[Scan]
initial_time=2016-01-28T21:33:13
final_time=2016-01-28T21:33:32
ip_count=19
run=1026
dataset=8
scan=619
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.39301E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.02851E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=2.71559E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.8286E-10
mult1=-9.88488E-9
mult2=-2.73059E-9
rf_tmon=-4.52444E-3
rf_agc=3.31053E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.66707E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60245E0
bslens_imon=2.48728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.18488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0494E1
cs_ea1_imon=1.07751E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40561E0
lens1_imon=2.54496E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.40195E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12519E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.31977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=2.45893E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2539E0
cs_ionrep_imon=9.49892E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=1.9617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.08864E-8
tplens_vset=1.4E-1
tplens_vmon=1.63723E0
tplens_imon=-9.02587E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98674E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.98178E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=8.43185E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33928E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44316E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0966E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.36796E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.30144E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73502E1
iondef1_imon=1.11284E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.7788E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.08187E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-8.03104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.39567E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.59332E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.48735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.4188E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07726E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59905E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3176E1
cs_fil1_imon=6.95061E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76171E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61643E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.27317E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58778E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.26933E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.7609E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.80025E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.15988E-1	-7.98416E-1	-9.13191E0	-9.14178E0	4.81606E-3	9.377E-2	2.73151E1	-3.26531E1	-3.26579E1	2.68118E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.1594E-1	-7.98392E-1	-9.13188E0	-9.14192E0	5.26905E-3	9.40561E-2	2.73605E1	-3.26478E1	-3.26467E1	2.67879E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16131E-1	-7.98559E-1	-9.132E0	-9.14166E0	5.31673E-3	9.39369E-2	2.72806E1	-3.26658E1	-3.26187E1	2.6786E1	1.19595E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00197E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16035E-1	-7.98225E-1	-9.13193E0	-9.14192E0	5.26905E-3	9.36747E-2	2.72432E1	-3.26626E1	-3.26207E1	2.67914E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.1594E-1	-7.98702E-1	-9.13146E0	-9.14195E0	5.05447E-3	9.377E-2	2.73363E1	-3.26458E1	-3.26038E1	2.6816E1	1.19965E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00563E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.15988E-1	-7.98559E-1	-9.13184E0	-9.14204E0	5.07832E-3	9.38416E-2	2.72432E1	-3.26518E1	-3.2638E1	2.67824E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99686E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.15868E-1	-7.98321E-1	-9.13167E0	-9.14195E0	5.00679E-3	9.42469E-2	2.72702E1	-3.26224E1	-3.25918E1	2.67986E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16035E-1	-7.98512E-1	-9.13136E0	-9.14209E0	4.76837E-3	9.38892E-2	2.72449E1	-3.26832E1	-3.26231E1	2.68046E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16059E-1	-7.98392E-1	-9.13155E0	-9.14197E0	4.79221E-3	9.41038E-2	2.72821E1	-3.26431E1	-3.2639E1	2.67955E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15797E-1	-7.98297E-1	-9.13134E0	-9.14192E0	4.33922E-3	9.37223E-2	2.74349E1	-3.26885E1	-3.26236E1	2.68196E1	1.19749E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.15701E-1	-7.98202E-1	-9.13148E0	-9.1418E0	4.45843E-3	9.36985E-2	2.71895E1	-3.2639E1	-3.26526E1	2.68118E1	1.19902E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.15821E-1	-7.98321E-1	-9.13141E0	-9.14195E0	4.64916E-3	9.37223E-2	2.73455E1	-3.26505E1	-3.26058E1	2.67631E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.15678E-1	-7.98512E-1	-9.13148E0	-9.14207E0	4.64916E-3	9.38416E-2	2.72738E1	-3.26531E1	-3.26113E1	2.67613E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.15678E-1	-7.98416E-1	-9.13146E0	-9.14192E0	4.48227E-3	9.38892E-2	2.72763E1	-3.26464E1	-3.26188E1	2.68088E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09302E0	-8.15582E-1	-7.98368E-1	-9.13124E0	-9.14178E0	5.03063E-3	9.38416E-2	2.72684E1	-3.26999E1	-3.26206E1	2.67953E1	1.19902E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.15392E-1	-7.9844E-1	-9.13131E0	-9.14168E0	4.88758E-3	9.40084E-2	2.73682E1	-3.26512E1	-3.26356E1	2.67923E1	1.19872E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.0041E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.15511E-1	-7.98416E-1	-9.13141E0	-9.14199E0	5.10216E-3	9.37939E-2	2.72909E1	-3.26661E1	-3.26467E1	2.6822E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.1563E-1	-7.98655E-1	-9.13143E0	-9.14207E0	5.126E-3	9.39131E-2	2.72198E1	-3.26711E1	-3.26146E1	2.67962E1	1.20226E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.15701E-1	-7.98631E-1	-9.13141E0	-9.14211E0	4.88758E-3	9.39846E-2	2.74125E1	-3.27062E1	-3.26154E1	2.6789E1	1.19907E-7	2.52026E-3	2.52026E-3	6.30469E-3	2.99732E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16131E-1	-7.98583E-1	-9.1315E0	-9.14204E0	4.98295E-3	9.35555E-2	2.73502E1	-3.2647E1	-3.26368E1	2.6789E1