[Scan]
initial_time=2016-01-28T21:36:47
final_time=2016-01-28T21:37:06
ip_count=19
run=1026
dataset=8
scan=627
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.39156E-8
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=2.01715E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=2.90918E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-2.34962E-10
mult1=-1.01859E-8
mult2=-2.6228E-9
rf_tmon=-4.83687E-3
rf_agc=3.34598E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.72465E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63667E0
bslens_imon=2.67161E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1997E1
lens5a_imon=1.99309E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04883E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53942E1
cs_ef1b_imon=3.18013E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0457E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04572E1
cs_ea1_imon=1.08403E-5
lens1_vset=-5.0E0
lens1_vmon=-5.435E0
lens1_imon=2.70467E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64484E1
os_ef1alow_imon=3.00086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03488E1
cs_ea2_imon=1.39109E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.03866E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.12904E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11329E1
os_restr1_imon=4.30215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15263E1
os_ea1_imon=2.46617E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63698E1
os_ef1bup_imon=3.08132E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22333E0
cs_ionrep_imon=9.33438E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.96491E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.09749E-8
tplens_vset=1.4E-1
tplens_vmon=1.64388E0
tplens_imon=-2.70438E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.49467E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26308E1
iondef2_imon=1.56556E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.94727E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26679E0
ionrepsh_imon=8.52265E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33897E1
lens5b_imon=2.1716E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74557E1
cs_ef2b_imon=3.13597E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43697E0
os_ea2_imon=-4.32049E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71208E1
cs_ef2a_imon=3.1966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08887E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90147E-1
os_ef2bup_imon=-5.14547E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10918E1
os_restr2_imon=3.36501E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.30332E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01871E1
cs_anode2_imon=2.10002E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.08954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.09214E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.7575E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.1153E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11767E0
cs_ionaccel_imon=-7.40451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.71029E-6
window_vset=0.0E0
window_vmon=2.5128E-1
window_imon=-9.35065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86862E1
mask2_imon=-6.0946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.43546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.28119E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36984E0
defgridb_imon=6.29316E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33158E1
os_fil1_imon=9.41784E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60202E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31765E1
cs_fil1_imon=6.68147E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.87514E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61858E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.0016E-2
os_fil2_imon=-2.38805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40348E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28845E-1
cs_fil2_imon=-2.64379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52919E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21763E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=3.00144E-1
chamber_ion_pmon=1.20031E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78523E-1
res40_imon=-2.36473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.15868E-1	-7.98416E-1	-9.13143E0	-9.14199E0	4.64916E-3	9.377E-2	2.74697E1	-3.26771E1	-3.259E1	2.68088E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9978E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.15535E-1	-7.98512E-1	-9.13167E0	-9.14199E0	4.74453E-3	9.3627E-2	2.74962E1	-3.26837E1	-3.25894E1	2.67974E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9952E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.1563E-1	-7.98416E-1	-9.13155E0	-9.14204E0	4.8399E-3	9.3627E-2	2.73948E1	-3.26679E1	-3.26472E1	2.6819E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.15892E-1	-7.9813E-1	-9.13153E0	-9.14195E0	4.74453E-3	9.36747E-2	2.73712E1	-3.26741E1	-3.26458E1	2.67782E1	1.19913E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.15558E-1	-7.98225E-1	-9.13119E0	-9.14192E0	4.76837E-3	9.377E-2	2.72414E1	-3.26543E1	-3.26095E1	2.68001E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01871E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09665E0	-8.15701E-1	-7.98106E-1	-9.13141E0	-9.14199E0	4.81606E-3	9.36031E-2	2.73557E1	-3.26854E1	-3.26057E1	2.67892E1	1.19697E-7	2.51096E-3	2.51096E-3	6.35601E-3	3.02253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.15582E-1	-7.98368E-1	-9.13155E0	-9.1419E0	4.88758E-3	9.36508E-2	2.72227E1	-3.26617E1	-3.25741E1	2.68419E1	1.20194E-7	2.51623E-3	2.51623E-3	6.3275E-3	3.02449E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.15654E-1	-7.98297E-1	-9.13131E0	-9.14235E0	5.05447E-3	9.35555E-2	2.7212E1	-3.26524E1	-3.26242E1	2.6807E1	1.20076E-7	2.52029E-3	2.52029E-3	6.33706E-3	3.00761E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.15678E-1	-7.98273E-1	-9.13122E0	-9.14226E0	4.72069E-3	9.38892E-2	2.74361E1	-3.26524E1	-3.26579E1	2.68418E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.03449E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.15487E-1	-7.98273E-1	-9.13162E0	-9.14209E0	4.74453E-3	9.38892E-2	2.73327E1	-3.26873E1	-3.25858E1	2.68256E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.15463E-1	-7.98321E-1	-9.13126E0	-9.14192E0	4.79221E-3	9.37939E-2	2.71635E1	-3.26968E1	-3.25959E1	2.68036E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-8.15654E-1	-7.97987E-1	-9.13146E0	-9.14197E0	4.31538E-3	9.36747E-2	2.73081E1	-3.26549E1	-3.26452E1	2.68028E1	1.19851E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.15701E-1	-7.98035E-1	-9.13136E0	-9.14187E0	4.62532E-3	9.39608E-2	2.74461E1	-3.26679E1	-3.26449E1	2.67998E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.15892E-1	-7.98059E-1	-9.13179E0	-9.14166E0	4.69685E-3	9.43184E-2	2.73435E1	-3.26741E1	-3.26332E1	2.68172E1	1.198E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.02253E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.15821E-1	-7.97868E-1	-9.13179E0	-9.14173E0	4.8399E-3	9.4223E-2	2.73309E1	-3.26651E1	-3.25936E1	2.68058E1	1.19861E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.15654E-1	-7.98011E-1	-9.1316E0	-9.1419E0	4.95911E-3	9.39131E-2	2.71945E1	-3.2629E1	-3.2632E1	2.68466E1	1.19835E-7	2.51826E-3	2.51826E-3	6.31563E-3	3.00302E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.15511E-1	-7.9782E-1	-9.13186E0	-9.14178E0	4.95911E-3	9.41277E-2	2.72871E1	-3.26359E1	-3.26422E1	2.67995E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.15678E-1	-7.98154E-1	-9.13172E0	-9.14173E0	5.03063E-3	9.40323E-2	2.72922E1	-3.26358E1	-3.26248E1	2.68118E1	1.19979E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.00741E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.15845E-1	-7.9813E-1	-9.13162E0	-9.14204E0	4.74453E-3	9.37939E-2	2.74024E1	-3.26566E1	-3.26474E1	2.67945E1	1.20031E-7	2.51915E-3	2.51915E-3	6.28511E-3	3.00942E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16011E-1	-7.97749E-1	-9.13143E0	-9.14211E0	5.126E-3	9.38416E-2	2.73309E1	-3.26308E1	-3.2614E1	2.68304E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00144E-1