[Scan]
initial_time=2016-01-28T21:35:27
final_time=2016-01-28T21:35:46
ip_count=19
run=1026
dataset=8
scan=624
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.15868E-1
ql1_imon=1.39157E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=1.99182E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=2.99883E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-2.88475E-10
mult1=-1.03063E-8
mult2=-2.66871E-9
rf_tmon=-4.62658E-3
rf_agc=3.32495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.66103E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.70719E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19827E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05233E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.18705E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04668E2
lens23_imon=1.02496E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=1.08688E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38337E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.41205E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.05586E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.1261E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.30788E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.48236E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.09803E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=9.25018E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=1.96927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.08456E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.52056E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26873E1
iondef2_imon=1.56958E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.9064E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=8.31289E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.20405E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74429E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46659E0
os_ea2_imon=-5.94952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00724E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71498E1
cs_ef2a_imon=3.20074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.37553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.10671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67862E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.7475E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.08476E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-7.67065E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.91489E-6
window_vset=0.0E0
window_vmon=2.20947E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39318E-4
mask2_vset=0.0E0
mask2_vmon=-1.86843E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92685E3
multa_neg_imon=7.62434E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.58972E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.17372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33183E1
os_fil1_imon=9.40918E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08416E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60013E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31806E1
cs_fil1_imon=7.85761E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.67762E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61858E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64578E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27192E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21745E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0012E-1
chamber_ion_pmon=1.19933E-7
chamber_cvt_pmon=2.52243E-3
foreline_cvt_pmon=2.52243E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01939E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.15892E-1	-7.98512E-1	-9.13172E0	-9.14178E0	4.93526E-3	9.38177E-2	2.74205E1	-3.26711E1	-3.26134E1	2.68082E1	1.19851E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.00453E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16011E-1	-7.98583E-1	-9.13162E0	-9.14209E0	4.8399E-3	9.37939E-2	2.72396E1	-3.26396E1	-3.26596E1	2.67968E1	1.19861E-7	2.52209E-3	2.52209E-3	6.34037E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.1594E-1	-7.98273E-1	-9.13138E0	-9.14176E0	4.60148E-3	9.38177E-2	2.73611E1	-3.26726E1	-3.2639E1	2.68094E1	1.2026E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.1594E-1	-7.98345E-1	-9.13124E0	-9.14159E0	4.88758E-3	9.40084E-2	2.71706E1	-3.26608E1	-3.26254E1	2.67944E1	1.20158E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.15749E-1	-7.98225E-1	-9.13131E0	-9.1419E0	4.86374E-3	9.41992E-2	2.72089E1	-3.26727E1	-3.26118E1	2.6783E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-8.15701E-1	-7.98106E-1	-9.13162E0	-9.14171E0	4.76837E-3	9.40084E-2	2.74451E1	-3.26591E1	-3.26375E1	2.67521E1	1.20028E-7	2.51265E-3	2.51265E-3	6.3126E-3	2.99753E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.15701E-1	-7.98082E-1	-9.13138E0	-9.14173E0	4.76837E-3	9.38177E-2	2.7403E1	-3.26301E1	-3.26366E1	2.6807E1	1.19895E-7	2.51642E-3	2.51642E-3	6.32483E-3	2.99811E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.16059E-1	-7.98202E-1	-9.13148E0	-9.14166E0	4.86374E-3	9.39369E-2	2.717E1	-3.26673E1	-3.26242E1	2.67902E1	1.198E-7	2.52815E-3	2.52815E-3	6.33436E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16035E-1	-7.98321E-1	-9.13141E0	-9.14168E0	4.91142E-3	9.40084E-2	2.72582E1	-3.26705E1	-3.26194E1	2.68059E1	1.20106E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.15916E-1	-7.9813E-1	-9.13134E0	-9.14199E0	4.45843E-3	9.39608E-2	2.74727E1	-3.26765E1	-3.26266E1	2.68148E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.15916E-1	-7.98416E-1	-9.13119E0	-9.14218E0	4.55379E-3	9.38416E-2	2.71963E1	-3.26651E1	-3.26452E1	2.68058E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.15916E-1	-7.9844E-1	-9.13134E0	-9.14214E0	4.76837E-3	9.38654E-2	2.73928E1	-3.26735E1	-3.26296E1	2.68113E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.15821E-1	-7.98082E-1	-9.13136E0	-9.14192E0	4.48227E-3	9.35316E-2	2.72148E1	-3.26343E1	-3.26844E1	2.67978E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.15868E-1	-7.98368E-1	-9.13138E0	-9.14178E0	4.50611E-3	9.36508E-2	2.73934E1	-3.26512E1	-3.26969E1	2.67884E1	1.19705E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.15964E-1	-7.98368E-1	-9.1315E0	-9.14185E0	4.88758E-3	9.34124E-2	2.73087E1	-3.26567E1	-3.26122E1	2.68094E1	1.20209E-7	2.52923E-3	2.52923E-3	6.30202E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.15916E-1	-7.98368E-1	-9.13143E0	-9.1419E0	4.93526E-3	9.36747E-2	2.71915E1	-3.26518E1	-3.25828E1	2.68034E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.15749E-1	-7.98273E-1	-9.13153E0	-9.14204E0	5.10216E-3	9.38654E-2	2.73016E1	-3.26673E1	-3.26337E1	2.68134E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.15582E-1	-7.9813E-1	-9.13129E0	-9.14171E0	4.81606E-3	9.37939E-2	2.738E1	-3.26496E1	-3.26225E1	2.6801E1	1.2026E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.15654E-1	-7.98631E-1	-9.13146E0	-9.14192E0	5.22137E-3	9.39131E-2	2.72437E1	-3.26691E1	-3.26201E1	2.68094E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.15868E-1	-7.98607E-1	-9.13157E0	-9.14204E0	5.29289E-3	9.38416E-2	2.73225E1	-3.26873E1	-3.26194E1	2.67862E1	1.19933E-7	2.52243E-3	2.52243E-3	6.3074E-3	3.0012E-1