rf_agc=3.27388E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.71311E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60604E0
bslens_imon=2.55388E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.00633E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=3.16903E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.10201E-5
lens1_vset=-5.0E0
lens1_vmon=-5.47048E0
lens1_imon=2.6813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03673E1
cs_ea2_imon=1.38623E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.12365E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11105E1
os_restr1_imon=4.32085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15453E1
os_ea1_imon=2.47354E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=9.4805E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01617E1
cs_anode1_imon=1.95881E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.0976E-8
tplens_vset=1.4E-1
tplens_vmon=1.65913E0
tplens_imon=-1.53771E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.48215E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26909E1
iondef2_imon=1.5993E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.9825E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=4.07336E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=8.50008E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18295E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46033E0
os_ea2_imon=-5.18331E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11042E0
os_ef2alow_imon=-2.39966E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.36004E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.74688E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.0923E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-9.29243E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.3934E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.50197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.81886E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53548E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33196E1
os_fil1_imon=9.40702E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59903E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31749E1
cs_fil1_imon=7.45517E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.68052E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61727E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52239E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.94711E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2178E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.88124E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16274E-1	-7.98774E-1	-9.13124E0	-9.14168E0	4.74453E-3	9.37462E-2	2.73204E1	-3.26537E1	-3.26154E1	2.68018E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16441E-1	-7.98917E-1	-9.13143E0	-9.14166E0	4.79221E-3	9.377E-2	2.72757E1	-3.26646E1	-3.26266E1	2.68232E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16512E-1	-7.9875E-1	-9.13134E0	-9.14156E0	4.98295E-3	9.37223E-2	2.73806E1	-3.26567E1	-3.26508E1	2.68169E1	1.19872E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.00676E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16178E-1	-7.9875E-1	-9.13157E0	-9.14168E0	5.03063E-3	9.38177E-2	2.7227E1	-3.26442E1	-3.26051E1	2.67937E1	1.1979E-7	2.51972E-3	2.51972E-3	6.32592E-3	3.00726E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.15892E-1	-7.98607E-1	-9.13143E0	-9.14176E0	4.98295E-3	9.377E-2	2.74576E1	-3.26461E1	-3.26325E1	2.67959E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16011E-1	-7.98488E-1	-9.13136E0	-9.14195E0	5.126E-3	9.38416E-2	2.74715E1	-3.26597E1	-3.26314E1	2.68064E1	1.201E-7	2.51611E-3	2.51611E-3	6.3531E-3	3.00794E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.15725E-1	-7.98607E-1	-9.13146E0	-9.14161E0	4.93526E-3	9.37462E-2	2.71867E1	-3.26789E1	-3.25924E1	2.6819E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.15845E-1	-7.98368E-1	-9.13153E0	-9.14192E0	5.00679E-3	9.36508E-2	2.73016E1	-3.26614E1	-3.26098E1	2.67774E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16083E-1	-7.98416E-1	-9.13136E0	-9.14171E0	4.62532E-3	9.408E-2	2.74268E1	-3.26716E1	-3.26191E1	2.67963E1	1.1993E-7	2.52301E-3	2.52301E-3	6.30221E-3	3.00247E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16298E-1	-7.98392E-1	-9.13157E0	-9.1418E0	4.50611E-3	9.377E-2	2.71375E1	-3.26404E1	-3.26404E1	2.68076E1	1.19883E-7	2.52521E-3	2.52521E-3	6.30171E-3	2.989E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16107E-1	-7.9844E-1	-9.13122E0	-9.14164E0	4.50611E-3	9.38892E-2	2.74181E1	-3.26657E1	-3.26663E1	2.68138E1	1.20297E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.99879E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16202E-1	-7.98678E-1	-9.13119E0	-9.14187E0	4.50611E-3	9.39369E-2	2.74343E1	-3.26765E1	-3.26524E1	2.67937E1	1.19809E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16035E-1	-7.99012E-1	-9.13143E0	-9.14199E0	4.673E-3	9.41038E-2	2.72378E1	-3.26458E1	-3.26164E1	2.68119E1	1.19851E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01738E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16083E-1	-7.98845E-1	-9.13146E0	-9.14204E0	4.57764E-3	9.36985E-2	2.72114E1	-3.26326E1	-3.26482E1	2.67989E1	1.20031E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.00942E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16059E-1	-7.98631E-1	-9.13138E0	-9.14192E0	4.69685E-3	9.36508E-2	2.74403E1	-3.26645E1	-3.26182E1	2.67794E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.0148E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16035E-1	-7.98559E-1	-9.13126E0	-9.14233E0	4.79221E-3	9.38654E-2	2.72522E1	-3.26398E1	-3.26152E1	2.67976E1	1.20031E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.00676E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.15773E-1	-7.98726E-1	-9.13153E0	-9.14214E0	4.3869E-3	9.38892E-2	2.73201E1	-3.26627E1	-3.26368E1	2.6795E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.15821E-1	-7.98559E-1	-9.13157E0	-9.14187E0	4.45843E-3	9.40561E-2	2.73011E1	-3.26829E1	-3.2634E1	2.67995E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.15606E-1	-7.98488E-1	-9.13153E0	-9.14195E0	4.86374E-3	9.39131E-2	2.72042E1	-3.26452E1	-3.26392E1	2.6813E1	1.19991E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.15797E-1	-7.98464E-1	-9.13179E0	-9.14187E0	4.74453E-3	9.408E-2	2.73225E1	-3.26909E1	-3.26128E1	2.67956E1	1.19697E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1