[Scan]
initial_time=2016-01-28T21:34:33
final_time=2016-01-28T21:34:53
ip_count=19
run=1026
dataset=8
scan=622
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=1.40006E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.06159E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=2.57492E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-2.87688E-10
mult1=-1.03183E-8
mult2=-2.66272E-9
rf_tmon=-4.57852E-3
rf_agc=3.38923E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.70895E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63849E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=2.00633E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04881E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.18128E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02489E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=1.07405E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41562E0
lens1_imon=2.81225E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.38658E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.03856E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.1246E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.31797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.49052E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64002E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27215E0
cs_ionrep_imon=9.52651E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.09144E-8
tplens_vset=1.4E-1
tplens_vmon=1.63317E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.59258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=3.99896E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=8.53902E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33876E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46505E0
os_ea2_imon=-3.80294E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00524E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=3.37013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2301E2
cs_ionfoca_imon=6.30495E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7355E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68009E1
iondef4_imon=1.10648E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.77045E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.07742E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-8.13916E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.55785E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.29668E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.35331E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.4078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07696E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60057E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31782E1
cs_fil1_imon=6.94461E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40732E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61889E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19298E-2
os_fil2_imon=-2.21547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45658E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.92308E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2173E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15754E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.15535E-1	-7.98392E-1	-9.13107E0	-9.14197E0	4.60148E-3	9.39608E-2	2.72498E1	-3.26861E1	-3.26356E1	2.68148E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.15725E-1	-7.98321E-1	-9.1311E0	-9.14195E0	4.673E-3	9.40084E-2	2.73112E1	-3.26866E1	-3.26517E1	2.68082E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.15535E-1	-7.98368E-1	-9.13148E0	-9.1419E0	4.41074E-3	9.37223E-2	2.7348E1	-3.26498E1	-3.2637E1	2.68082E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.02922E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.15797E-1	-7.98225E-1	-9.13155E0	-9.14211E0	4.86374E-3	9.36747E-2	2.71994E1	-3.26368E1	-3.26452E1	2.67856E1	1.20158E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.15868E-1	-7.98225E-1	-9.13146E0	-9.14195E0	4.673E-3	9.39608E-2	2.7349E1	-3.26771E1	-3.2635E1	2.67872E1	1.20209E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.15606E-1	-7.98368E-1	-9.13129E0	-9.14183E0	4.76837E-3	9.39131E-2	2.7321E1	-3.26614E1	-3.2616E1	2.68238E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.15606E-1	-7.98607E-1	-9.13138E0	-9.14221E0	5.126E-3	9.36508E-2	2.72609E1	-3.26396E1	-3.26667E1	2.67974E1	1.20209E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.15296E-1	-7.98416E-1	-9.13155E0	-9.14207E0	4.8399E-3	9.38892E-2	2.72961E1	-3.26585E1	-3.26332E1	2.68112E1	1.19705E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.15415E-1	-7.9844E-1	-9.13107E0	-9.14192E0	4.64916E-3	9.39131E-2	2.71994E1	-3.26567E1	-3.26086E1	2.67938E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.15344E-1	-7.98512E-1	-9.131E0	-9.14216E0	5.03063E-3	9.39131E-2	2.73906E1	-3.26413E1	-3.2603E1	2.68186E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.15582E-1	-7.98655E-1	-9.13122E0	-9.14204E0	4.55379E-3	9.35793E-2	2.72482E1	-3.26676E1	-3.26438E1	2.67962E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.15678E-1	-7.98488E-1	-9.13146E0	-9.14195E0	4.86374E-3	9.39846E-2	2.73219E1	-3.27094E1	-3.26378E1	2.67871E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.15248E-1	-7.98368E-1	-9.13177E0	-9.14202E0	4.79221E-3	9.38892E-2	2.74069E1	-3.26527E1	-3.2633E1	2.67859E1	1.1987E-7	2.5216E-3	2.5216E-3	6.31251E-3	2.99421E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.15511E-1	-7.98178E-1	-9.13162E0	-9.14192E0	5.03063E-3	9.38654E-2	2.73027E1	-3.26809E1	-3.26183E1	2.67427E1	1.1973E-7	2.51411E-3	2.51411E-3	6.29002E-3	3.00363E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.15392E-1	-7.98082E-1	-9.13177E0	-9.14192E0	4.98295E-3	9.38654E-2	2.72984E1	-3.26646E1	-3.26744E1	2.67728E1	1.19757E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.15272E-1	-7.98368E-1	-9.13165E0	-9.14202E0	4.62532E-3	9.34601E-2	2.73045E1	-3.26632E1	-3.26213E1	2.68268E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.15272E-1	-7.98655E-1	-9.1316E0	-9.14183E0	5.29289E-3	9.37223E-2	2.73808E1	-3.26615E1	-3.26651E1	2.67842E1	1.20122E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.15415E-1	-7.98535E-1	-9.13146E0	-9.1419E0	5.19753E-3	9.35078E-2	2.72288E1	-3.2647E1	-3.26242E1	2.67868E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.15845E-1	-7.98464E-1	-9.13117E0	-9.14187E0	5.14984E-3	9.39608E-2	2.72443E1	-3.26573E1	-3.26376E1	2.68294E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.15797E-1	-7.98035E-1	-9.13122E0	-9.14192E0	4.93526E-3	9.39846E-2	2.7355E1	-3.2653E1	-3.2641E1	2.68009E1	1.20004E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1