[Scan]
initial_time=2016-01-28T21:34:07
final_time=2016-01-28T21:34:26
ip_count=19
run=1026
dataset=8
scan=621
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.16083E-1
ql1_imon=1.39355E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.01343E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=2.43926E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.81727E-10
mult1=-9.921E-9
mult2=-2.69466E-9
rf_tmon=-4.68666E-3
rf_agc=3.35679E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.73298E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.37691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=2.00633E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04852E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=3.19281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02567E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05301E1
cs_ea1_imon=1.08892E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35604E0
lens1_imon=2.71669E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64386E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0454E1
cs_ea2_imon=1.40888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=3.05154E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.1236E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1481E1
os_ea1_imon=2.45159E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.11064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26567E0
cs_ionrep_imon=9.65039E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93087E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=1.95953E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.09208E-8
tplens_vset=1.4E-1
tplens_vmon=1.67624E0
tplens_imon=-3.34315E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.47471E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26152E1
iondef2_imon=1.59824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.98617E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20255E0
ionrepsh_imon=8.69121E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42022E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70981E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.3604E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22999E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.0936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74667E1
iondef1_imon=1.10768E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.73093E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.08209E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-2.58905E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.82406E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.45077E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.70726E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.503E0
defgridb_imon=6.35166E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33196E1
os_fil1_imon=9.42198E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59989E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31712E1
cs_fil1_imon=7.59933E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.61445E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61824E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72994E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-3.00834E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21668E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.85431E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.15678E-1	-7.98559E-1	-9.13143E0	-9.14171E0	4.69685E-3	9.36747E-2	2.7393E1	-3.26785E1	-3.26024E1	2.68076E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01738E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16107E-1	-7.98631E-1	-9.13146E0	-9.1419E0	4.50611E-3	9.40084E-2	2.71882E1	-3.2675E1	-3.26278E1	2.67876E1	1.1979E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.15868E-1	-7.98821E-1	-9.13129E0	-9.14192E0	4.52995E-3	9.39369E-2	2.72909E1	-3.26614E1	-3.26472E1	2.67984E1	1.19978E-7	2.52473E-3	2.52473E-3	6.33538E-3	2.99879E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.15725E-1	-7.98512E-1	-9.13143E0	-9.14233E0	4.52995E-3	9.38177E-2	2.73658E1	-3.26573E1	-3.26356E1	2.68076E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.1563E-1	-7.98464E-1	-9.13119E0	-9.14183E0	4.62532E-3	9.408E-2	2.71056E1	-3.26561E1	-3.26176E1	2.68088E1	1.20383E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.15797E-1	-7.98368E-1	-9.13088E0	-9.14176E0	4.64916E-3	9.38654E-2	2.72907E1	-3.26554E1	-3.26296E1	2.67818E1	1.19809E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.15892E-1	-7.97963E-1	-9.13093E0	-9.14187E0	4.8399E-3	9.37223E-2	2.72325E1	-3.2616E1	-3.26343E1	2.67856E1	1.20106E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.15725E-1	-7.97796E-1	-9.13122E0	-9.14209E0	4.72069E-3	9.39608E-2	2.73824E1	-3.26638E1	-3.2613E1	2.67884E1	1.20004E-7	2.5131E-3	2.5131E-3	6.28592E-3	2.97901E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.15845E-1	-7.9844E-1	-9.13143E0	-9.14207E0	4.91142E-3	9.39608E-2	2.71724E1	-3.26874E1	-3.25859E1	2.67686E1	1.20226E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.15773E-1	-7.98202E-1	-9.13131E0	-9.14223E0	4.81606E-3	9.38177E-2	2.73657E1	-3.26395E1	-3.26132E1	2.67944E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.98665E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.15749E-1	-7.98488E-1	-9.13134E0	-9.14187E0	4.98295E-3	9.38892E-2	2.71665E1	-3.26785E1	-3.26018E1	2.67986E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.15868E-1	-7.98488E-1	-9.13141E0	-9.14199E0	5.126E-3	9.39846E-2	2.73505E1	-3.26938E1	-3.26012E1	2.67949E1	1.19757E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.15845E-1	-7.98774E-1	-9.13155E0	-9.14209E0	4.81606E-3	9.36031E-2	2.74379E1	-3.26705E1	-3.26176E1	2.67704E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.15701E-1	-7.98345E-1	-9.13107E0	-9.14192E0	4.79221E-3	9.40084E-2	2.72156E1	-3.26512E1	-3.26488E1	2.68172E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.15868E-1	-7.98106E-1	-9.1311E0	-9.14207E0	4.69685E-3	9.38892E-2	2.74823E1	-3.26891E1	-3.25984E1	2.68136E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.15892E-1	-7.98345E-1	-9.13119E0	-9.14197E0	4.74453E-3	9.39846E-2	2.7428E1	-3.27063E1	-3.26361E1	2.68124E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.15821E-1	-7.98321E-1	-9.13129E0	-9.14211E0	4.43459E-3	9.3627E-2	2.71789E1	-3.26218E1	-3.2647E1	2.67932E1	1.19878E-7	2.51545E-3	2.51545E-3	6.33131E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.15988E-1	-7.98512E-1	-9.1311E0	-9.14223E0	4.64916E-3	9.377E-2	2.73538E1	-3.26492E1	-3.2633E1	2.68244E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.15964E-1	-7.98225E-1	-9.1311E0	-9.14197E0	4.673E-3	9.41038E-2	2.72331E1	-3.26236E1	-3.26543E1	2.67862E1	1.19841E-7	2.51182E-3	2.51182E-3	6.32858E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16083E-1	-7.98559E-1	-9.1311E0	-9.14195E0	4.62532E-3	9.38416E-2	2.74667E1	-3.26152E1	-3.26266E1	2.67962E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.02396E-1