[Scan]
initial_time=2016-01-28T21:36:20
final_time=2016-01-28T21:36:39
ip_count=19
run=1026
dataset=8
scan=626
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.39099E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.0436E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.12042E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=-2.56968E-10
mult1=-1.00655E-8
mult2=-2.97212E-9
rf_tmon=-4.24806E-3
rf_agc=3.35559E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=1.67918E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64775E0
bslens_imon=2.57985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.98601E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05243E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53928E1
cs_ef1b_imon=3.17713E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02166E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04866E1
cs_ea1_imon=1.0808E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41601E0
lens1_imon=2.78843E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64406E1
os_ef1alow_imon=2.98148E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.40618E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=3.04542E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.1296E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11071E1
os_restr1_imon=4.30346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15201E1
os_ea1_imon=2.47719E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63832E1
os_ef1bup_imon=3.09408E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22197E0
cs_ionrep_imon=9.38974E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01786E1
cs_anode1_imon=1.96636E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.09088E-8
tplens_vset=1.4E-1
tplens_vmon=1.64491E0
tplens_imon=-8.98724E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.50977E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.58694E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98495E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=3.97613E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27759E0
ionrepsh_imon=8.38859E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33912E1
lens5b_imon=2.17581E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74849E1
cs_ef2b_imon=3.1396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4514E0
os_ea2_imon=-5.20922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00675E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.20424E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09742E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71746E-1
os_ef2bup_imon=-5.26095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10672E1
os_restr2_imon=3.37453E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30172E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.08602E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.74149E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.11971E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10002E0
cs_ionaccel_imon=-7.88302E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56382E1
einzel_imon=7.82337E-6
window_vset=0.0E0
window_vmon=2.13631E-1
window_imon=-8.50857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86796E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.52997E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.48711E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.3214E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41521E0
defgridb_imon=6.32025E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33195E1
os_fil1_imon=9.41256E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07798E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59921E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31753E1
cs_fil1_imon=7.27004E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68534E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61763E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.17782E-2
os_fil2_imon=-2.4375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.65572E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28778E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.80231E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21743E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.19819E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27553E-1
res40_imon=-2.39734E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=244
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.15868E-1	-7.98368E-1	-9.13141E0	-9.14216E0	4.64916E-3	9.408E-2	2.75202E1	-3.26777E1	-3.26236E1	2.68036E1	1.20092E-7	2.52448E-3	2.52448E-3	6.31269E-3	2.99845E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.15821E-1	-7.98583E-1	-9.13143E0	-9.14223E0	4.74453E-3	9.35555E-2	2.73968E1	-3.26329E1	-3.26441E1	2.68101E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.15582E-1	-7.98583E-1	-9.13186E0	-9.14192E0	4.79221E-3	9.34362E-2	2.72169E1	-3.26715E1	-3.26511E1	2.6811E1	1.19775E-7	2.52407E-3	2.52407E-3	6.3131E-3	3.00794E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.15678E-1	-7.98583E-1	-9.13174E0	-9.14214E0	4.74453E-3	9.36985E-2	2.74565E1	-3.26669E1	-3.26152E1	2.68178E1	1.19782E-7	2.5199E-3	2.5199E-3	6.33341E-3	2.98522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.15821E-1	-7.98392E-1	-9.13174E0	-9.14218E0	4.673E-3	9.377E-2	2.72799E1	-3.26915E1	-3.26362E1	2.68064E1	1.19653E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.15868E-1	-7.98464E-1	-9.13169E0	-9.14218E0	4.91142E-3	9.39369E-2	2.74601E1	-3.26723E1	-3.26104E1	2.6822E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.1594E-1	-7.98464E-1	-9.13136E0	-9.1419E0	4.72069E-3	9.39846E-2	2.71865E1	-3.26467E1	-3.26201E1	2.68274E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.1594E-1	-7.98512E-1	-9.13141E0	-9.1418E0	4.79221E-3	9.37462E-2	2.73544E1	-3.26789E1	-3.26152E1	2.6814E1	1.19595E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16154E-1	-7.98345E-1	-9.13141E0	-9.14176E0	4.45843E-3	9.38177E-2	2.73369E1	-3.26452E1	-3.26074E1	2.68026E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.15988E-1	-7.98202E-1	-9.13131E0	-9.14178E0	4.55379E-3	9.41038E-2	2.73405E1	-3.2647E1	-3.25779E1	2.68105E1	1.20122E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.97445E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0968E0	-8.16059E-1	-7.98345E-1	-9.13131E0	-9.14209E0	4.50611E-3	9.39131E-2	2.72638E1	-3.26844E1	-3.26526E1	2.68004E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.1594E-1	-7.98631E-1	-9.13136E0	-9.14197E0	4.26769E-3	9.42469E-2	2.731E1	-3.26707E1	-3.26076E1	2.6807E1	1.19749E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.15725E-1	-7.98559E-1	-9.13146E0	-9.14226E0	4.48227E-3	9.39846E-2	2.72927E1	-3.2659E1	-3.26372E1	2.68046E1	1.19713E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99083E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.15868E-1	-7.98488E-1	-9.13153E0	-9.14204E0	4.72069E-3	9.37939E-2	2.72373E1	-3.26703E1	-3.26354E1	2.67902E1	1.19902E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.15797E-1	-7.98416E-1	-9.13165E0	-9.14171E0	4.64916E-3	9.39369E-2	2.73345E1	-3.26729E1	-3.26338E1	2.68088E1	1.20209E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.0071E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.15797E-1	-7.9844E-1	-9.13179E0	-9.14197E0	4.74453E-3	9.39608E-2	2.73617E1	-3.26738E1	-3.26378E1	2.67908E1	1.19705E-7	2.52428E-3	2.52428E-3	6.34588E-3	3.02922E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.15773E-1	-7.98512E-1	-9.13115E0	-9.14152E0	4.673E-3	9.36031E-2	2.72586E1	-3.26621E1	-3.25991E1	2.6789E1	1.20055E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16011E-1	-7.98392E-1	-9.13167E0	-9.14187E0	4.26769E-3	9.408E-2	2.72506E1	-3.26602E1	-3.26359E1	2.67794E1	1.19925E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.02277E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16226E-1	-7.98368E-1	-9.13153E0	-9.14185E0	4.673E-3	9.41992E-2	2.71325E1	-3.2648E1	-3.26401E1	2.68244E1	1.19841E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.01356E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16131E-1	-7.9875E-1	-9.13146E0	-9.14166E0	4.79221E-3	9.408E-2	2.73129E1	-3.26645E1	-3.26278E1	2.67974E1	1.19819E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.0041E-1