[Scan]
initial_time=2016-01-28T21:35:53
final_time=2016-01-28T21:36:13
ip_count=19
run=1026
dataset=8
scan=625
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.15463E-1
ql1_imon=1.39363E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.07011E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=2.55299E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-2.43616E-10
mult1=-9.88947E-9
mult2=-2.85652E-9
rf_tmon=-3.7426E-3
rf_agc=3.40642E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.68616E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=3.1856E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04555E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=1.09697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.399E0
lens1_imon=2.81894E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.39979E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.12655E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.47551E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=9.47729E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.9355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.09315E-8
tplens_vset=1.4E-1
tplens_vmon=1.64564E0
tplens_imon=-1.98407E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25877E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.0135E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=8.74548E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.20333E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46058E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.36616E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.09865E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72786E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67949E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.76062E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.10015E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.86443E-6
window_vset=0.0E0
window_vmon=2.23349E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39304E-4
mask2_vset=0.0E0
mask2_vmon=-1.86933E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.47293E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60608E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33181E1
os_fil1_imon=9.41309E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0781E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5993E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31756E1
cs_fil1_imon=6.94461E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02302E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61562E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60324E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27062E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21714E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.51483E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.15535E-1	-7.98631E-1	-9.13153E0	-9.14183E0	4.72069E-3	9.39608E-2	2.73588E1	-3.26461E1	-3.26396E1	2.68065E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.15725E-1	-7.98583E-1	-9.13134E0	-9.14207E0	5.03063E-3	9.36747E-2	2.73956E1	-3.26835E1	-3.26277E1	2.6806E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.15606E-1	-7.98535E-1	-9.13136E0	-9.14207E0	4.673E-3	9.41753E-2	2.71323E1	-3.26609E1	-3.26379E1	2.68032E1	1.19831E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.00741E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.15749E-1	-7.98392E-1	-9.13148E0	-9.14197E0	4.673E-3	9.408E-2	2.72408E1	-3.26463E1	-3.26295E1	2.67902E1	1.19775E-7	2.51271E-3	2.51271E-3	6.31879E-3	2.9944E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.15678E-1	-7.98488E-1	-9.13153E0	-9.14199E0	4.93526E-3	9.36747E-2	2.72757E1	-3.26689E1	-3.26229E1	2.67938E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.1594E-1	-7.98297E-1	-9.13153E0	-9.14211E0	5.03063E-3	9.39369E-2	2.72084E1	-3.26404E1	-3.26152E1	2.6789E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.15964E-1	-7.98321E-1	-9.13143E0	-9.14204E0	4.88758E-3	9.37223E-2	2.71327E1	-3.26494E1	-3.26122E1	2.67884E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.15678E-1	-7.98464E-1	-9.13162E0	-9.14204E0	4.72069E-3	9.377E-2	2.7121E1	-3.26703E1	-3.25965E1	2.68053E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.03185E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.15654E-1	-7.98321E-1	-9.1315E0	-9.14214E0	4.64916E-3	9.39608E-2	2.70948E1	-3.26362E1	-3.26266E1	2.68088E1	1.20158E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.15701E-1	-7.98559E-1	-9.13136E0	-9.14199E0	4.72069E-3	9.36508E-2	2.71957E1	-3.27203E1	-3.26386E1	2.67887E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1563E-1	-7.98392E-1	-9.13136E0	-9.14173E0	4.55379E-3	9.38654E-2	2.71423E1	-3.26807E1	-3.2653E1	2.68229E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.15773E-1	-7.98321E-1	-9.13177E0	-9.14171E0	4.43459E-3	9.41992E-2	2.7109E1	-3.26575E1	-3.25974E1	2.67915E1	1.1978E-7	2.51941E-3	2.51941E-3	6.31974E-3	2.99963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.15797E-1	-7.98631E-1	-9.13205E0	-9.1418E0	4.673E-3	9.38892E-2	2.71852E1	-3.26838E1	-3.26465E1	2.68075E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.15868E-1	-7.98559E-1	-9.13219E0	-9.14185E0	4.48227E-3	9.34839E-2	2.72318E1	-3.26727E1	-3.26487E1	2.68114E1	1.20126E-7	2.51529E-3	2.51529E-3	6.3074E-3	2.99359E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.1563E-1	-7.98512E-1	-9.13186E0	-9.14183E0	4.91142E-3	9.38892E-2	2.74902E1	-3.26585E1	-3.25954E1	2.68046E1	1.20019E-7	2.52147E-3	2.52147E-3	6.30149E-3	2.98512E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.15654E-1	-7.98225E-1	-9.1316E0	-9.1419E0	4.93526E-3	9.39846E-2	2.73105E1	-3.26314E1	-3.26621E1	2.6801E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.98481E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.15821E-1	-7.98512E-1	-9.13162E0	-9.14166E0	5.05447E-3	9.36985E-2	2.73045E1	-3.26573E1	-3.26368E1	2.68076E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.15868E-1	-7.98512E-1	-9.13169E0	-9.14166E0	4.88758E-3	9.37939E-2	2.71759E1	-3.26425E1	-3.26154E1	2.68012E1	1.20114E-7	2.51755E-3	2.51755E-3	6.32644E-3	3.01284E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.15463E-1	-7.98678E-1	-9.13208E0	-9.14187E0	5.00679E-3	9.408E-2	2.71299E1	-3.26396E1	-3.25936E1	2.68004E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.15463E-1	-7.98535E-1	-9.13179E0	-9.14171E0	4.79221E-3	9.36985E-2	2.72786E1	-3.26649E1	-3.25877E1	2.67949E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99941E-1