[Scan]
initial_time=2016-01-28T21:33:39
final_time=2016-01-28T21:34:00
ip_count=19
run=1026
dataset=8
scan=620
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.15749E-1
ql1_imon=1.39109E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=2.07156E-9
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=2.7082E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.76649E-10
mult1=-9.74761E-9
mult2=-2.90356E-9
rf_tmon=-5.46512E-3
rf_agc=3.30201E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.69078E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69823E0
bslens_imon=2.71421E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19501E1
lens5a_imon=1.98962E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53835E1
cs_ef1b_imon=3.18339E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04564E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05438E1
cs_ea1_imon=1.0576E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37882E0
lens1_imon=2.803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64603E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03628E1
cs_ea2_imon=1.39195E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=3.05029E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.12716E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.30833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14907E1
os_ea1_imon=2.4534E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.10554E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23331E0
cs_ionrep_imon=9.29192E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93666E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=1.96392E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.08615E-8
tplens_vset=1.4E-1
tplens_vmon=1.69323E0
tplens_imon=-2.19468E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25936E1
iondef3_imon=1.51285E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27009E1
iondef2_imon=1.56067E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98602E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.97373E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28682E0
ionrepsh_imon=8.58155E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33504E1
lens5b_imon=2.22663E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.14203E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43481E0
os_ea2_imon=-7.72733E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07193E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01864E-1
os_ef2bup_imon=-5.27833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11025E1
os_restr2_imon=3.36827E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.30611E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.09807E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73493E1
iondef1_imon=1.12454E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6796E1
iondef4_imon=1.09615E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.81882E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.07679E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1423E0
cs_ionaccel_imon=-9.41213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47303E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56139E1
einzel_imon=7.82337E-6
window_vset=0.0E0
window_vmon=2.40854E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86854E1
mask2_imon=-5.20708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.70042E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.42655E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50097E3
multb_neg_imon=7.4477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33334E0
defgridb_imon=6.07137E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33148E1
os_fil1_imon=9.41702E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0792E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59971E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.64652E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00792E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61516E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00436E-2
os_fil2_imon=-2.45488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0977E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49497E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28029E-1
cs_fil2_imon=-2.1479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21772E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10756E-1
res40_imon=-2.47728E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.15797E-1	-7.98583E-1	-9.13153E0	-9.1419E0	4.93526E-3	9.41753E-2	2.72758E1	-3.26928E1	-3.26133E1	2.68069E1	1.19831E-7	2.52093E-3	2.52093E-3	6.3126E-3	2.98768E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16131E-1	-7.98535E-1	-9.1316E0	-9.14176E0	4.8399E-3	9.39131E-2	2.72929E1	-3.26721E1	-3.26387E1	2.68077E1	1.20358E-7	2.52621E-3	2.52621E-3	6.3074E-3	2.98792E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16107E-1	-7.98225E-1	-9.13167E0	-9.1418E0	5.14984E-3	9.3627E-2	2.74302E1	-3.26195E1	-3.26242E1	2.68157E1	1.20035E-7	2.52144E-3	2.52144E-3	6.31203E-3	2.99406E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16369E-1	-7.98297E-1	-9.1315E0	-9.14202E0	4.98295E-3	9.36747E-2	2.72648E1	-3.26404E1	-3.26212E1	2.67776E1	1.19749E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.02769E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16417E-1	-7.98082E-1	-9.13155E0	-9.14173E0	4.43459E-3	9.40323E-2	2.74196E1	-3.26591E1	-3.26125E1	2.67938E1	1.20278E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16202E-1	-7.98154E-1	-9.13146E0	-9.14192E0	4.81606E-3	9.36985E-2	2.72213E1	-3.26638E1	-3.26107E1	2.67884E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.15821E-1	-7.98392E-1	-9.13131E0	-9.14171E0	4.8399E-3	9.37939E-2	2.71609E1	-3.26561E1	-3.26278E1	2.68256E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.15916E-1	-7.98345E-1	-9.13131E0	-9.14173E0	4.93526E-3	9.37939E-2	2.74001E1	-3.26484E1	-3.26254E1	2.68262E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09317E0	-8.15964E-1	-7.98225E-1	-9.13115E0	-9.14183E0	4.69685E-3	9.38654E-2	2.7329E1	-3.26321E1	-3.26095E1	2.67902E1	1.20017E-7	2.52647E-3	2.52647E-3	6.32936E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.15773E-1	-7.98035E-1	-9.13126E0	-9.14202E0	5.126E-3	9.37939E-2	2.72875E1	-3.26388E1	-3.26412E1	2.67944E1	1.19766E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.9829E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.16083E-1	-7.97844E-1	-9.13095E0	-9.14195E0	4.76837E-3	9.3627E-2	2.71855E1	-3.26914E1	-3.2632E1	2.68012E1	1.20066E-7	2.51655E-3	2.51655E-3	6.29796E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.15868E-1	-7.97987E-1	-9.13117E0	-9.14164E0	4.8399E-3	9.38177E-2	2.74278E1	-3.26787E1	-3.26524E1	2.679E1	1.202E-7	2.51602E-3	2.51602E-3	6.31992E-3	3.00713E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.15916E-1	-7.98011E-1	-9.13143E0	-9.14195E0	4.29153E-3	9.377E-2	2.72072E1	-3.2656E1	-3.26523E1	2.6819E1	1.20196E-7	2.51545E-3	2.51545E-3	6.31696E-3	3.03211E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.15749E-1	-7.98011E-1	-9.13129E0	-9.14211E0	4.45843E-3	9.36508E-2	2.73892E1	-3.26759E1	-3.26284E1	2.68106E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16083E-1	-7.97963E-1	-9.13122E0	-9.14214E0	4.55379E-3	9.39846E-2	2.72915E1	-3.26714E1	-3.26443E1	2.68046E1	1.19913E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16154E-1	-7.98154E-1	-9.13141E0	-9.14192E0	4.673E-3	9.39369E-2	2.72186E1	-3.2638E1	-3.25876E1	2.6795E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.15821E-1	-7.98202E-1	-9.13124E0	-9.1418E0	4.55379E-3	9.377E-2	2.72812E1	-3.2648E1	-3.26217E1	2.68052E1	1.19866E-7	2.51512E-3	2.51512E-3	6.31294E-3	3.00751E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.15916E-1	-7.98297E-1	-9.13112E0	-9.14164E0	4.57764E-3	9.36985E-2	2.72791E1	-3.26809E1	-3.26337E1	2.68406E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.15773E-1	-7.98059E-1	-9.13148E0	-9.14195E0	4.50611E-3	9.377E-2	2.72909E1	-3.2685E1	-3.26679E1	2.6786E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.15749E-1	-7.9813E-1	-9.13098E0	-9.14195E0	5.03063E-3	9.38416E-2	2.73493E1	-3.27009E1	-3.25936E1	2.6796E1	1.20069E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.00824E-1